Low temperature fluoride glasses and glazes

Patent metadata

Field	Value
Publication number	US-9957192-B2
Application number	US-201715418611-A
Country	US
Kind code	B2
Filing date	Jan 27, 2017
Priority date	Mar 29, 2016
Publication date	May 1, 2018
Grant date	May 1, 2018

Abstract

An article comprises a body having a coating. The coating comprising a eutectic system having a super-lattice of a first fluoride and a second fluoride. The coating includes a glaze on a surface of the coating, the glaze comprising the eutectic system having the super-lattice of the first fluoride and the second fluoride.

First claim

What is claimed is:

1. A method comprising:
mixing a first fluoride having a first melting temperature with a second fluoride having a second melting temperature that is lower than the first melting temperature to form a mixture comprising the first fluoride and the second fluoride, wherein the second fluoride is ZrF 4 ;
melting the first fluoride and the second fluoride by heating the mixture of the first fluoride and the second fluoride to a first temperature above at least the second melting temperature;
cooling the mixture to form a material comprising a eutectic system having a super-lattice of the first fluoride and the second fluoride, wherein the eutectic system has a third melting temperature that is below the first melting temperature and the second melting temperature;
grinding the material comprising the eutectic system into a powder;
forming an article or a coating using the powder; and
heating the article or the coating to a second temperature that is below the first melting temperature, below the second melting temperature and above the third melting temperature to cause at least a portion of the article or the coating to transform into at least one of a glaze or a glass ceramic comprising the eutectic system.

2. The method of claim 1 , wherein forming the article using the powder comprises:
forming a slurry from the powder; and
casting the slurry into a shape in a mold, wherein the article is heated to transform a surface of the article into the glaze comprising the eutectic system.

3. The method of claim 1 , wherein forming the article using the powder comprises:
melting the powder into a molten mixture of the first fluoride and the second fluoride; and
casting the molten mixture into a shape in a mold.

4. The method of claim 1 , wherein forming the coating using the powder comprises:
forming a slurry from the powder; and
performing one of dip coating, spin casting, drop casting, spray coating, or doctor blade coating to apply the slurry to an object, wherein the coating is heated to transform at least the portion of the coating into the glaze comprising the eutectic system.

5. The method of claim 1 , wherein:
the coating has a first thickness of 1 micron to 200 microns; and
the glaze has a second thickness that is 50% to 100% of the first thickness of the coating.

6. The method of claim 1 , wherein the second fluoride is ZrF 4 and the first fluoride is selected from a group consisting of CaF 2 , MgF 2 , SrF 2 , AlF 3 , ErF 3 , LaF 3 , NdF 3 , ScF 3 , CeF 4 , HfF 4 , TiF 3 , and YF 3 .

7. The method of claim 1 , wherein the second fluoride is ZrF 4 , the first fluoride is LaF 3 , the mixture comprises approximately 23-37 mole % ZrF 4 and approximately 63-77 mole % LaF 3 , the first melting temperature is 1490° C., the second melting temperature is 910° C., and the third melting temperature is about 770° C.

8. The method of claim 1 , further comprising:
mixing a third fluoride having a fourth melting temperature with the first fluoride and the second fluoride to form the mixture;
melting the first fluoride, the second fluoride and the third fluoride by heating the mixture to the first temperature; and
cooling the mixture to form the material comprising the eutectic system having the super-lattice of the first fluoride, the second fluoride and the third fluoride.

9. A method comprising:
mixing a first fluoride having a first melting temperature with a second fluoride having a second melting temperature that is lower than the first melting temperature to form a mixture comprising the first fluoride and the second fluoride;
forming a molten mixture of the first fluoride and the second fluoride by heating the mixture of the first fluoride and the second fluoride to a first temperature above at least the second melting temperature;
casting the molten mixture of the first fluoride and the second fluoride in a mold; and
cooling the molten mixture to form an article comprising a eutectic system having a super-lattice of the first fluoride and the second fluoride, wherein the eutectic system has a third melting temperature that is below the first melting temperature and the second melting temperature,
wherein the first fluoride is selected from a group consisting of CaF 2 , MgF 2 SrF 2 ErF 3 , NdF 3 , ScF 3 , CeF 4 , TiF 3 , HfF4 and YF 3 .

10. The method of claim 9 , wherein the article is a glass ceramic comprising a network of the first fluoride and the second fluoride.

11. The method of claim 9 , wherein the second fluoride is selected from a group consisting of CaF 2 , MgF 2 , SrF 2 , AlF 3 , ErF 3 , LaF 3 , NdF 3 , ScF 3 , CeF 4 , TiF 3 , HfF4, ZrF4, and YF 3 .

12. The method of claim 9 , wherein the second fluoride is ZrF 4 .

Assignees

• Applied Materials Inc

Inventors

• Lee Chengtsin
• Sun Jennifer Y

Classifications

• C03C10/16

  Halogen containing crystalline phase · CPC title

• C03C10/00

  Devitrified glass ceramics, i.e. glass ceramics having a crystalline phase dispersed in a glassy phase and constituting at least 50% by weight of the total composition · CPC title

• C03C17/22 Primary

  with other inorganic material (C03C17/34, C03C17/44 take precedence) · CPC title

• C03C2217/285

  Fluorides · CPC title

• C03C4/18

  for ion-sensitive glass · CPC title