Cable power loss determination for virtual metrology

Patent metadata

Field	Value
Publication number	US-9927481-B2
Application number	US-201715427978-A
Country	US
Kind code	B2
Filing date	Feb 8, 2017
Priority date	Jan 10, 2014
Publication date	Mar 27, 2018
Grant date	Mar 27, 2018

Abstract

A method for modeling cable loss is described. The method includes receiving a measurement of reverse power and forward power at a radio frequency (RF) generator. The method further includes computing theoretical power delivered to a matching network as a difference between the forward power and the reverse power and calculating a ratio of the reverse power to the forward power to generate an RF power reflection ratio. The method further includes identifying a cable power attenuation fraction based on a frequency of the RF generator and calculating a cable power loss as a function of the RF power reflection ratio, the cable power attenuation fraction, and the theoretical power. The method includes calculating actual power to be delivered to the impedance matching network based on the theoretical power and the cable power loss and sending the calculated actual power to the RF generator to generate an RF signal.

First claim

The invention claimed is:

1. A method for using a computer-generated model to determine power at an output of a radio frequency (RF) cable, comprising:
receiving a measurement of power at an output of an RF generator from a sensor located within the RF generator, wherein said receiving the measurement of power is performed when the RF generator is coupled via the RF cable to an impedance matching network and the impedance matching network is coupled via an RF transmission line to a plasma chamber;
generating, by a computer, a computer model of the RF cable, wherein the computer model of the RF cable has an input and an output, wherein the measurement is received at the input of the computer model;
propagating the power measured at the output of the RF generator from the input of the computer model via the computer model to the output of the computer model to determine power at the output of the computer model; and
controlling power supplied by the RF generator based on the power at the output of the computer model.

2. The method of claim 1 , wherein the power is measured by a sensor that follows a National Institute of Standards and Technology (NIST) standard.

3. The method of claim 1 , wherein the computer model is generated from a cable power attenuation fraction of the RF cable and an RF power reflection ratio, wherein the cable power attenuation fraction is generated from a length of the RF cable and a frequency of operation of the RF generator, wherein the RF power reflection ratio is generated from power that is reflected towards the RF generator and power that is supplied by the RF generator.

4. The method of claim 3 , wherein propagating the power measured at the output of the RF generator comprises computing the power at the output of the computer model based on the power measured at the output of the RF generator, the cable power attenuation fraction, and the RF power reflection ratio.

5. The method of claim 1 , wherein said controlling the RF generator comprises sending a control signal to the RF generator to change an amount of the power generated and supplied by the RF generator.

6. A system for using a computer-generated model to determine power at an output of a radio frequency (RF) cable, comprising:
an RF generator having an output that is coupled to a sensor, wherein the sensor is located within the RF generator;
an RF cable coupled to the output of the RF generator;
an impedance matching network coupled to the RF cable;
an RF transmission line coupled to the impedance matching network;
a plasma chamber coupled to the RF transmission line; and
a host computer system coupled to the sensor, wherein the host computer system is configured to:
receive a measurement of power at the output of the RF generator;
generate a computer model of the RF cable, wherein the computer model of the RF cable has an input and an output, wherein the measurement is received at the input of the computer model;
propagate the power measured at the output of the RF generator from the input of the computer model via the computer model to the output of the computer model to determine power at the output of the computer model; and
control power that is supplied by the RF generator based on the power at the output of the computer model.

7. The system of claim 6 , wherein the sensor follows a National Institute of Standards and Technology (NIST) standard.

8. The system of claim 6 , wherein the computer model is generated from a cable power attenuation fraction of the RF cable and an RF power reflection ratio, wherein the cable power attenuation fraction is generated from a length of the RF cable and a frequency of operation of the RF generator, wherein the RF power reflection ratio is generated from power that is reflected towards the RF generator and power that is supplied by the RF generator.

9. The system of claim 8 , wherein the host computer system is configured to compute the power at the output of the computer model based on the power measured at the output of the RF generator, the cable power attenuation fraction, and the RF power reflection ratio.

10. The system of claim 6 , wherein the host computer system is configured to send a control signal to the RF generator to change an amount of the power generated and supplied by the RF generator.

11. A non-transitory computer readable medium storing a program causing a computer to execute a method comprising:
receiving a measurement of power at an output of a radio frequency (RF) generator from a sensor located within the RF generator, wherein said receiving the measurement of power is performed when the RF generator is coupled via an RF cable to an impedance matching network and the impedance matching network is coupled via an RF transmission line to a plasma chamber;
generating a computer model of the RF cable, wherein the computer model of the RF cable has an input and an output, wherein the measurement is received at the input of the computer model;
propagating the power measured at the output of the RF generator from the input of the computer model via the computer model to the output of the computer model to determine power at the output of the computer model; and
controlling power supplied by the RF generator based on the power at the output of the computer model.

12. The non-transitory computer readable medium of claim 11 , wherein the measurement is made by a sensor that follows a National Institute of Standards and Technology (NIST) standard.

13. The non-transitory computer readable medium of claim 11 , wherein the computer model is generated from a cable power attenuation fraction of the RF cable and an RF power reflection ratio, wherein the cable power attenuation fraction is generated from a length of the RF cable and a frequency of operation of the RF generator, wherein the RF power reflection ratio is generated from power that is reflected towards the RF generator and power that is supplied by the RF generator.

14. The non-transitory computer readable medium of claim 13 , wherein propagating the power measured at the output of the RF generator comprises computing the power at the output of the computer model based on the power measured at the output of the RF generator, the cable power attenuation fraction, and the RF power reflection ratio.

15. The non-transitory computer readable medium of claim 11 , wherein the method further comprises controlling the RF generator based on the power at the output of the computer model, wherein said controlling the RF generator comprises sending a control signal to the RF generator to change an amount of the power generated and supplied by the RF generator.

Assignees

• Lam Res Corp

Inventors

• Howald Arthur M
• Valcore Jr John C

Classifications

• G01R21/07 Primary

  in circuits having distributed constants (G01R21/09 takes precedence) · CPC title

• G01R31/58 Primary

  Testing of lines, cables or conductors (testing of electric windings G01R31/72) · CPC title

• G01R11/25

  Arrangements for indicating or signalling faults · CPC title

• G01R27/06

  Measuring reflection coefficients; Measuring standing-wave ratio · CPC title

• G01R31/31721 Primary

  Power aspects, e.g. power supplies for test circuits, power saving during test (for scan test G01R31/318575) · CPC title