System and method for a packaged MEMS device

Patent metadata

Field	Value
Publication number	US-9952111-B2
Application number	US-201514687276-A
Country	US
Kind code	B2
Filing date	Apr 15, 2015
Priority date	Apr 15, 2015
Publication date	Apr 24, 2018
Grant date	Apr 24, 2018

Abstract

According to an embodiment, a device includes a substrate, a transducer die disposed over the substrate, a cover disposed over the transducer die, and a support structure connecting the cover to the substrate. The support structure includes a port configured to allow transfer of fluidic signals between an ambient environment and the transducer die.

First claim

What is claimed is:

1. A device comprising:
a substrate;
a transducer die disposed over the substrate;
a cover disposed over the transducer die; and
a support structure connecting the cover to the substrate, wherein the support structure comprises a port configured to allow transfer of fluidic signals between an ambient environment and the transducer die, wherein the support structure comprises a plurality of attachment pads disposed on the substrate, and the port comprises a plurality of gaps between the plurality of attachment pads.

2. The device of claim 1 , wherein the plurality of attachment pads comprises a plurality of metal attachment pads.

3. The device of claim 1 , wherein the plurality of attachment pads comprises a plurality of resin attachment pads.

4. The device of claim 1 , wherein each gap of the plurality of gaps comprises a height between the substrate and the cover that is less than or equal to 100 μm.

5. The device of claim 1 , wherein the port is gas permeable and liquid impermeable.

6. The device of claim 1 , wherein the port comprises a through hole.

7. The device of claim 1 , wherein the port comprises a polymer that is gas permeable and liquid impermeable.

8. The device of claim 1 , wherein the substrate comprises a printed circuit board.

9. The device of claim 1 , wherein the transducer die comprises a MEMS pressure transducer.

10. The device of claim 1 , further comprising an integrated circuit die disposed over the substrate and below the cover.

11. The device of claim 10 , wherein the transducer die is disposed on the integrated circuit die and electrically connected to the integrated circuit die.

12. The device of claim 1 , further comprising an additional port in the substrate, the additional port configured to allow transfer of fluidic signals between an ambient environment and the transducer die.

13. A method of operating a device, the method comprising:
receiving a fluidic signal from an ambient environment through a port in a support structure, wherein the support structure connects a cover to a substrate, the support structure comprises a plurality of attachment pads disposed on the substrate, and the port comprises a plurality of gaps between the plurality of attachment pads; and
generating an electrical signal based on the fluidic signal at a transducer die disposed over the substrate and below the cover.

14. The method of claim 13 , wherein receiving a fluidic signal comprises receiving a pressure signal from the ambient environment through the port.

15. The method of claim 14 , wherein generating an electrical signal comprises generating an electrical signal based on the pressure signal using a capacitive MEMS pressure transducer disposed on the transducer die.

16. A method of forming a device, the method comprising:
disposing a transducer die over a substrate;
disposing a support structure on the substrate, wherein the support structure comprises a port configured to allow transfer of fluidic signals between an ambient environment and the transducer die, disposing the support structure on the substrate comprises disposing a plurality of attachment pads on the substrate, the plurality of attachment pads comprises a plurality of gaps between the plurality of attachment pads, and the plurality of gaps comprises the port; and
disposing a cover on the support structure over the transducer die.

17. The method of claim 16 , further comprising disposing an integrated circuit over the substrate and below the cover.

18. The method of claim 16 , further comprising disposing a waterproofing material in the plurality of gaps, wherein the waterproofing material is gas permeable and liquid impermeable.

19. The method of claim 18 , wherein the waterproofing material is a polymer.

20. The method of claim 16 , wherein disposing a transducer die comprises disposing a MEMS pressure transducer over the substrate.

21. A MEMS pressure sensor comprising:
a printed circuit board;
an integrated circuit coupled to the printed circuit board;
a MEMS pressure transducer coupled to the printed circuit board;
a plurality of attachment pads disposed on the printed circuit board surrounding the MEMS pressure transducer and the integrated circuit, the plurality of attachment pads comprising a plurality of gaps between each attachment pad; and
a cover attached to the printed circuit board by the plurality of attachment pads, wherein the plurality of gaps comprise openings between an ambient environment and the MEMS pressure transducer.

22. The MEMS pressure sensor of claim 21 , further comprising a through hole in the printed circuit board, wherein the through hole comprises an additional opening between an ambient environment and the MEMS pressure transducer.

23. The MEMS pressure sensor of claim 21 , wherein the MEMS pressure transducer is stacked on the integrated circuit.

Assignees

• Infineon Technologies Ag

Inventors

• Froemel Andreas

Classifications

• G01L9/0041

  Transmitting or indicating the displacement of flexible diaphragms · CPC title

• G01L9/0073 Primary

  using a semiconductive diaphragm · CPC title

• B81B2201/0264

  Pressure sensors · CPC title

• B81B2207/012

  the micromechanical device and the control or processing electronics being separate parts in the same package · CPC title

• B81B7/0061 Primary

  suitable for fluid transfer from the MEMS out of the package or vice versa, e.g. transfer of liquid, gas, sound · CPC title