Variable optical retarder

Patent metadata

Field	Value
Publication number	US-9946134-B2
Application number	US-201313962069-A
Country	US
Kind code	B2
Filing date	Aug 8, 2013
Priority date	Aug 24, 2012
Publication date	Apr 17, 2018
Grant date	Apr 17, 2018

Abstract

A sub-wavelength grating is placed inside a liquid crystal variable optical retarder to reduce polarization dependence of the optical retardation generated by the variable optical retarder. A small thickness of the sub-wavelength grating, as compared to a conventional waveplate, reduces the driving voltage penalty due to the in-cell placement of the sub-wavelength grating.

First claim

What is claimed is:

1. A liquid crystal variable optical retarder comprising:
a pixel electrode;
a substantially transparent continuous flat electrode opposed to the pixel electrode;
a liquid crystal layer having a director and disposed between the pixel electrode and the substantially transparent continuous flat electrode, for imparting a variable optical phase shift to light impinging on the substantially transparent continuous flat electrode when a voltage is applied between the pixel electrode and the substantially transparent continuous flat electrode; and
a sub-wavelength grating disposed between the liquid crystal layer and the pixel electrode and having grating lines at an acute angle to the director,
wherein the grating lines comprise ridges defining gaps therebetween,
wherein the ridges are formed in a substrate and the pixel electrode is located in the substrate,
wherein the substrate, the ridges, and the pixel electrode are each located below a flat alignment layer that separates the liquid crystal layer from the ridges,
wherein neither the pixel electrode nor the substantially transparent continuous flat electrode includes a portion that extends into the sub-wavelength grating, and
wherein the pixel electrode extends downward in a direction opposite to the sub-wavelength grating.

2. The liquid crystal variable optical retarder of claim 1 , wherein the sub-wavelength grating comprises a dielectric or semiconductor grating.

3. The liquid crystal variable optical retarder of claim 1 , wherein the sub-wavelength grating comprises a reflective grating absent any metal therein.

4. The liquid crystal variable optical retarder of claim 1 , wherein the acute angle is 45+−5 degrees.

5. The liquid crystal variable optical retarder of claim 1 , wherein the sub-wavelength grating has a quarter-wave retardation in a single pass.

6. The liquid crystal variable optical retarder of claim 1 , wherein the sub-wavelength grating is a dielectric grating.

7. The liquid crystal variable optical retarder of claim 1 , wherein the ridges are made of tantala.

8. A variable optical retarder for imparting a variable phase delay to an optical beam impinging thereon, the variable optical retarder comprising:
a substrate;
a pixel electrode;
a sub-wavelength grating, disposed on and separate from the pixel electrode, for imparting a first optical retardation to the optical beam impinging thereon, the sub-wavelength grating having a plurality of grating lines running parallel to each other;
a liquid crystal layer, disposed on the sub-wavelength grating, for imparting a second optical retardation to the optical beam propagating there through; and
a substantially transparent backplane electrode disposed on the liquid crystal layer,
wherein the second optical retardation is varied when a voltage is applied between the pixel electrode and the substantially transparent backplane electrode, thereby imparting the variable phase delay to the optical beam propagating through the liquid crystal layer,
wherein a director of the liquid crystal layer forms an acute angle with the grating lines, whereby sensitivity of the variable optical retarder to a state of polarization of the optical beam is lessened,
wherein the grating lines comprise ridges defining gaps therebetween,
wherein the ridges are formed in the substrate and the pixel electrode is located in the substrate,
wherein the substrate, the ridges, and the pixel electrode are each located below a flat alignment layer that separates the liquid crystal layer from the ridges,
wherein neither the pixel electrode nor the substantially transparent backplane electrode includes a portion that extends into the sub-wavelength grating, and
wherein the pixel electrode extends downward in a direction opposite to the sub-wavelength grating.

9. The variable optical retarder of claim 8 , wherein the pixel electrode has a continuous flat top surface.

10. The variable optical retarder of claim 8 , wherein the sub-wavelength grating comprises a dielectric or a semiconductor.

11. The variable optical retarder of claim 8 , wherein the sub-wavelength grating comprises a dielectric grating absent any metal therein.

12. The variable optical retarder of claim 8 , wherein the sub-wavelength grating is reflective.

13. The variable optical retarder of claim 8 , wherein the sub-wavelength grating comprises at least one of silicon dioxide, tantala, or silicon.

14. The variable optical retarder of claim 8 , wherein
the acute angle is equal to 45+−5 degrees.

15. The variable optical retarder of claim 8 , further comprising:
a plurality of pixel electrodes under the liquid crystal layer, the sub-wavelength grating, and the substantially transparent backplane electrode.

16. The variable optical retarder of claim 15 , wherein
the substrate comprises a silicon substrate, and
the variable optical retarder further comprises driver circuitry, disposed on the silicon substrate under the plurality of pixel electrodes, for independently applying a voltage to each of the plurality of pixel electrodes.

17. The variable optical retarder of claim 8 , further comprising:
a cover plate, disposed on the substantially transparent backplane electrode,
wherein the cover plate has an anti-reflection coating.

18. The variable optical retarder of claim 8 , wherein the sub-wavelength grating has a quarter-wave retardation in a single pass.

19. The variable optical retarder of claim 8 , further comprising:
a plurality of pixel electrodes that extend into the substrate.

20. The variable optical retarder of claim 8 , wherein the ridges are made of tantala.

Assignees

• Lumentum Operations Llc

Inventors

• Miller John Michael
• Wills Gonzalo

Classifications

• G02F2201/307

  Reflective grating, i.e. Bragg grating · CPC title

• G02B5/3083 Primary

  Birefringent or phase retarding elements (G02B5/3008, G02B5/3016 take precedence; systems for polarisation control G02B27/286; manufacturing phase modulating patterns by lithographic processes G03F7/001) · CPC title

• G02F1/1533 Primary

  structural features not otherwise provided for · CPC title

• G02B5/32

  Holograms used as optical elements · CPC title

• G02F1/133504

  Diffusing, scattering, diffracting elements (associated to illuminating devices G02F1/133606) · CPC title