Method of processing substrate, method of manufacturing semiconductor device, recording medium, and substrate processing apparatus
US-2023317420-A1 · Oct 5, 2023 · US
US9952606B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9952606-B2 |
| Application number | US-201414911116-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jul 15, 2014 |
| Priority date | Aug 30, 2013 |
| Publication date | Apr 24, 2018 |
| Grant date | Apr 24, 2018 |
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Official abstract text for this publication.
In an embodiment, control is performed to operate a three-way valve in accordance with a reaching ratio of pH adjustment. When process of certain steps is performed, bubbles of ammonia generated in a nebulizer can be extruded by air so as to be injected from an injection port together with aqua ammonia remaining in the nebulizer. Therefore, the pH adjustment can be performed while a large amount of bubbles of ammonia are prevented from being generated in the nebulizer.
Opening claim text (preview).
The invention claimed is: 1. An automatic pH adjustment device comprising: a container configured to accommodate a liquid sample to which a pH indicator is added, color of the pH indicator changes in accordance with pH; an adjusting liquid bottle configured to store aqua ammonia or carbonated water used as a pH adjusting liquid; a nebulizer that is provided with an injection port disposed to face a sample liquid surface in the container and is configured to inject from the injection port the pH adjusting liquid stored in the adjusting liquid bottle and atomized by a carrier gas; a multi-way valve that is disposed between the nebulizer and the adjusting liquid bottle and is configured to switch between a liquid injection state in which the nebulizer is allowed to communicate with the adjusting liquid bottle to inject the pH adjusting liquid from the injection port, and an air injection state in which the nebulizer is allowed to communicate with outer air to inject air from the injection port; a detecting device configured to detect the intensity of light radiated from the outside of the container and transmitted through the container; and a control device configured to switch the communication state of the multi-way valve on the basis of the intensity of light detected by the detecting device, wherein the detecting device is configured to detect the intensity of light of a specific wavelength absorbed by the pH indicator if the sample is adjusted to target pH and the intensity of light of a reference wavelength not absorbed by the pH indicator if the sample is adjusted to the target pH; and the control device is configured to calculate an intensity ratio from the intensity of light of the specific wavelength detected by the detection device and the intensity of light of the reference wavelength detected by the detection device, and is configured to switch the communication state of the multi-way valve after comparing the calculated intensity ratio with a target intensity ratio set in accordance with the target pH. 2. The automatic pH adjustment device according to claim 1 , wherein the control device is also configured to reduce the period of the liquid injection state as the ratio approaches 1, when the ratio of the calculated intensity ratio with respect to the target intensity ratio is in a predetermined range including 1.
with fluid transport, e.g. in multi-compartment structures · CPC title
Auxiliary integrated devices, integrated components · CPC title
Process control and prevention of errors · CPC title
Indicating pH value · CPC title
Details of spraying plant or spraying apparatus not otherwise provided for; Accessories · CPC title
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