Light scanning apparatus, light scanning control apparatus, and light scanning unit

Patent metadata

Field	Value
Publication number	US-9946063-B2
Application number	US-201414283384-A
Country	US
Kind code	B2
Filing date	May 21, 2014
Priority date	Jun 3, 2013
Publication date	Apr 17, 2018
Grant date	Apr 17, 2018

Abstract

A light scanning apparatus includes torsion beams supporting a mirror supporting portion on opposite sides of the mirror supporting portion along an axis direction, the mirror supporting portion being swung around the axis direction by the torsion beams; a pair of drive beams sandwiching the mirror and the mirror supporting portion in a direction orthogonal to the axis direction; connection beams that connect mutually facing sides of each drive beam with the torsion beams; and a piezoelectric sensor formed on the connection beams and detecting displacement of the connection beams caused by a swing of the torsion beams around the axis when the mirror swings by a drive voltage, wherein a first bias voltage having a positive or negative polarity is applied to an upper electrode of the piezoelectric sensor, and a second bias voltage having an opposite polarity is applied to a lower electrode.

First claim

What is claimed is:

1. A light scanning apparatus comprising:
a mirror;
a mirror supporting portion that supports the mirror;
torsion beams that support the mirror supporting portion on opposite sides of the mirror supporting portion along an axis direction of an axis, the mirror supporting portion being swung around the axis direction by torsion of the torsion beams;
a pair of drive beams that sandwich the mirror and the mirror supporting portion in a direction orthogonal to the axis direction;
connection beams that connect mutually facing sides of each of the drive beams with the torsion beams; and
a piezoelectric sensor that is formed on the connection beams and detects displacement of the connection beams, the displacement caused by swinging of the torsion beams around the axis when the mirror swings by a drive voltage applied to the drive beams,
wherein the piezoelectric sensor includes a piezoelectric element provided inside one of the connection beams, an upper electrode formed on an upper surface of the piezoelectric element, and a lower electrode formed on a lower surface of the piezoelectric element,
wherein a first bias voltage having a positive or negative polarity is applied to the upper electrode formed on the upper surface of the piezoelectric element at the same time that a second bias voltage having a polarity opposite to the polarity of the first bias voltage is applied to the lower electrode formed on the lower surface of the piezoelectric element, and
wherein the light scanning apparatus comprises a drive source that includes a second piezoelectric element formed on respective surfaces of the pair of drive beams, a second upper electrode formed on an upper surface of the second piezoelectric element, and a second lower electrode formed on a lower surface of the second piezoelectric element, and that alternately applies drive voltages having different phases to the respective drive beams among the pair of drive beams so as to cause the respective drive beams to oscillate vertically in different directions, thereby causing the mirror to swing in a horizontal direction around a swing axis or a rotation axis along the torsion beams.

2. The light scanning apparatus according to claim 1 ,
the light scanning apparatus further comprising:
an upper electrode wire that is drawn from the upper electrode and formed on one drive beam of the pair of drive beams;
a lower electrode wire that is drawn from the lower electrode and formed on the one drive beam of the pair of drive beams; and
drive sources that are included in the corresponding drive beams and connected with corresponding drive wires for supplying the drive voltage,
wherein the drive wires are drawn from the corresponding drive beams through a side of another drive beam of the pair of drive beams to an outside.

3. A light scanning control apparatus for controlling the light scanning apparatus according to claim 1 , the light scanning control apparatus comprising:
a front end circuit that processes an input signal and supplies the processed signal to a light source;
a driver circuit that controls a supply of the drive voltage to the light scanning apparatus;
a voltage generation circuit that supplies a power supply voltage to the front end circuit and the driver circuit;
a first wire that is connected with an upper electrode wire drawn from the upper electrode;
a second wire that is connected with a lower electrode wire drawn from the lower electrode;
a buffer circuit that is connected with the first and second wires and further connected with an input terminal;
a first voltage generation part that is connected with the first wire and generates the first bias voltage; and
a second voltage generation part that is connected with the second wire and generates the second bias voltage.

4. The light scanning control apparatus according to claim 3 ,
wherein the buffer circuit is included in the driver circuit.

5. The light scanning control apparatus according to claim 3 ,
wherein the buffer circuit, the first voltage generation part, and the second voltage generation part are included in the driver circuit.

6. The light scanning control apparatus according to claim 3 ,
wherein the first voltage generation part is a first resistor, one end of the first resistor being connected with the first wire and another end of the first resistor being supplied with a first voltage generated by the voltage generation circuit,
wherein the second voltage generation part is a second resistor, one end of the second resistor being connected with the second wire and another end of the second resistor being supplied with a second voltage that has a polarity opposite to a polarity of the first voltage and is generated by the voltage generation circuit.

7. The light scanning apparatus according to claim 1 , wherein the first bias voltage having the positive or negative polarity is applied to the upper electrode of the piezoelectric sensor, and the second bias voltage having the polarity opposite to the polarity of the first bias voltage is applied to the lower electrode of the piezoelectric sensor, to maintain the direction of the polarization of the piezoelectric sensor.

8. A light scanning unit comprising:
a light scanning apparatus including
a mirror,
a mirror supporting portion that supports the mirror;
torsion beams that support the mirror supporting portion on opposite sides of the mirror supporting portion along an axis direction of an axis, the mirror supporting portion being swung around the axis direction by torsion of the torsion beams,
a pair of drive beams that sandwich the mirror and the mirror supporting portion in a direction orthogonal to the axis direction,
connection beams that connect mutually facing sides of each of the drive beams with the torsion beams, and
a piezoelectric sensor that is formed on the connection beams and detects displacement of the connection beams, the displacement caused by swinging of the torsion beams around the axis when the mirror swings by a drive voltage applied to the drive beams,
wherein the piezoelectric sensor includes a piezoelectric element, an upper electrode formed on an upper surface of the piezoelectric element, and a lower electrode formed on a lower surface of the piezoelectric element,
wherein a first bias voltage having a positive or negative polarity is applied to the upper electrode formed on the upper surface of the piezoelectric element at the same time that a second bias voltage having a polarity opposite to the polarity of the first bias voltage is applied to the lower electrode formed on the lower surface of the piezoelectric element;
wherein the light scanning apparatus comprises a drive source that includes a second piezoelectric element formed on respective surfaces of the pair of drive beams, a second upper electrode formed on an upper surface of the second piezoelectric element, and a second lower electrode formed on a lower surface of the second piezoelectric element, and that alternately applies drive voltages having different phases to the respective drive beams among the pair of drive beams so as to cause the respective drive beams to oscillate vertically in different directions, thereby causing the mirror to swing in a horizontal direction around a swing axis or a rotation axis along the torsion beams; and

a light scanning control apparatus for controlling the light scanning apparatus including
a front end circuit that processes an input signal and supplies the processed signal to a light source,
a driver circuit that controls a supply of the drive voltage to the light scanning apparatus,
a voltage generation circuit that supplies a power supply voltage to the front end circuit and the driver

Assignees

• Hibiya Riichiro
• Sekine Hisamichi
• Mitsumi Electric Co Ltd

Inventors

• Hibiya Riichiro
• Sekine Hisamichi

Classifications

• G02B26/105 Primary

  with one or more pivoting mirrors or galvano-mirrors (G02B26/101 takes precedence) · CPC title