In-situ spectral process monitoring

Patent metadata

Field	Value
Publication number	US-9945790-B2
Application number	US-201514819179-A
Country	US
Kind code	B2
Filing date	Aug 5, 2015
Priority date	Aug 5, 2015
Publication date	Apr 17, 2018
Grant date	Apr 17, 2018

Abstract

Increasing the precision of process monitoring may be improved if the sensors take the form of travelling probes riding along with the flowing materials in the manufacturing process rather than sample only when the process moves passed the sensors fixed location. The probe includes an outer housing hermetically sealed from the flowing materials, and a light source for transmitting light through a window in the housing onto the flowing materials. A spatially variable optical filter (SVF) captures light returning from the flowing materials, and separates the captured light into a spectrum of constituent wavelength signals for transmission to a detector array, which provides a power reading for each constituent wavelength signal.

First claim

We claim:

1. A probe, comprising:
a hermetically sealed outer housing;
a light source for transmitting light onto a material;
a window in the hermetically sealed outer housing,
wherein the window is optically transparent at one or more of transmitted, refracted or reflected wavelengths of light from the material;

an optical filter for capturing light transmitted, refracted or reflected from the material, and for separating the captured light into a spectrum of constituent wavelength signals,
the optical filter comprising:
an upstream spatially variable bandpass optical filter; and
a downstream spatially variable bandpass optical filter that is disposed downstream of the upstream spatially variable bandpass optical filter and separated from the upstream spatially variable bandpass optical filter by a distance along an optical path of the captured light; and

a detector array for providing power readings,
each power reading, of the power readings, being for a constituent wavelength signal of a plurality of the constituent wavelength signals.

2. The probe according to claim 1 ,
wherein the upstream spatially variable bandpass optical filter has a bandpass center wavelength that varies in a mutually coordinated fashion along at least a common first direction transversal to the optical path, and
wherein light, at the bandpass center wavelength along the upstream spatially variable bandpass optical filter, outside a predetermined acceptance angle is attenuated by more than light inside the predetermined acceptance angle.

3. The probe according to claim 1 , wherein the hermetically sealed outer housing comprises a shape that is one of spherical, cylindrical, prolate spheroid, ellipsoid, or toroidal.

4. The probe according to claim 1 , wherein the hermetically sealed outer housing comprises structural features arranged on an outside of the hermetically sealed outer housing.

5. The probe according to claim 4 , wherein the structural features include one or more of dimples, stubs, semi-circular or rectangular ribs, veins, or fingers.

6. The probe according to claim 1 , further comprising:
a controller for storing the power readings; and
a communication device for transmitting the power readings to a remote base station.

7. The probe according to claim 6 , wherein the communication device is a wireless communication device.

8. The probe according to claim 6 ,
wherein the communication device is a wired communication device, and
wherein the hermetically sealed outer housing is tethered to a structure.

9. The probe according to claim 1 , further comprising:
a positioning system tracker for determining an exact position or orientation of the probe.

10. The probe according to claim 1 , further comprising:
a propulsion system for propelling the probe when immersed in the material.

11. The probe according to claim 1 , further comprising:
a buoyancy adjusting system for adjusting a buoyancy of the probe when immersed in the material.

12. The probe according to claim 1 , further comprising:
a storage compartment; and
a hatch on the hermetically sealed outer housing, wherein the hatch is operable to open and close the storage compartment.

13. The probe according to claim 12 , further comprising:
a controller for storing the power readings and signaling the hatch to open and release a substance from the storage compartment when the power readings reach a predetermined level.

14. The probe according to claim 1 , further comprising:
a window cleaner for removing debris from the window.

15. The probe according to claim 1 , wherein the light source is mounted inside the hermetically sealed outer housing for transmitting the light through the window onto the material.

16. The probe according to claim 1 , wherein the hermetically sealed outer housing comprises a conduit extending therethrough from an opening in the hermetically sealed outer housing to an outlet in the hermetically sealed outer housing in between the light source and the optical filter.

17. The probe according to claim 1 , further comprising:
a plurality of windows spaced apart around the hermetically sealed outer housing;
a plurality of light sources inside the hermetically sealed outer housing for transmitting the light through the plurality of windows onto the material;
a plurality of optical filters for capturing light transmitted through, and reflected or refracted from the material, and for separating the captured light into the spectrum of the constituent wavelength signals; and
a plurality of detector arrays for providing the power readings.

18. The probe according to claim 17 , further comprising:
a controller for storing the power readings and averaging the power readings.

19. The probe according to claim 17 , further comprising:
a controller for storing the power readings,
wherein the optical filters include different spectral passbands, and
wherein the controller combines the power readings with different spectral passbands to generate a combined spectrum.

20. The probe according to claim 17 , further comprising a shutter moveable within the hermetically sealed outer housing into position between the light source and the optical filter.

21. A system comprising:
a plurality of probes, each probe comprising:
a hermetically sealed outer housing;
a light source for transmitting light onto a material;
a window in the hermetically sealed outer housing, wherein the window is optically transparent at one or more of transmitted, refracted or reflected wavelengths of light from the material;
an optical filter for capturing light transmitted, refracted or reflected from the material, and for separating the captured light into a spectrum of constituent wavelength signals,
the optical filter comprising:
an upstream spatially variable bandpass optical filter; and
a downstream spatially variable bandpass optical filter that is disposed downstream of the upstream spatially variable bandpass optical filter, and

the downstream spatially variable bandpass optical filter being separated from the upstream spatially variable bandpass optical filter by a distance along an optical path of the captured light; and

a detector array for providing power readings,
each power reading, of the power readings, being for a constituent wavelength signal of a plurality of the constituent wavelength signals.

22. The system according to claim 21 , wherein parameters for the material are adjusted based on the power readings.

23. A method comprising:
placing a probe into a material;
the probe comprising:
a hermetically sealed outer housing;
a light source for transmitting light onto a material;
a window in the hermetically sealed outer housing, wherein the window is optically transparent at one or more of transmitted, refracted or reflected wavelengths of light from the material; and
an optical filter for capturing light transmitted, refracted or reflected from the material, and for separating the captured light into a spectrum of constituent wavelength signals,
the optical filter comprising:
 an upstream spatially variable bandpass optical filter; and
 a downstream spatially variable bandpass optical filter that is disposed downstream of the upstream spatially variable bandpass optical filter, and
 the downstream spatially variable bandpass optical filter being separated from the upstream spatially variable bandpass optical filter by a distance along a

Assignees

• Viavi Solutions Inc

Inventors

• Catching Benjamin F
• Von Gunten Marc K
• Hruska Curtis R
• Smith Paula
• Coombs Paul G

Classifications

• G01J3/0289 Primary

  Field-of-view determination; Aiming or pointing of a spectrometer; Adjusting alignment; Encoding angular position; Size of measurement area; Position tracking · CPC title

• G01J2003/123

  Indexed discrete filters · CPC title

• G01J3/0297

  Constructional arrangements for removing other types of optical noise or for performing calibration · CPC title

• G01J3/12

  Generating the spectrum; Monochromators · CPC title

• G01J3/027 Primary

  Control of working procedures of a spectrometer; Failure detection; Bandwidth calculation · CPC title