MEMS component including a sound-pressure-sensitive diaphragm element and piezosensitive signal detection

Patent metadata

Field	Value
Publication number	US-9936298-B2
Application number	US-201615211137-A
Country	US
Kind code	B2
Filing date	Jul 15, 2016
Priority date	Jul 22, 2015
Publication date	Apr 3, 2018
Grant date	Apr 3, 2018

Abstract

For a MEMS component, in the layer structure of which at least one sound-pressure-sensitive diaphragm element is formed, which spans an opening or cavity in the layer structure and the deflections of which are detected with the aid of at least one piezosensitive circuit element in the attachment area of the diaphragm element, design measures are provided, by which the stress distribution over the diaphragm surface may be influenced intentionally in the event of deflection of the diaphragm element. In particular, measures are provided, by which the mechanical stresses are intentionally introduced into predefined areas of the diaphragm element, to thus amplify the measuring signal. For this purpose, the diaphragm element includes at least one designated bending area, which is defined by the structuring of the diaphragm element and is more strongly deformed in the event of sound action than the adjoining diaphragm sections.

First claim

What is claimed is:

1. A MEMS component, comprising:
a layer structure in which at least one sound-pressure-sensitive diaphragm element is formed, the diaphragm element spanning an opening or cavity in the layer structure, the diaphragm element being structured;
at least one piezosensitive circuit element situated in an area of an attachment of the diaphragm element to the layer structure, deflections of the diaphragm element being detected with the aid of the piezosensitive circuit element;
wherein the diaphragm element includes at least one designated bending area, in an area of the diaphragm element other than the area of attachment of the diaphragm element to the layer structure, which is defined by the structuring of the diaphragm element and in the event of sound action, is deformed more strongly than adjoining sections of the diaphragm.

2. The MEMS component as recited in claim 1 , wherein the diaphragm element includes at least one stiffened diaphragm section, which adjoins the designated bending area, and the stiffened diaphragm section has at least one of: i) a greater thickness than the designated bending area, or ii) corrugations formed therein.

3. The MEMS component as recited in claim 1 , wherein an arrangement of spring elements and passage openings is formed in the designated bending area.

4. The MEMS component as recited in claim 1 , wherein the attachment of the diaphragm element to the layer structure is concave at least in the section in which the piezosensitive circuit element for signal detection is situated.

5. The MEMS component as recited in claim 1 , wherein the diaphragm element is attached via at least one spring element to the layer structure.

6. The MEMS component as recited in claim 1 , wherein the at least one designated bending area is a closed portion of the diaphragm element.

7. The MEMS component as recited in claim 1 , wherein the at least one designated bending area is located between at least two of the adjoining sections of the diaphragm.

8. The MEMS component as recited in claim 1 , wherein the at least one designated bending area includes a portion located at a central area of the diaphragm.

9. The MEMS component as recited in claim 1 , wherein the designated bending area includes spring elements and passage openings situated between the adjoining sections of the diaphragm.

10. The MEMS component as recited in claim 1 , wherein the diaphragm element includes at least one stiffened diaphragm section, which adjoins the designated bending area, and the stiffened diaphragm section has a greater thickness than the designated bending area.

11. The MEMS component as recited in claim 1 , wherein the diaphragm element includes at least one stiffened diaphragm section, which adjoins the designated bending area, and the stiffened diaphragm section has corrugations formed therein.

12. The MEMS component as recited in claim 11 , wherein the corrugations include a plurality of parallel grooves.

13. The MEMS component as recited in claim 11 , wherein the corrugations include a plurality of protrusions arranged in a grid.

14. A MEMS component, comprising:
a layer structure in which at least one sound-pressure-sensitive diaphragm element is formed, the diaphragm element spanning an opening or cavity in the layer structure, the diaphragm element being structured;
at least one piezosensitive circuit element situated in an area of an attachment of the diaphragm element to the layer structure, deflections of the diaphragm element being detected with the aid of the piezosensitive circuit element;
wherein the diaphragm element includes a plurality of designated bending areas, which are defined by the structuring of the diaphragm element and in the event of sound action, are deformed more strongly than adjoining sections of the diaphragm, and
wherein the diaphragm element is attached on all sides to the layer structure, the diaphragm element, due to its structuring, includes multiple diaphragm sections of high stiffness, which extend from the diaphragm edge up into a middle area of the diaphragm element, and the diaphragm sections of high stiffness are connected to one another by the designated bending areas, the designated bending areas also extending from the diaphragm edge up into the middle area of the diaphragm element.

Assignees

• Bosch Gmbh Robert

Inventors

• Buck Thomas
• Purkl Fabian
• Stumber Michael
• Ehrenpfordt Ricardo
• Scheben Rolf
• Stein Benedikt
• Schelling Christoph

Classifications

• H04R2201/003

  Mems transducers or their use · CPC title

• H04R31/006

  Interconnection of transducer parts (of diaphragm and outer suspension by moulding H04R31/003) · CPC title

• H04R19/005

  using semiconductor materials · CPC title

• B81B3/0072

  For controlling internal stress or strain in moving or flexible elements, e.g. stress compensating layers · CPC title

• H04R7/18

  at the periphery · CPC title