High concentration doping in silicon

Patent metadata

Field	Value
Publication number	US-9947821-B2
Application number	US-201414905710-A
Country	US
Kind code	B2
Filing date	Jul 24, 2014
Priority date	Jul 26, 2013
Publication date	Apr 17, 2018
Grant date	Apr 17, 2018

Abstract

A silicon device, has a plurality of crystalline silicon regions. One crystalline silicon region is a doped crystalline silicon region. Deactivating some or all of the dopant atoms in the doped crystalline silicon region is achieved by introducing hydrogen atoms into the doped 5 crystalline silicon region, whereby the hydrogen coulombicly bonds with some or all of the dopant atoms to deactivate the respective dopant atoms. Deactivated dopant atoms may be reactivated by heating and illuminating the doped crystalline silicon region to break at least some of the dopant-hydrogen bonds while maintaining conditions to create a high concentration of neutral hydrogen atoms whereby 10 some of the hydrogen atoms diffuse from the doped crystalline silicon region without rebinding to the dopant atoms.

First claim

The invention claimed is:

1. A method for processing of a crystalline silicon device, having a plurality of crystalline silicon regions, at least one crystalline silicon region having a plurality of crystallographic defects or contaminants, the at least one crystalline silicon region being a doped crystalline silicon region in which some dopant atoms are deactivated by combining with a hydrogen atom, the method comprising:
reactivating some deactivated dopant atoms by heating and illuminating the doped crystalline silicon region to break at least some bonds between dopant atoms and hydrogen atoms while maintaining conditions to create a relatively high concentration of neutral or negative hydrogen atoms, whereby some of the hydrogen atoms diffuse from the doped crystalline silicon region without re-bonding to the dopant atoms; and
subsequently heating at least a portion of the doped crystalline silicon region to bond some or all of the neutral or negative hydrogen atoms to the crystallographic defects or contaminants in the at least one crystalline silicon region.

2. The method as claimed in claim 1 , wherein after heating and illuminating the doped crystalline silicon region, a cooling period is provided during which illumination is maintained to maintain the relatively high concentration of neutral or negative hydrogen atoms.

3. The method as claimed in claim 2 , wherein some or all of the deactivated dopant atoms in a selected crystalline silicon region are subsequently reactivated by subjecting the dopant atoms in the selected crystalline silicon region to heat and illuminating a crystalline silicon region adjacent to the selected crystalline silicon region, whereby electron hole pairs are generated to increase a proportion of minority carriers in the crystalline silicon region adjacent to the selected crystalline silicon region and such that the minority carriers generated in the crystalline silicon region adjacent to the selected crystalline silicon region diffuse to the selected crystalline silicon region.

4. The method as claimed in claim 3 , wherein the selected crystalline silicon region is allowed to cool to below 120° C. within a carrier lifetime of the minority carriers or within a life expectancy of neutral hydrogen atoms or a hydrogen atom of a same charge state as the dopant atoms in the selected crystalline silicon region.

5. The method as claimed in claim 3 , wherein heating, illumination, or both heating and illumination of the selected crystalline silicon region and the crystalline silicon region adjacent to the selected crystalline silicon region is performed with a laser.

6. The method as claimed in claim 1 , further comprising, prior to reactivating:
doping the crystalline silicon device with dopant atoms of a first dopant polarity to create the doped crystalline silicon region with a dopant atom concentration greater than a required final active dopant atom concentration in the doped crystalline silicon region, and
deactivating some of the dopant atoms in the doped crystalline silicon region by introducing hydrogen atoms into the doped crystalline silicon region, whereby some of the hydrogen atoms bond with some or all of the dopant atoms of the first dopant polarity to deactivate the dopant atoms having the first dopant polarity.

7. The method as claimed in claim 1 , wherein the doped crystalline silicon region is a surface region of the crystalline silicon device.

8. The method as claimed in claim 1 , wherein heating and illumination of the dopant atoms are performed with a laser.

9. The method as claimed in claim 8 , wherein the laser is scanned over a plurality of crystalline silicon regions.

10. The method as claimed in claim 1 , wherein hydrogen atoms are introduced into the crystalline silicon device by forming a dielectric hydrogen source on a surface of the at least one crystalline silicon region and subsequently heating the device to migrate the hydrogen atoms into the at least one crystalline silicon region.

