Front opening wafer container with robotic flange

Patent metadata

Field	Value
Publication number	US-9929032-B2
Application number	US-201615145674-A
Country	US
Kind code	B2
Filing date	May 3, 2016
Priority date	Oct 19, 2010
Publication date	Mar 27, 2018
Grant date	Mar 27, 2018

Abstract

A front opening wafer container suitable, for large diameter wafers, 300 mm and above, utilizes a removable robotic flange that attaches vertically, without separate fasteners, using detents having resilient bending members that extend vertically to attach to an upwardly extending flange on the top wall of the container portion. A multiplicity of upwardly and outwardly extending strengthening ribs extend upwardly from the top wall of the container portion and extend along the top wall toward the left and right sides and the back side of the container portion, ad each of all four sides of the attachment flange. A further locking piece or core may be inserted and retained at the neck of the robotic flange to lock the resilient deflectable portions in their retention position. The locking piece further may be secured in place with a detent mechanism formed by part of the core and flanges.

First claim

What is claimed is:

1. A front opening wafer container, comprising:
a container portion having a top wall, bottom wall, right side wall, left side wall, rear wall and door frame defining a front opening;
an upwardly extending flange on the top wall having four sides for connection to an attachment flange, each of the four sides of the upwardly extending flange having at least one aperture defined therein;
an attachment flange operably attached to the upwardly extending flange;
wherein the attachment flange includes a frame portion having four sides, with each side having at least one detent mechanism having a downwardly extending deflectable portion and a nub portion, wherein the detent mechanism actuates to capture the attachment flange with a downward placement of the frame portion of the attachment flange to engage the upwardly extending flange and to deflect a the downwardly extending resilient deflectable portions of each the detent mechanisms horizontally from a retention position to a deflected position and wherein in the retention position, the nub portion of the downwardly extending deflectable portion is received in a corresponding aperture of the upwardly extending flange and wherein the attachment flange may be installed and removed.

2. The front opening wafer container of claim 1 , further including an interlocking core piece for insertion and retention by the frame portion of the attachment flange for engaging and locking the plurality of downwardly extending resilient deflectable portions in their retention position.

3. The front opening wafer container of claim 1 , further including four parallel ribs each integral with and extending from one of the sides of the upwardly extending flange, the four parallel ribs integral with the top wall and extending toward the left side wall and extending around a top corner between the left side wall and the top wall and vertically down the left side wall and being continuous from the upwardly extending flange and down the left side wall.

4. The front opening wafer container of claim 3 , further including an additional four parallel ribs each integral with and extending from one of the sides of the upwardly extending flange, the additional four parallel ribs integral with the top wall and extending toward the right side wall and extending around a top corner between the right side wall and the top wall and vertically down the left side wall and being continuous from the upwardly extending flange and down the right side wall.

5. The front opening wafer container of claim 1 , wherein the downwardly extending portion of the at least one detent mechanism of each side comprises a leaf spring.

6. The front opening wafer container of claim 1 , wherein each nub portion comprises a wedge shaped surface.

7. The front opening wafer container of claim 5 , wherein each leaf spring extends in an upward direction Y.

8. The front opening wafer container of claim 7 , wherein the top wall generally extends in a direction X and a direction Z and the upward direction Y is orthogonal the direction X and the direction Y.

9. The front opening wafer container of claim 5 , wherein each nub portion extends horizontally into the corresponding aperture.

10. The front opening wafer container of claim 1 , wherein the top wall generally extends in a direction X and a direction Z and upwardly extending flange extends from the top wall in an upward direction Y that is orthogonal the direction X and the direction Y.

11. The front opening wafer container of claim 1 , wherein the top wall generally extends in a direction X and a direction Z and upwardly extending flange comprises four sides that each extend from the top wall in an upward direction Y that is orthogonal the direction X and the direction Y.

12. A front opening wafer container, comprising:
a container portion having a top wall, a pair of sidewalls, a back wall, bottom wall and a door frame defining a front opening;
an upwardly extending flange on the top wall of the container portion; and
a removable robotic flange that attaches vertically, without separate fasteners, using detent mechanisms having resilient bending members that extend in a downward direction to attach to the upwardly extending flange on the top wall of the container portion, the removable robotic flange having a frame portion defining a recess;
wherein an interlocking core member received in the recess defined by the frame portion of robotic flange such that a side wall of the interlocking core contacts the resilient members to cause the resilient member to flex in an inward direction towards the upwardly extending flange to lock the resilient bending members in place.

13. The front opening wafer container of claim 12 , wherein the top wall generally extends in a direction X and a direction Z and upwardly extending flange extends from the top wall in an upward direction Y that is orthogonal the direction X and the direction Y.

14. The front opening wafer container of claim 12 , wherein the top wall generally extends in a direction X and a direction Z and upwardly extending flange comprises four sides that each extend from the top wall in an upward direction Y that is orthogonal the direction X and the direction Y.

15. The front opening wafer container of claim 14 , wherein each resilient bending member comprises a leaf spring and a nub on the leaf spring.

16. The front opening wafer container of claim 14 , wherein each nub comprises a wedge shaped surface.

17. The front opening wafer container of claim 14 , wherein each nub is received in an aperture or recess defined by the upwardly extending flange.

18. The front opening wafer container of claim 14 , wherein each leaf spring extends in an upward direction Y.

19. The front opening wafer container of claim 14 , wherein each nub extends horizontally into an aperture or recess defined by the upwardly extending flange.

Assignees

• Entegris Inc

Inventors

• Gregerson Barry

Classifications

• H10P72/3402

  Mechanical parts of transfer devices · CPC title

• H10P72/1922

  characterised by the construction of the closed carrier · CPC title

• H10P72/10 Primary

  using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] · CPC title

• H10P72/1918 Primary

  characterised by coupling elements, kinematic members, handles or elements to be externally gripped · CPC title

• H01L21/67379 Primary

  Electricity · mapped topic