Activation chamber, kit used in treatment device and treatment device, for lowering electron affinity

US9934926B2 · US · B2

Patent metadata
FieldValue
Publication numberUS-9934926-B2
Application numberUS-201414904945-A
CountryUS
Kind codeB2
Filing dateJun 12, 2014
Priority dateJul 16, 2013
Publication dateApr 3, 2018
Grant dateApr 3, 2018

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  1. Title

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  2. Abstract

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  3. Assignees and inventors

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  4. Key dates

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  5. First independent claim

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  6. CPC / IPC classifications

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  7. Citations and related patents

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Abstract

Official abstract text for this publication.

The present disclosure provides a treatment device for lowering electron affinity. The treatment device is capable of performing an electron affinity (EA) surface treatment on a photocathode material or an EA surface retreatment on a photocathode. The present disclosure also provides an electron-beam device provided with the treatment device. An activation chamber is used in a treatment device for lowering electron affinity by vaporizing a surface-treatment material and uses the vaporized surface-treatment material to perform an electron-affinity lowering treatment on a photocathode material or an electron-affinity lowering retreatment on a photocathode. The activation chamber includes one or more holes through which electrons can pass.

First claim

Opening claim text (preview).

What is claimed is: 1. An activation chamber disposed inside a treatment device for lowering electron affinity for vaporizing a surface treatment material and using the vaporized surface treatment material to perform a treatment to lower electron affinity on a photocathode material and/or re-treatment to lower electron affinity on a photocathode, wherein the activation chamber is disposed inside a vacuum chamber of the treatment device for lowering electron affinity and includes a hole through which electrons pass, and the activation chamber itself is not a vacuum chamber. 2. The activation chamber according to claim 1 , wherein the activation chamber is formed of a material selected from conductive materials, and insulating materials. 3. The activation chamber according to claim 1 , further comprising drive means which is formed in the activation chamber for changing the position of a photocathode holder. 4. The activation chamber according to claim 3 , wherein the hole is large enough to allow the photocathode holder to be inserted therein. 5. The activation chamber according to claim 1 , further comprising direction control means for controlling the dispersion direction of vaporized surface treatment material. 6. The activation chamber according to claim 1 , further comprising heating means for heating the surface treatment material. 7. The activation chamber according to claim 1 , further comprising a shield for preventing vaporized surface treatment material from leaking outside the activation chamber. 8. A kit for lowering electron affinity, comprising: the activation chamber according to claim 1 ; and a surface treatment material. 9. The kit according to claim 8 , wherein the surface treatment material has heating means inserted therein. 10. The kit according to claim 8 , further comprising a photocathode holder with the photocathode or a photocathode material attached. 11. The kit according to claim 10 , further comprising a photocathode rod on which is formed a shield for preventing vaporized surface treatment material from leaking outside the activation chamber. 12. The kit according to claim 10 , further comprising a lid that is slidable with respect to the activation chamber, wherein the photocathode holder with the photocathode or the photocathode material attached is formed on the lid. 13. A treatment device for lowering electron affinity, comprising: the kit according to claim 8 ; a vacuum chamber; and a vacuum pump. 14. A photocathode electron-beam source comprising: the treatment device for lowering electron affinity according to claim 13 ; an anode; and a light source. 15. An electron gun comprising the photocathode electron-beam source according to claim 14 . 16. A free-electron laser accelerator comprising the photocathode electron-beam source according to claim 14 . 17. A transmission electron microscope comprising the photocathode electron-beam source according to claim 14 . 18. A scanning electron microscope comprising the photocathode electron-beam source according to claim 14 . 19. An electron-beam holography microscope comprising the photocathode electron-beam source according to claim 14 . 20. An electron-beam lithography device comprising the photocathode electron-beam source according to claim 14 . 21. An electron-beam diffraction device comprising the photocathode electron-beam source according to claim 14 . 22. An electron-beam scanning device comprising the photocathode electron-beam source according to claim 14 . 23. An activation chamber for use in a treatment device for lowering electron affinity for vaporizing a surface treatment material and using the vaporized surface treatment material to perform a treatment to lower electron affinity on a photocathode material and/or re-treatment to lower electron affinity on a photocathode, wherein the activation chamber is used in a vacuum chamber of the treatment device for lowering electron affinity and includes a hole through which electrons pass, and a hole through which light passes, and the activation chamber itself is not a vacuum chamber. 24. A kit for lowering electron affinity, comprising: an activation chamber for use in a treatment device for lowering electron affinity for vaporizing a surface treatment material and using the vaporized surface treatment material to perform a treatment to lower electron affinity on a photocathode material and/or re-treatment to lower electron affinity on a photocathode; the surface treatment material; and a photocathode holder with the photocathode or a photocathode material attached, wherein: the activation chamber is used in a vacuum chamber of the treatment device for lowering electron affinity, and includes a hole through which electrons pass, the activation chamber itself is not a vacuum chamber, and the photocathode holder is fabricated of light-transmissive material or comprises a hole through which light passes. 25. The kit according to claim 24 , further comprising a lid that is slidable with respect to the activation chamber, wherein the photocathode holder with the photocathode or the photocathode material attached is formed on the lid, and wherein the lid and the photocathode holder are fabricated of a light-transmissive material or comprise a hole through which light passes. 26. A kit for lowering electron affinity, comprising: an activation chamber for use in a treatment device for lowering electron affinity for vaporizing a surface treatment material and using the vaporized surface treatment material to perform a treatment to lower electron affinity on a photocathode material and/or re-treatment to lower electron affinity on a photocathode; the surface treatment material; and a photocathode holder with the photocathode or a photocathode material attached, wherein: the activation chamber is used in a vacuum chamber of the treatment device for lowering electron affinity, and includes a hole through which electrons pass, the activation chamber itself is not a vacuum chamber, the kit further comprises a substrate between the photocathode material or the photocathode, and the photocathode holder, and the substrate is fabricated of a light-transmissive material or comprises a hole through which light passes. 27. A treatment device, comprising: a vacuum chamber; and an activation chamber disposed in the vacuum chamber, wherein: the treatment device is for lowering electron affinity for vaporizing a surface treatment material and using the vaporized surface treatment material to perform a treatment to lower electron affinity on a photocathode material and/or re-treatment to lower electron affinity on a photocathode, and the activation chamber includes a hole through which electrons pass, and the activation chamber itself is not a vacuum chamber.

Assignees

Inventors

Classifications

  • H01J1/34Primary

    Photo-emissive cathodes (H01J1/35 takes precedence) · CPC title

  • Details · CPC title

  • Electron guns using field emission, photo emission, or secondary emission electron sources · CPC title

  • Photo emission · CPC title

  • Electron sources; Electron guns · CPC title

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Frequently asked questions

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What does patent US9934926B2 cover?
The present disclosure provides a treatment device for lowering electron affinity. The treatment device is capable of performing an electron affinity (EA) surface treatment on a photocathode material or an EA surface retreatment on a photocathode. The present disclosure also provides an electron-beam device provided with the treatment device. An activation chamber is used in a treatment device …
Who is the assignee on this patent?
Univ Nagoya Nat Univ Corp
What technology area does this patent fall under?
Primary CPC classification H01J1/34. Mapped technology areas include Electricity.
When was this patent published?
Publication date Tue Apr 03 2018 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
What related patents are in patentsdb?
We list 3 related publications on this page (citations in our corpus or others sharing the same primary CPC).