11. The method as claimed in claim 10 , wherein hydrogen atoms are introduced into the crystalline silicon device from the dielectric hydrogen source to deactivate dopant atoms in a surface region of the at least one crystalline silicon region, by heating the device in an absence of illumination or in low illumination conditions.

12. The method as claimed in claim 10 , wherein dielectric hydrogen sources are formed on each of a front and a rear crystalline silicon surface of the crystalline silicon device.

13. The method as claimed in claim 10 , wherein the crystalline silicon device comprises a crystalline silicon surface n-type diffused layer through which hydrogen must diffuse, the crystalline silicon surface n-type diffused layer having a net active doping concentration of 1×10 20 atoms/cm 3 or less.

14. The method as claimed in claim 10 , wherein the crystalline silicon device comprises a crystalline silicon surface p-type diffused layer through which hydrogen must diffuse, the crystalline silicon surface p-type diffused layer having a net active doping concentration of 1×10 19 atoms/cm 3 or less.

15. The method as claimed in claim 1 , wherein heating of the crystalline silicon device comprises heating at least a crystalline silicon region of the device to at least 40° C. while simultaneously illuminating at least some of the crystalline silicon device with at least one light source, whereby a cumulative power of incident photons with sufficient energy to generate electron hole pairs within the crystalline silicon device is at least 20 mW/cm 2 .

16. The method as claimed in claim 1 , wherein illumination of the crystalline silicon device is from at least one light source and is provided at a level whereby a cumulative power of incident photons with sufficient energy to generate electron hole pairs within the crystalline silicon device is at least 50 mW/cm 2 , or 60 mW/cm 2 , or 70 mW/cm 2 , or 80 mW/cm 2 , or 90 mW/cm 2 , or 100 mW/cm 2 , or 150 mW/cm 2 , or 200 mW/cm 2 , or 300 mW/cm 2 , or 400 mW/cm 2 , or 500 mW/cm 2 , or 600 mW/cm 2 , or 700 mW/cm 2 , or 800 mW/cm 2 , or 900 mW/cm 2 , or 1000 mW/cm 2 , or 1500 mW/cm 2 , or 2000 mW/cm 2 , or 3000 mW/cm 2 , or 5000 mW/cm 2 , or 10000 mW/cm 2 , or 15000 mW/cm 2 , or 20000 mW/cm 2 , or up to a light intensity at which crystalline silicon begins to melt.

17. The method as claimed in claim 1 , wherein heating of the crystalline silicon device at a range of cumulative power comprises heating at least a region of the device to at least 100° C.

18. The method as claimed in claim 1 , wherein heating of the crystalline silicon device comprises heating the device to at least 140° C., to at least 180° C., to at least 200° C., or to at least 400° C.

19. The method as claimed in claim 1 , wherein heating of the crystalline silicon device comprises heating the device to at least 500° C., or to at least 600° C., or to at least 700° C., or to at least 800° C., or to at least 900° C., or to at least 1,000° C., or to at least 1,200° C. or to a temperature at which crystalline silicon begins to melt.

20. The method as claimed in claim 1 , wherein heating of the crystalline silicon device is followed by cooling the crystalline silicon device while simultaneously illuminating at least some of the crystalline silicon device with at least one light source, whereby a cumulative power of incident photons with sufficient energy to generate electron hole pairs within the crystalline silicon device is at least 20 mW/cm 2 .

21. The method as c

Assignees

• Newsouth Innovations Pty Ltd

Inventors

• Hallam Brett Jason
• Edwards Matthew Bruce
• Wenham Stuart Ross
• Hamer Phillip George
• Chan Catherine Emily
• Chong Chee Mun
• Lu Pei Hsuan
• Mai Ly
• Song Li Hui
• Sugianto Adeline
• Wenham Alison Maree
• Xu guang qi

Classifications

• H10P95/94

  Hydrogenation or deuterisation, e.g. using atomic hydrogen from a plasma · CPC title

• H10P95/90

  Thermal treatments, e.g. annealing or sintering · CPC title

• H10P32/171

  being group IV material · CPC title

• H10P32/141

  the applied layer comprising oxides only · CPC title

• H10P32/19

  Diffusion sources · CPC title