Source housing assembly for controlling ion beam extraction stability and ion beam current

Patent metadata

Field	Value
Publication number	US-9934928-B2
Application number	US-201514713573-A
Country	US
Kind code	B2
Filing date	May 15, 2015
Priority date	May 15, 2015
Publication date	Apr 3, 2018
Grant date	Apr 3, 2018

Abstract

Provided herein are approaches for improving ion beam extraction stability and ion beam current for an ion extraction system. In one approach, a source housing assembly may include a source housing surrounding an ion source including an arc chamber, the source housing having an extraction aperture plate mounted at a proximal end thereof. The source housing assembly further includes a vacuum liner disposed within an interior of the source housing to form a barrier around a set of vacuum pumping apertures. As configured, openings in the source housing assembly, other than an opening in the extraction aperture plate, are enclosed by the extraction aperture plate and the vacuum liner, thus ensuring appendix arcs or extraneous ions produced outside the arc chamber remain within the source housing. Just those ions produced within the arc chamber exit the source housing through the opening of the extraction aperture plate.

First claim

The invention claimed is:

1. A source housing assembly, comprising:
a source housing including a distal end and a proximal end;
an ion source including an arc chamber disposed within an interior of the source housing;
an extraction aperture plate mounted directly to an end wall defining the distal end of the source housing, the extraction aperture plate extending over an opening in the source housing defined by the interior of the source housing at the distal end, and the extraction aperture plate having an opening substantially aligned with and further defining an aperture of the arc chamber; and
an extraction aperture liner coupled to the arc chamber, the extraction aperture liner extending along an interior surface of the extraction aperture plate, parallel to the extraction aperture plate.

2. The source housing assembly of claim 1 , the extraction aperture liner having an opening substantially aligned with the extraction aperture of the arc chamber, wherein the opening of the extraction aperture liner is larger than the extraction aperture of the arc chamber.

3. The source housing assembly of claim 2 , the extraction aperture plate coupled to the extraction aperture liner.

4. The source housing assembly of claim 2 , the opening of the extraction aperture plate defining a radial extension extending into the opening of the extraction aperture liner.

5. The source housing assembly of claim 1 , further comprising an ion source body coupled to the arc chamber within the source housing.

6. The source housing assembly of claim 1 , further comprising a set of vacuum pumping apertures formed through the source housing proximate the arc chamber.

7. The source housing assembly of claim 6 , further comprising a vacuum liner disposed within the source housing, the vacuum liner disposed adjacent the set of vacuum pumping apertures.

8. The source housing assembly of claim 7 , the vacuum liner positioned to form a barrier between the set of vacuum pumping apertures and the arc chamber.

9. The source housing assembly of claim 1 , the extraction aperture plate including a single opening.

10. An ion extraction system, comprising:
a source housing including a set of vacuum pumping apertures formed therein;
an ion source including an arc chamber disposed within the source housing;

a vacuum liner disposed within an interior of the source housing, the vacuum liner forming a barrier between the set of vacuum pumping apertures and the ion source;
an extraction aperture plate mounted directly to an end wall defining a distal end of the source housing, the extraction aperture plate extending over an opening in the source housing defined by the interior of the source housing at the distal end, and the extraction aperture plate having an opening substantially aligned with and further defining an aperture of the arc chamber; and
an extraction aperture liner coupled to the arc chamber, the extraction aperture liner extending along an interior surface of the extraction aperture plate, parallel to the extraction aperture plate.

11. The ion extraction system of claim 10 , the extraction aperture liner having an opening substantially aligned with the extraction aperture of the arc chamber, wherein the opening of the extraction aperture liner is larger than the extraction aperture of the arc chamber.

12. The ion extraction system of claim 11 , the extraction aperture plate coupled to the extraction aperture liner.

13. The ion extraction system of claim 12 , the opening of the extraction aperture plate defining a radial extension extending into an opening of the extraction aperture liner.

14. The ion extraction system of claim 10 , further comprising a ground electrode and a suppression electrode each having an opening substantially aligned with the opening of extraction aperture plate.

15. The ion extraction system of claim 10 , the vacuum liner coupled to an interior surface of the source housing adjacent the set of vacuum pumping apertures.

16. A method comprising:
providing a source housing defining a distal end and a proximal end;

mounting an extraction aperture plate directly to an end wall defining the distal end of the source housing, the extraction aperture plate extending over an opening in the source housing defined by the interior of the source housing at the distal end, and the extraction aperture plate having an opening substantially aligned with and further defining an aperture of the arc chamber;
providing a vacuum liner within an interior of a source housing, the vacuum liner forming a barrier around a set of vacuum pumping apertures of the source housing; and
coupling an extraction aperture liner to the arc chamber, the extraction aperture liner extending along an interior surface of the extraction aperture plate, parallel to the extraction aperture plate.

17. The method of claim 16 , the extraction aperture liner including an opening substantially aligned with the aperture of the arc chamber, wherein the opening of the extraction aperture liner is larger than the extraction aperture of the arc chamber.

18. The method of claim 17 , further comprising coupling the extraction aperture plate to the extraction aperture liner.

19. The method of claim 18 , further comprising extending a radial extension of the extraction aperture plate into an opening of the extraction aperture liner.

20. The method of claim 16 , further comprising coupling the vacuum liner to an interior surface of the source housing adjacent the set of vacuum pumping apertures.

Assignees

• Varian Semiconductor Equipment Ass Inc

Inventors

• Chang Shengwu
• Burgess Jeff
• Leavitt William
• St Peter Michael
• Mosher Matt
• Olson Joe
• Sinclair Frank

Classifications

• H01J3/04

  Ion guns · CPC title

• H01J9/385

  Exhausting vessels · CPC title

• H01J27/08 Primary

  using arc discharge · CPC title

• H01J37/08 Primary

  Ion sources; Ion guns · CPC title

• H01J5/02

  Vessels; Containers; Shields associated therewith; Vacuum locks · CPC title