Resist having tuned interface hardmask layer for EUV exposure

Patent metadata

Field	Value
Publication number	US-9929012-B1
Application number	US-201615378655-A
Country	US
Kind code	B1
Filing date	Dec 14, 2016
Priority date	Dec 14, 2016
Publication date	Mar 27, 2018
Grant date	Mar 27, 2018

Abstract

A method is disclosed to prepare a substrate for photolithography. The method includes forming an underlayer over a surface of the substrate; depositing an interface hardmask layer on the underlayer using one of a vapor phase deposition process or an atomic layer deposition process; and forming a layer of extreme UV (EUV) resist on the interface hardmask layer, where the interface hardmask layer is comprised of material having a composition and properties tuned to achieve a certain secondary electron yield from the interface hardmask layer. Also disclosed is a structure configured for photolithography. The structure includes a substrate; an underlayer over a surface of the substrate; an interface hardmask layer disposed on the underlayer; and a layer of EUV resist disposed on the interface hardmask layer. The interface hardmask layer contains material having a composition and properties tuned to achieve a certain secondary electron yield from the interface hardmask layer.

First claim

What is claimed is:

1. A method to prepare a substrate for photolithography, comprising:
forming an underlayer over a surface of the substrate;
depositing an interface hardmask layer on the underlayer using one of a vapor phase deposition process or an atomic layer deposition process; and
forming a layer of extreme UV (EUV) resist on the interface hardmask layer, where
the interface hardmask layer is comprised of material having a composition and properties tuned to achieve a certain secondary electron yield from the interface hardmask layer;
where the interface hardmask layer is tuned by depositing the interface hardmask layer as a metal oxide layer or by depositing the interface hardmask layer as a metal layer and subsequently oxidizing the metal layer to a predetermined degree of oxidation to optimize a lithographic feature dose to size characteristic.

2. The method as in claim 1 , where the interface hardmask layer is comprised of at least one of: Me; MeO; MeC; MeCO; MeN; MeON; and MeCON, where Me stands for a transition metal, and where N is nitrogen, O is oxygen and C is carbon.

3. The method as in claim 1 , where the interface hardmask layer is comprised of at least one of: Ti, Al, Ta, Cu, W, Ga, Mn, Co, Hf, La and other metals with higher Z number, oxides of these metals, carbides of these metals, nitrides of these metals and silicides of these metals.

4. The method as in claim 1 , where a thickness of the interface hardmask layer is in a range of about 1 nm to about 10 nm.

5. The method as in claim 1 , where depositing the interface hardmask layer is accomplished at a temperature less than a melting temperature of a material that comprises the underlayer.

6. The method as in claim 1 , where the underlayer is comprised of at least one of a dielectric and an optical planarizing layer (OPL), and where depositing the interface hardmask layer is accomplished at temperature selected to avoid outgassing from the underlayer.

7. The method as in claim 1 , where the interface hardmask layer is comprised of a transition metal and is tuned by implanting oxygen ions into the interface hardmask layer and annealing the implanted interface hardmask layer to create an oxidized form of the transition metal.

8. The method as in claim 1 , where the interface hardmask layer is tuned by at least one of controlling a microstructure of the interface hardmask layer and controlling a degree of crystallinity of the interface hardmask layer ranging from amorphous to polycrystalline to crystalline.

9. The method as in claim 1 , where the interface hardmask layer is tuned by exposing the deposited interface hardmask layer to at least one plasma.

10. The method as in claim 1 , where the interface hardmask layer is tuned by controlling binary x, y or ternary x, y and z relative composition values of elements that comprise the interface hardmask layer.

11. A structure configured for photolithography, comprising:
a substrate;
an underlayer over a surface of the substrate;
an interface hardmask layer disposed on the underlayer; and

a layer of extreme UV (EUV) resist disposed on the interface hardmask layer, where
the interface hardmask layer is comprised of material having a composition and properties tuned to achieve a certain secondary electron yield from the interface hardmask layer, where the interface hardmask layer comprises a metal oxide layer or a metal layer, and where the metal oxide layer or the metal layer comprises an oxidation layer oxidized to a predetermined degree of oxidation to optimize a lithographic feature dose to size characteristic.

12. The structure as in claim 11 , where the interface hardmask layer is comprised of at least one of: Me; MeO; MeC; MeCO; MeN; MeON; and MeCON, where Me stands for a transition metal, and where N is nitrogen, O is oxygen and C is carbon.

13. The structure as in claim 11 , where the interface hardmask layer is comprised of at least one of: Ti, Al, Ta, Cu, W, Ga, Mn, Co, Hf, La and other metals with higher Z number, oxides of these metals, carbides of these metals, nitrides of these metals and silicides of these metals.

14. The structure as in claim 11 , where a thickness of the interface hardmask layer is in a range of about 1 nm to about 10 nm.

15. The structure as in claim 11 , where the interface hardmask layer is tuned by implanting ions into the interface hardmask layer, where the interface hardmask layer is comprised of a transition metal and is tuned by implanting oxygen ions into the interface hardmask layer and annealing the implanted interface hardmask layer to create an oxidized form of the transition metal.

16. The structure as in claim 11 , where the interface hardmask layer is tuned by controlling one or both of a microstructure of the interface hardmask layer and a degree of crystallinity of the interface hardmask layer ranging from amorphous to polycrystalline to crystalline.

17. The structure as in claim 11 , where the interface hardmask layer is tuned by controlling binary x, y or ternary x, y and z relative composition values of elements that comprise the interface hardmask layer.

18. A method to prepare a substrate for photolithography, comprising:
forming an underlayer over a surface of the substrate;
depositing an interface hardmask layer on the underlayer using one of a vapor phase deposition process or an atomic layer deposition process; and
forming a layer of extreme UV (EUV) resist on the interface hardmask layer, where
the interface hardmask layer is comprised of material having a composition and properties tuned to achieve a certain secondary electron yield from the interface hardmask layer;
where the interface hardmask layer is tuned by implanting ions into the interface hardmask layer.

Assignees

• IBM

Inventors

• Belyansky Michael P
• Bonam Ravi K
• Desilva Anuja
• Halle Scott

Classifications

• H10P76/405 Primary

  characterised by their composition, e.g. multilayer masks · CPC title

• H10P14/6938

  the material containing at least one metal element, e.g. metal oxides, metal oxynitrides or metal oxycarbides · CPC title

• H10P14/6544

  to change the morphology of the insulating materials, e.g. transformation of an amorphous layer into a crystalline layer · CPC title

• H10P14/6519

  the substance being oxygen · CPC title

• H10P14/6339

  deposition by cyclic CVD, e.g. ALD, ALE or pulsed CVD · CPC title