Laser dicing glass wafers using advanced laser sources
US-2024409449-A1 · Dec 12, 2024 · US
US9938180B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9938180-B2 |
| Application number | US-201313836717-A |
| Country | US |
| Kind code | B2 |
| Filing date | Mar 15, 2013 |
| Priority date | Jun 5, 2012 |
| Publication date | Apr 10, 2018 |
| Grant date | Apr 10, 2018 |
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A method of cutting a glass article includes translating a laser beam relative to a first surface of the glass article. The laser beam includes a beam waist having a center. The center of the beam waist of the laser beam is positioned at or below a second surface of the glass article. The laser beam creates a plurality of defects along a score line in the glass article such that the plurality of defects extends a distance into the glass article, and at least some individual defects of the plurality of defects are non-orthogonal to the first surface of the glass article and are biased in a direction of translation of the laser beam. Glass articles having edge defects are also disclosed.
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What is claimed is: 1. A method of scoring a glass article comprising: translating a laser beam relative to a first surface of the glass article, the laser beam comprising a beam waist having a center, wherein: the center of the beam waist of the laser beam is positioned at or below a second surface of the glass article such that the laser beam passes through a thickness of the glass article; the laser beam operates at a wavelength from 350 nanometers to 619 nanometers and has a pulse duration from about 1 nanosecond to about 50 nanoseconds; the laser beam creates a plurality of defects in the form of voids or cracks along a score line in the glass article such that the plurality of defects extends a distance into the glass article from the second surface; and at least some individual defects of the plurality of defects are non-orthogonal to the first surface of the glass article and are biased in a direction of translation of the laser beam wherein the glass article is an ion-exchanged glass article having a first strengthened surface layer and a second strengthened surface layer under a compressive stress and extending from a surface of the ion-exchanged glass article to a depth of layer, and a central region between the first strengthened surface layer and the second strengthened surface layer that is under tensile stress, and the plurality of defects extends a distance greater than the depth of layer. 2. The method of claim 1 , wherein the laser beam is oriented orthogonally to the first surface of the glass article. 3. The method of claim 1 , wherein the laser beam is translated relative to the glass article at a speed S greater than about 20 millimeters per second. 4. The method of claim 1 , wherein the laser beam is translated relative to the glass article at a speed S greater than about 200 millimeters per second. 5. The method of claim l , wherein the central region has a tensile stress between about 20 and about 30 megapascals, and the plurality of defects extends through about half of the thickness of the ion-exchanged glass article. 6. The method of claim 1 , wherein the central region has a tensile stress greater than about 40 megapascals, and a majority of a length of the plurality of defects is within the first or second strengthened layer. 7. The method of claim 1 , wherein the plurality of defects creates a crack that propagates within the glass article such that the glass article separates along the score line into one or more separated glass articles. 8. The method of claim 7 , further comprising finishing one or more edges of the one or more separated glass articles such that the one or more edges have a surface roughness below about 100 μm root mean squared. 9. A method of separating an ion-exchanged glass article comprising: translating a laser beam relative to a first surface of the ion-exchanged glass article, the laser beam comprising a beam waist having a center, wherein: the ion-exchanged glass article comprises a first strengthened surface layer and a second strengthened surface layer under a compressive stress and extending from a surface of the ion-exchanged glass article to a depth of layer, and a central region between the first strengthened surface layer and the second strengthened surface layer that is under tensile stress; the center of the beam waist of the laser beam is positioned at or below a second surface of the ion-exchanged glass article such that the laser beam passes through a thickness of the ion-exchanged glass article; the laser beam operates at a wavelength from 350 nanometers to 619 nanometers and has a pulse duration from about 1 nanosecond to about 50 nanoseconds; the laser beam ablates the second surface of the ion-exchanged glass article to create a plurality of defects in the form of voids or cracks that extend from ablated regions on the second surface of the ion-exchanged glass article; the plurality of defects defines one or more score lines along the ion-exchanged glass article; at least some individual defects of the plurality of defects are non-orthogonal to the first surface of the ion-exchanged glass article and are biased in a direction of translation of the laser beam; at least a portion of the plurality of defects extends a distance greater than the depth of layer of the ion-exchanged glass article; and the plurality of defects creates a crack that propagates within the ion-exchanged glass article such that the ion-exchanged glass article separates along the one or more score lines. 10. The method of claim 9 , wherein the crack does not propagate ahead of the laser beam in a direction of translation of the laser beam. 11. The method of claim 9 , wherein individual defects of the plurality of defects are discrete with respect to one another prior to separation of the ion-exchanged glass article. 12. The method of claim 1 , wherein the plurality of defects extends into the distance of the glass article without changing a vertical position of the beam waist.
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