Multicathode deposition system and methods
US-12051576-B2 · Jul 30, 2024 · US
US9932662B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9932662-B2 |
| Application number | US-201514960281-A |
| Country | US |
| Kind code | B2 |
| Filing date | Dec 4, 2015 |
| Priority date | Mar 3, 2015 |
| Publication date | Apr 3, 2018 |
| Grant date | Apr 3, 2018 |
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Official abstract text for this publication.
A mask frame assembly includes a mask having pattern openings and a frame including a first support portion configured to support an end of the mask and having a clamping slot and a support slot adjacent to the clamping slot; and a second support portion connected to the first support portion.
Opening claim text (preview).
What is claimed is: 1. A method of manufacturing a mask frame assembly, the method comprising: arranging a mask on a frame, the mask having pattern openings, and the frame comprising: a first support portion configured to support an end of the mask and having a clamping slot, a cutting slot, and a support slot, the clamping slot being configured to allow in and out movement of a clamper, the support slot being adjacent to the clamping slot, and the cutting slot being arranged nearer to a center of the mask frame assembly than the support slot is; and a second support portion connected to the first support portion; mounting a support stick on the support slot and over the clamping slot, the support stick extending along a second direction; stretching an end of the mask in a first direction crossing the second direction and aligning a portion of the end of the mask to be on the support stick; joining the mask and the frame to each other; and removing a cutting portion of the mask. 2. The method of manufacturing the mask frame assembly of claim 1 , further comprising preparing the mask by forming a first welding opening extending through an end of the mask. 3. The method of manufacturing the mask frame assembly of claim 2 , wherein the joining the mask and the frame comprises forming a first welding portion at the first welding opening to join the mask and the frame to each other. 4. The method of manufacturing the mask frame assembly of claim 1 , wherein the clamping slot has a depth that is less than a thickness of the first support portion. 5. The method of manufacturing the mask frame assembly of claim 1 , wherein the clamping slot extends through the first support portion. 6. The method of manufacturing the mask frame assembly of claim 1 , wherein the support slot extends along the second direction. 7. The method of manufacturing the mask frame assembly of claim 1 , wherein the mounting the support stick on the support slot comprises forming a second welding opening that extends through an end of the support stick and forming a second welding portion at the second welding opening to join the support stick and the frame to each other. 8. The method of manufacturing the mask frame assembly of claim 1 , further comprising preparing the frame, the preparing the frame comprising forming the cutting slot on the first support portion, the cutting slot having a depth that is less than a thickness of the first support portion, and both the ends of the mask being arranged nearer to the center of the mask frame assembly than an outside surface of the cutting slot after the cutting portion of the mask is removed. 9. A method of manufacturing a display device, the display device comprising a first electrode and a second electrode oppositely facing each other on a substrate and an organic layer between the first electrode and the second electrode, wherein the organic layer and the second electrode are deposited on the substrate by using a mask frame assembly, the mask frame assembly comprising: a mask having pattern openings; and a frame, the frame comprising: a first support portion configured to support an end of the mask and having a clamping slot, a cutting slot, and a support slot adjacent to the clamping slot, the cutting slot being nearer to a center of the frame than the support slot is; and a second support portion connected to the first support portion. 10. A method of manufacturing a mask frame assembly, the method comprising: arranging a mask on a frame, the mask having pattern openings, and the frame comprising: a first support portion configured to support an end of the mask and having a clamping slot, a cutting slot, and a support slot, the clamping slot being configured to allow in and out movement of a clamper, the support slot being adjacent to the clamping slot, and the cutting slot being arranged nearer to a center of the mask frame assembly than the support slot is; and a second support portion connected to the first support portion; mounting a support stick on the support slot and over the clamping slot, the support stick extending along a second direction; stretching an end of the mask in a first direction crossing the second direction and aligning a portion of the end of the mask to be on the support stick; joining the mask and the frame to each other; and removing a cutting portion of the mask, wherein the removing of the cutting portion of the mask is performed at the cutting slot.
using masks · CPC title
Electricity · mapped topic
using selective deposition, e.g. using a mask · CPC title
Manufacture or treatment specially adapted for the organic devices covered by this subclass · CPC title
Containers or parts thereof · CPC title
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