Imaging and Sensing of Thin Layer Using High-Frequency Ultrasonic Transducers
US-2024036005-A1 · Feb 1, 2024 · US
US9927402B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9927402-B2 |
| Application number | US-201414444561-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jul 28, 2014 |
| Priority date | Jan 27, 2012 |
| Publication date | Mar 27, 2018 |
| Grant date | Mar 27, 2018 |
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A method and device for estimating a density value ρ m indicative of a true density ρ or for estimating a viscosity value η m indicative of a true viscosity η of a fluid is disclosed. For this, a first resonance frequency f R of a first mechanical oscillator in a reference volume and a second resonance frequency f F of a second mechanical oscillator in contact with the fluid are measured. The estimated value ρ m or η m is then derived using these resonance frequencies f R and f F . During this derivation, at least one fluid-temperature- or fluid-pressure-dependent parameter of the fluid is used. Additionally or alternatively, the first (i.e. reference) mechanical oscillator is arranged in contact with a reference fluid. Thus, fundamental errors in the derivation of the estimated value ρ m or η m are reduced and the estimated value becomes more reliable.
Opening claim text (preview).
The invention claimed is: 1. A method for deriving an estimated value ρ m which is indicative of a density ρ of a fluid with a fluid temperature T F and a fluid pressure p F , the method comprising the steps of: a) measuring a first resonance frequency f R of a resonant vibration of a first mechanical oscillator, wherein said first mechanical oscillator is arranged in a reference volume and wherein said first mechanical oscillator is secluded from said fluid; b) measuring a second resonance frequency f F of a resonant vibration of a second mechanical oscillator, wherein said second mechanical oscillator is arranged in a measurement volume, wherein said measurement volume comprises said fluid, and wherein said fluid is in contact with said second mechanical oscillator; c) deriving said estimated value ρ m using said first resonance frequency f R and said second resonance frequency f F ; wherein in said step c) said fluid temperature T F and/or said fluid pressure p F and/or at least one parameter which is dependent on said fluid temperature T F and/or on said fluid pressure p F is/are used for deriving said estimated value ρ m ; wherein in said step c) a fluid-temperature-dependent viscosity function η(T F ) is used for deriving said estimated value ρ m , wherein the fluid-temperature-dependent viscosity function η(T F ) is known, pre-measured or pre-modeled; wherein said estimated value ρ m , which is indicative of said density ρ of said fluid, is derived; and wherein in said step c) a fluid-temperature-dependent offset parameter C(T F ) is used for deriving said estimated value ρ m , wherein said fluid-temperature-dependent offset parameter C(T F ) is indicative of a temperature-dependent frequency offset between said first and said second mechanical oscillators, and/or between a first oscillator circuit connected to and used to operate said first mechanical oscillator and a second oscillator circuit connected to and used to operate said second mechanical oscillator. 2. The method of claim 1 , wherein a plurality of values of η for different fluid temperatures T F are pre-stored in a lookup-table or calculated on-the-fly. 3. The method of claim 1 , wherein in said step c) a fluid-pressure-dependent viscosity function η(p F ) is used for deriving said estimated value ρ m , wherein a plurality of values of η for different fluid pressures p F are prestored in a lookup-table or calculated on-the-fly, by fitting and/or interpolation or extrapolation algorithms. 4. The method of claim 1 , wherein in said step c) a fluid-pressure-dependence of the offset parameter C(T F , p F ) is also used for deriving said estimated value ρ m . 5. The method of claim 1 , wherein a reference-fluid-temperature-dependence δη/δT F of a viscosity function η(T R ) of the reference fluid is equal to or differs less than ±30% from a fluid-temperature-dependence δη/δT F of the fluid-temperature-dependent viscosity function η(T F ) of said fluid, at least for fluid temperatures T F and reference fluid temperatures T R in a range between 170 K and 400 K. 6. The method of claim 1 , wherein said estimated value ρ m is derived according to: f R - f F = A ρ m + B ~ ρ m η ( p f , T f ) + C ( p F , T F ) with A = c 1 t 2 ρ q w f d and B ~ = c 2 2 ρ q w f d π and with c 1 , c 2 , t, and w being oscillator-geometry-dependent constants, with ρ q being an effective density of a material of said mechanical oscillators with η(p F ,T F ) being a fluid-pressure- and/or fluid-temperature-dependent viscosity function of said fluid, with f d being a common design resonance frequency of said first and second mechanical oscillators, and with C(p F ,T F ) being a fluid-pressure- and/or fluid-temperature-dependent offset parameter which is indicative of a frequency offset between said first and said second mechanical oscillator and/or between a first oscillator circuit connected to said first mechanical oscillator and a second oscillator circuit connected to said second mechanical oscillator; wherein said reference fluid temperature T R in Kelvin is equal to or differs less than
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