Removable optical tap for in-process characterization

Patent metadata

Field	Value
Publication number	US-9946025-B2
Application number	US-201615216159-A
Country	US
Kind code	B2
Filing date	Jul 21, 2016
Priority date	Jul 21, 2016
Publication date	Apr 17, 2018
Grant date	Apr 17, 2018

Abstract

An integrated circuit includes optical waveguides defined in a semiconductor layer, and uses removable optical taps to allow for in-process characterization and trimming. These optical waveguides may be trimmed during fabrication of the integrated circuit to improve performance. Note that the trimming may modify indexes of refraction of portions of the optical waveguides or may involve a more invasive process. Moreover, the trimming may exclude or may not involve the use of a polymer and/or the carrier wavelengths at a given temperature may be stable as a function of time. The trimming process may use removable optical taps for external feedback to determine the amount of change required. These optical taps may be formed either in the semiconductor layer or the cladding layer, and they may be disabled with negligible impact to device performance via alterations to the cladding layer after the completion of trimming.

First claim

What is claimed is:

1. A photonic chip, comprising:
a substrate;
a buried-oxide layer disposed on the substrate;
a semiconductor layer, disposed on the buried-oxide layer, that includes an optical waveguide that is configured to convey an optical signal having a carrier wavelength, wherein the optical waveguide is trimmed so that the carrier wavelength matches a target wavelength within a predefined accuracy without using a polymer; and
an optical tap proximate and adjacent to the optical waveguide.

2. The photonic chip of claim 1 , wherein the photonic chip includes a decoupling material disposed over one of the optical waveguide and the optical in a region where the optical tap is proximate to the optical waveguide.

3. The photonic chip of claim 2 , wherein the decoupling material includes one of: polysilicon, amorphous silicon, and a polymer.

4. The photonic chip of claim 1 , wherein the optical tap includes one of: polycrystalline silicon, and amorphous silicon.

5. The photonic chip of claim 1 , wherein a width of the optical waveguide is decreased in a region where the optical tap is proximate to the optical waveguide.

6. The photonic chip of claim 1 , wherein the optical tap is included in the semiconductor layer.

7. The photonic chip of claim 1 , wherein the optical tap includes a polymer.

8. The photonic chip of claim 1 , wherein the photonic chip includes one or more ring-resonator filters disposed between the optical waveguide and the optical tap.

9. The photonic chip of claim 1 , wherein the carrier wavelength matches a target wavelength with a predefined accuracy without one of: thermal tuning, and electronic tuning.

10. The photonic chip of claim 9 , wherein the predefined accuracy is 0.1 nm.

11. The photonic chip of claim 9 , wherein the optical waveguide is trimmed so that the carrier wavelength matches the target wavelength within the predefined accuracy by oxidizing the semiconductor layer proximate to the optical waveguides; and
wherein the amount of oxidation is specific to a given optical waveguide.

12. The photonic chip of claim 11 , wherein the trimming modifies an effective index of refraction of the optical waveguide.

13. The photonic chip of claim 11 , wherein the substrate includes a cavity, defined by an edge, through the substrate and the buried-oxide layer;
wherein the optical waveguide is trimmed so that the carrier wavelength matches the target wavelength within the predefined accuracy by oxidizing the semiconductor layer proximate to the optical waveguide via the cavity; and
wherein the amount of oxidation is specific to the optical waveguide.

14. The photonic chip of claim 13 , wherein the trimming modifies an effective index of refraction of the optical waveguide.

15. The photonic chip of claim 1 , further comprising a grating coupler optically coupled to the optical tap.

16. The photonic chip of claim 1 , further comprising a cladding layer disposed on the semiconductor layer, wherein the cladding layer has a transmission coefficient exceeding a predefined value for at least a wavelength in an ultraviolet band of wavelengths.

17. The photonic chip of claim 1 , wherein the substrate, the buried-oxide layer and the semiconductor layer constitute a silicon-on-insulator technology.

18. The photonic chip of claim 1 ,
wherein the amount of trimming is specific to the optical waveguide.

19. A system, comprising:
a processor;
memory, coupled to the processor, that stores a program module; and
a photonic chip, wherein the photonic chip includes:
a substrate;
a buried-oxide layer disposed on the substrate; and
a semiconductor layer, disposed on the buried-oxide layer, that includes an optical waveguide that is configured to convey an optical signal having a carrier wavelength, wherein the optical waveguide is trimmed so that the carrier wavelength matches a target wavelength within a predefined accuracy without using a polymer; and
an optical tap proximate and adjacent to the optical waveguide.

20. A method for trimming a carrier wavelength of an optical waveguide, the method comprising:
defining an optical tap proximate and adjacent to the optical waveguide in a photonic chip, wherein the optical waveguide is disposed on a buried-oxide layer on a silicon-on-insulator substrate, and wherein the optical tap is optically coupled to the optical waveguide;
measuring, using the optical tap, the carrier wavelength of an optical signal conveyed in the optical waveguide;
trimming the optical waveguide based on a difference between the measured carrier wavelength and a target wavelength so that the carrier wavelength matches the target wavelength within a predefined accuracy by oxidizing the semiconductor layer proximate to the optical waveguide, wherein the amount of oxidation is specific to the optical waveguide; and
decreasing the optical coupling between the optical tap and the optical waveguide, so that the optical coupling is less than a predefined value.

Assignees

• Oracle Int Corp

Inventors

• Bovington Jock T
• Krishnamoorthy Ashok V
• Decker Patrick J

Classifications

• G02B6/122

  Basic optical elements, e.g. light-guiding paths · CPC title

• G02B6/2852 Primary

  using tapping light guides arranged sidewardly, e.g. in a non-parallel relationship with respect to the bus light guides (light extraction or launching through cladding, with or without surface discontinuities, bent structures) · CPC title

• G02B6/29338

  Loop resonators · CPC title

• G02B6/1221

  made from organic materials · CPC title

• G02B6/34

  utilising prism or grating {(G02B6/293 takes precedence)} · CPC title