Workpiece stocker with circular configuration

Patent metadata

Field	Value
Publication number	US-9947565-B2
Application number	US-201113007580-A
Country	US
Kind code	B2
Filing date	Jan 14, 2011
Priority date	Jun 9, 2006
Publication date	Apr 17, 2018
Grant date	Apr 17, 2018

Abstract

An improved stocker configuration for storing workpieces in a fabrication facility is disclosed, employing workpiece compartments arranged stationarily around a robot handling assembly. The robot handler can be designed with three degrees of freedom, to improve speed, throughput and minimum particle generation. In addition, the stocker storage area is stationary with the movable components are the robot assembly, thus further contributing to the cleanliness of the storage stocker. The stocker configuration can be open storage area for fast access, space saving and ease of clean air purging. The stocker configuration can provide highly dense workpiece storage, utilizing a circumferential edge gripper robot handling assembly.

First claim

What is claimed is:

1. A stocker for storing a plurality of flat substrates, each flat substrate comprising two opposite flat surfaces and a peripheral edge, the stocker comprising:
a storage compartment for holding the flat substrates in a vertical direction;
an edge grip substrate handler for transferring the substrates, the edge grip substrate handler handling a substrate by the peripheral edge without extending to the flat surfaces;
an end effector substrate handler for transferring the substrates, the end effector substrate handler handling a substrate by extending to a flat surface of the substrate;
a load port for providing substrates to the storage compartment,
wherein the load port is configured for holding the substrates in a horizontal direction,
wherein the load port is configured so that the substrates are accessible by the end effector substrate handler and are not accessible by the edge grip substrate handler;

a station for receiving a substrate, wherein a substrate in the station can be handled by the edge grip handler and the end effector handler,
wherein the edge grip substrate handler is designed to access substrates in the storage compartment and in the station, and
wherein the end effector substrate handler is designed to access substrates in the load port and the station.

2. A stocker as in claim 1 wherein the station comprises a substrate support, wherein the substrate support is configured so that a substrate disposed on the substrate support is accessible by the edge grip substrate handler and by the end effector substrate handler.

3. A stocker as in claim 1 wherein the edge grip substrate handler comprises a claw-like tip to hold the substrate by the peripheral edge.

4. A stocker as in claim 3 wherein the claw-like tip is configured to handle substrates in the storage compartment having a substrate spacing equal or less than 5 mm.

5. A stocker as in claim 1 wherein the edge grip substrate handler is configured for handling the substrates in the compartment having a substrate spacing equal or less than 2.5 mm.

6. A stocker as in claim 1 wherein the storage compartment comprises a recess which is configured to accept a retainer for holding the substrates in place during movements of the storage compartment.

7. A stocker as in claim 1 wherein the station comprises a pre-aligner.

Assignees

• Rebstock Lutz
• Brooks Automation Inc

Inventors

• Rebstock Lutz

Classifications

• H10P72/3404 Primary

  Storage means · CPC title

• Y10S414/141

  includes means for gripping wafer · CPC title

• H01L21/67769 Primary

  Electricity · mapped topic

• Y10S414/137

  including means for charging or discharging wafer cassette · CPC title

• H10P72/3402

  Mechanical parts of transfer devices · CPC title