Inspection methods for pecvd coatings
US-2015098084-A1 · Apr 9, 2015 · US
US9952147B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9952147-B2 |
| Application number | US-201414916654-A |
| Country | US |
| Kind code | B2 |
| Filing date | Sep 12, 2014 |
| Priority date | Sep 12, 2013 |
| Publication date | Apr 24, 2018 |
| Grant date | Apr 24, 2018 |
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The invention is directed to a non-destructive method of detecting whether a coating or deposit ( 30, 34 ) of (a) SiO x Cy or SiN x C y and/or (b) of SiO x is present on or near a surface of an article ( 12 ), such as a disposable thermoplastic medical article. The method includes impinging infrared light ( 216 ) having a wave number in at least a portion of a desired range onto at least a first surface being examined for the presence of the one or more coatings or deposits. At least a portion ( 224 ) of the infrared light impinged on the first surface is collected (at 222 ) and the response output, which may include for example the maximum intensity and/or peak area of the collected infrared light at an infrared spectroscopy peak, is used to indicate the presence of the one or more coatings or deposits.
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What is claimed: 1. A non-destructive method of detecting whether a coating or deposit of SiO x C y or SiN x C y , where x is from about 0.5 to about 2.4 and y is from about 0.6 to about 3, is present on or near an interior distal end surface of an article, the method comprising: providing as the article a generally cylindrical vessel comprising a distal end, a proximal end, a lumen, an interior distal end surface defining at least a portion of the lumen, and a back opening at the proximal end of the generally cylindrical vessel, impinging infrared light having a wave number in one or more of (a) at least a portion of a range between 950 and 1230 cm −1 and (b) at least a portion of a range between 1230 and 1300 cm −1 from apparatus spaced from the interior distal end surface, onto the interior distal end surface, to examine the interior distal end surface for the presence of a coating or deposit of SiO x C y or SiN x C y , reflecting the impinged infrared light from the interior distal end surface through the back opening of the generally cylindrical vessel; collecting at least a portion of the infrared light reflected through the back opening of the generally cylindrical vessel; and detecting whether the coating or deposit of SiO x C y or SiN x C y is present by measuring the response output of the collected infrared light in one or more of (a) at least a portion of a range between 950 and 1230 cm −1 and (b) at least a portion of a range between 1230 and 1300 cm −1 . 2. The method of claim 1 , in which the coating or deposit of SiO x C y or SiN x C y is a tie coating or layer for increasing adhesion between the interior distal end surface and a subsequent coating or layer. 3. The method of claim 1 , in which the coating or deposit of SiO x C y or SiN x C y is a pH protective coating or layer having the property of reducing the dissolution of silicon from the interior distal end surface by an aqueous fluid having a pH of at least 5. 4. The method of claim 1 , in which a coating or deposit of SiO x , where x is from about 1.5 to about 2.9, is also present on the interior distal end surface of the article. 5. The method of claim 1 , in which the interior distal end surface of the article comprises a first coating or deposit of SiO x C y or SiN x C y , where x is from about 0.5 to about 2.4 and y is from about 0.6 to about 3, and a second coating or deposit of SiO x C y or SiN x C y , where x is from about 0.5 to about 2.4 and y is from about 0.6 to about 3, and wherein detecting the presence of at least one of the first coating or deposit and the second coating or deposit comprises measuring the response output of the collected infrared light at an infrared spectroscopy peak in one or more of (a) at least a portion of a range between 950 and 1230 cm −1 and (b) at least a portion of a range between 1230 and 1300 cm −1 , the measured response output being indicative of at least one of the first coating or deposit of SiO x C y or SiN x C y and the second coating or deposit of SiO x C y or SiN x C y . 6. The method of claim 1 , in which the impinging of infrared light onto at least a first surface and the collecting at least a portion of the infrared light impinged on the first surface are performed on a production line for the article. 7. The method of claim 1 , in which the measured response output comprises the maximum intensity at an infrared spectroscopy peak, a peak area of the collected infrared light at an infrared spectroscopy peak, or both. 8. The method of claim 7 , in which the article is assigned a status of either passing or failing based on the comparison between the maximum intensity and/or peak area of the collected infrared light and a predetermined parameter. 9. The method of claim 1 , in which collecting the infrared light is carried out by passing the light from the first surface through the opening to a collector positioned entirely outside the lumen. 10. The method of claim 1 , in which the interior distal end surface is located generally opposite the back opening. 11. The invention of claim 1 , in which the infrared light is provided by a frequency tunable laser. 12. The invention of claim 1 , in which the infrared light travels at least about one inch before it impinges onto the first surface. 13. The invention of claim 1 , in which a coating or deposit of mold lubricant is present, directly or indirectly, on a surface of the article. 14. The method of claim 1 , in which the article comprises a syringe barrel. 15. The method of claim 14 , in which the syringe barrel comprises a needle and the interior distal end surface comprises a land surface surrounding the needle, the land surface comprising a diameter from greater than 1.5 mm to about 3 mm. 16. The method of claim 1 , in which the article comprises a vial. 17. The method of claim 1 , in which the combination of the impinging and collecting steps is performed in four seconds or less, optionally three seconds or less, optionally two seconds or less, optionally one second or less, optionally one-half of a second or less. 18. A non-destructive method of detecting whether a coating or deposit of SiO x , where x is from about 1.5 to about 2.9, is present on or near an interior distal end surface of an article, the method comprising: providing as the article a generally cylindrical vessel comprising a distal end, a proximal end, a lumen, an interior distal end surface defining at least a portion of the lumen, and a back opening at the proximal end of the generally cylindrical vessel, impinging infrared light having a wave number in at least a portion of a range from about 1060 to about 1080 cm −1 from apparatus spaced from the interior distal end surface, through the back opening of the generally cylindrical vessel, onto the interior distal end surface to examine the interior distal end surface for the presence of a coating or deposit of SiO x , reflecting the impinged infrared light from the interior distal end surface through the back opening of the generally cylindrical vessel, collecting at least a portion of the infrared light reflected through the back opening of the generally cylindrical vessel; and measuring the response output of the collected infrared light in at least a portion of the range from about 1060 to about 1080 cm −1 , the measured response output being indicative of a coating or deposit of SiO x . 19. The method of claim 18 , in which the coating or deposit of SiO x is a gas barrier coating or layer. 20. The method of claim 18 , in which a coating or deposit of SiO x C y or SiN x C y , where x is from about 0.5 to about 2.4 and y is from about 0.6 to about 3, is also present on or near a surface of an article. 21. A non-destructive method of detecting whether (a) a coating or deposit of SiO x C y or SiN x C y , where x is from about 0.5 to about 2.4 and y is from about 0.6 to about 3 and (b) a coating or deposit of SiO x , where x is from about 1.5 to about 2.9, are present on or near an interior distal end surface of an article, the method comprising: providing as the article a generally cylindrical vessel comprising a distal end, a proximal end, a lumen, an interior distal end surface defining at least a portion of the lumen, and a back opening at the proximal end of the generally cylindrical vessel, impinging infrared light from apparatus spaced from the interior distal end surface, onto the interior distal end surface to examine the interior distal end surface for the presence of the coatin
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