Systems and methods for enhancing mobility of atomic or molecular species on a substrate at reduced bulk temperature using acoustic waves, and structures formed using same
US-9303309-B2 · Apr 5, 2016 · US
Systems and methods for enhancing mobility of atomic or molecular species on a substrate at reduced bulk temperature using acoustic waves, and structures formed using same
US9945032B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9945032-B2 |
| Application number | US-201615053878-A |
| Country | US |
| Kind code | B2 |
| Filing date | Feb 25, 2016 |
| Priority date | Jan 11, 2013 |
| Publication date | Apr 17, 2018 |
| Grant date | Apr 17, 2018 |
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Abstract
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Under one aspect, a structure is provided that includes a substrate including a first material having a threshold temperature above which the first material is damaged and a layer consisting essentially of a second material molecularly bonded to the first material of the substrate. The second material is formed on the substrate at a reaction temperature that is higher than the threshold temperature of the first material. An interface between the substrate and the second material is a substantially defect-free surface.
First claim
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What is claimed: 1. A structure comprising: a substrate comprising a first material having a threshold temperature above which the first material is damaged; and a layer consisting essentially of silicon nitride, graphene, diamond, titanium dioxide, titanium boride, zirconium oxide, yttria-stabilized zirconium, boron carbide, boron nitride, or metal molecularly bonded to the first material of the substrate, the layer being formed on the substrate at a reaction temperature that is higher than the threshold temperature of the first material, wherein an interface between the substrate and the layer comprises annealed kinks, annealed terraces, or annealed slip faults. 2. The structure of claim 1 , wherein the substrate comprises an integrated circuit, a chalcogenide glass, a ZBLAN glass, or a polymer. 3. The structure of claim 2 , wherein the polymer comprises polycarbonate, poly(methyl methacrylate), polystyrene, polyvinyl chloride, or polyethylene terephthalate.
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Classifications
Polymer of monoethylenically unsaturated hydrocarbon · CPC title
characterised by the process of coating · CPC title
- C23C16/483Primary
using coherent light, UV to IR, e.g. lasers · CPC title
- C23C16/4415Primary
Acoustic wave CVD · CPC title
Ester, halide or nitrile of addition polymer · CPC title
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- What does patent US9945032B2 cover?
- Under one aspect, a structure is provided that includes a substrate including a first material having a threshold temperature above which the first material is damaged and a layer consisting essentially of a second material molecularly bonded to the first material of the substrate. The second material is formed on the substrate at a reaction temperature that is higher than the threshold tempera…
- Who is the assignee on this patent?
- Aerospace Corp
- What technology area does this patent fall under?
- Primary CPC classification C23C16/483. Mapped technology areas include Chemistry & Metallurgy.
- When was this patent published?
- Publication date Tue Apr 17 2018 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 1 related publication on this page (citations in our corpus or others sharing the same primary CPC).