Cross sectional depth composition generation utilizing scanning electron microscopy

Patent metadata

Field	Value
Publication number	US-9928990-B2
Application number	US-201715427764-A
Country	US
Kind code	B2
Filing date	Feb 8, 2017
Priority date	Jan 11, 2016
Publication date	Mar 27, 2018
Grant date	Mar 27, 2018

Abstract

A method for generating cross-sectional profiles using a scanning electron microscope (SEM) includes scanning a sample with an electron beam to gather an energy-dispersive X-ray spectroscopy (EDS) spectrum for an energy level to determine element composition across an area of interest. A mesh is generated to locate positions where a depth profile will be taken. EDS spectra are gathered for energy levels at mesh locations. A number of layers of the sample are determined by distinguishing differences in chemical composition between depths as beam energies are stepped through. A depth profile is generated for the area of interest by compiling the number of layers and the element composition across the mesh.

First claim

What is claimed is:

1. A system for depth profiling a sample, comprising:
an excitation source configured to scan a sample with an excitation beam;
at least one energy detector to gather excitation spectra for a plurality of energy levels to determine element composition and layer interfaces across an area of interest;
a mesh generating module for generating a mesh that locates a plurality of locations on the sample; and
a data reconstruction module configured to analyze excitation spectra for a plurality of energy levels at the plurality of locations in the area of interest to determine a number of layers and their composition at each location by distinguishing differences in chemical composition between depths as beam energies are stepped through, the data reconstruction module further configured to generate a depth profile for the area of interest by compiling the number of layers, the depths, and the chemical composition.

2. The system as recited in claim 1 , wherein the number of beam energies included are stepped through a set step size.

3. The system as recited in claim 1 , wherein the depth profile is determined by correlating beam energy with atomic number and/or material density to determine a depth of an interface between materials of different chemical compositions.

4. The system as recited in claim 1 , further comprising a profile data structure for storing information for the depth profile.

5. The system as recited in claim 1 , wherein the depth profile provides a virtual model of the sample.

6. The system as recited in claim 1 , wherein the excitation source comprises a scanning electron microscope (SEM).

7. The system as recited in claim 1 , wherein the excitation beam comprises an electron beam.

8. The system as recited in claim 1 , wherein the at least one energy detector comprises at least one energy dispersive X-ray spectroscopy (EDS) detector.

9. The system as recited in claim 1 , wherein the mesh is generated to determine the plurality of locations in the area of interest.

10. The system as recited in claim 1 , further comprising a display configured to display an image of a cross-sectional structure of the sample as a result of the depth profile.

11. The system as recited in claim 1 , further comprising at least one electronic amplifier configured to detect and amplify current absorbed from the excitation beam by the sample.

12. A system for depth profiling a sample, comprising:
a mesh generated to locate positions on the sample where a depth profile will be taken;
a data reconstruction module configured to gather energy-dispersive X-ray spectroscopy (EDS) spectra using an applied electron beam for a plurality of energy levels at a plurality of mesh locations to determine a number of layers and their composition at each mesh location as beam energies are varied, the data reconstruction module further configured to generate a depth profile for the area of interest.

13. The system as recited in claim 12 , wherein the number of beam energies included are stepped through a set step size.

14. The system as recited in claim 12 , wherein the depth profile is determined by correlating beam energy with atomic number and/or material density to determine a depth of an interface between materials of different chemical compositions.

15. The system as recited in claim 12 , further comprising a profile data structure for storing information for the depth profile.

16. The system as recited in claim 12 , wherein the depth profile provides a virtual model of the sample.

17. The system as recited in claim 12 , wherein the mesh includes a grid size, the grid size being adjustable such that an adjustment to the grid size controls a resolution of the depth profile.

18. The system as recited in claim 12 , further comprising a display configured to display an image of a cross-sectional structure of the sample as a result of the depth profile.

19. The system as recited in claim 12 , further comprising at least one electronic amplifier configured to detect and amplify current absorbed from the excitation beam by the sample.

20. The system as recited in claim 12 , wherein the data reconstruction module is configured to determine the number of layers and their composition using a Monte Carlo simulation of beam penetration depth.

Assignees

• IBM

Inventors

• Campbell Eric J
• Czaplewski Sarah K

Classifications

• H01J37/222

  Image processing arrangements associated with the tube · CPC title

• H01J37/28 Primary

  with scanning beams {(H01J37/268, H01J37/292, H01J37/2955 take precedence)} · CPC title

• H01J2237/2815

  Depth profile · CPC title

• H01J2237/248

  Components associated with the control of the tube · CPC title

• H01J2237/2807

  X-rays · CPC title