Measurement device and method of measuring

Patent metadata

Field	Value
Publication number	US-9952131-B2
Application number	US-201514712168-A
Country	US
Kind code	B2
Filing date	May 14, 2015
Priority date	May 28, 2014
Publication date	Apr 24, 2018
Grant date	Apr 24, 2018

Abstract

A measurement device includes: a mass measurer that measures a mass of particles in gas; a humidity changer that changes a humidity of atmosphere to which the particles are exposed; and a calculator that calculates information indicating a correlation of the mass with respect to the humidity.

First claim

What is claimed is:

1. A measurement device, comprising:
a tank into which gas is introduced from an atmosphere;
a humidity changer that changes humidity of the gas in the tank;
a humidity sensor that measures the humidity of the gas in the tank;
a mass measurer that measures mass of particles being adsorbed on a surface of a quartz crystal oscillator installed in the tank;
a concentration measurer that measures repeatedly a number concentration of particles in the atmosphere; and
a processor that acquires a function indicating a correlation of the mass of particles in the gas introduced into the tank with respect to the humidity changed by changing the humidity of the gas in the tank, and calculates a mass concentration of the particles in the atmosphere on the basis of the function, the number concentration, and humidity of the atmosphere,
wherein the processor repeatedly acquires the function each time the number concentration is measured, and repeatedly calculates the mass concentration on the basis of the measured number concentration, the humidity of the atmosphere, and a function acquired immediately before calculating the mass concentration among repeatedly acquired functions;
a frequency of calculating the function is lower than a frequency of calculating the mass concentration.

2. The measurement device as claimed in claim 1 , wherein the concentration measurer measures the number concentration with use of a light scattering detection method.

3. The measurement device as claimed in claim 1 , wherein the humidity changer changes the humidity of the gas in the tank by heating or cooling the tank.

4. The measurement device as claimed in claim 1 , wherein the humidity changer continuously changes the humidity of the gas in the tank.

5. The measurement device as claimed in claim 1 , wherein the humidity changer continuously increases or continuously decreases the humidity of the gas in the tank.

6. The measurement device as claimed in claim 1 , further comprising:
another humidity sensor that measures the humidity of the atmosphere, wherein the concentration measurer and the another humidity sensor respectively perform measuring of the number concentration of the particles in the atmosphere and measuring of the humidity of the atmosphere simultaneously.

7. The measurement device as claimed in claim 1 , further comprising:
another humidity sensor that measures the humidity of the atmosphere.

8. The measurement device as claimed in claim 1 , wherein the processor calculates the function each time the mass concentration of particles is calculated multiple times, and calculates the mass concentration of the particles using a function acquired immediately before calculating the mass concentration among repeatedly acquired functions.

9. A method of measuring, comprising:
introducing gas into a tank from an atmosphere;
measuring humidity of the gas in the tank;
measuring mass of particles being adsorbed on a surface of a quartz crystal oscillator installed in the tank;
measuring a number concentration of particles in the atmosphere repeatedly;
measuring humidity of the atmosphere;
changing the humidity of the gas in the tank;
acquiring a function indicating a correlation of the mass of particles in the gas introduced into the tank with respect to the humidity changed by changing the humidity of the gas in the tank; and
calculating a mass concentration of the particles in the atmosphere on the basis of the function, the number concentration, and humidity of the atmosphere,
wherein the acquiring the function is repeatedly executed each time the number concentration is measured, and the calculating the mass concentration is repeatedly executed on the basis of the measured number concentration, the humidity of the atmosphere, and a function acquired immediately before calculating the mass concentration among repeatedly acquired functions;
a frequency of calculating the function is lower than a frequency of calculating the mass concentration.

Assignees

• Fujitsu Ltd

Inventors

• Takasu Ryozo

Classifications

• G01N15/06 Primary

  Investigating concentration of particle suspensions (by weighing G01N5/00; investigating sedimentation of particle suspensions G01N15/04; investigating individual particles G01N15/10) · CPC title

• G01N2015/0693

  Physics · mapped topic

• G01N2015/0046

  in gas, e.g. smoke · CPC title

• G01N15/0606

  by collecting particles on a support · CPC title

• G01N5/02

  by absorbing or adsorbing components of a material and determining change of weight of the adsorbent, e.g. determining moisture content {(absorption bulbs B01D53/00)} · CPC title