Devices and methods for spectroscopic analysis

Patent metadata

Field	Value
Publication number	US-9927361-B2
Application number	US-201414276101-A
Country	US
Kind code	B2
Filing date	May 13, 2014
Priority date	May 16, 2013
Publication date	Mar 27, 2018
Grant date	Mar 27, 2018

Abstract

The present invention relates to devices and methods for spectrometric analysis of light-emitting samples. The device comprises a particle beam source, which generates a primary particle beam directed to the sample in such a way that the primary particle beam is incident on the sample and photons are released from the sample due to the interaction between primary particle beam and sample material. Moreover, the device comprises a plurality of light-pickup elements, which are suitable for capturing the photons released from the sample, wherein the light-pickup elements capture the photons emitted in the respectively assigned solid-angle range. Furthermore, the device comprises conduction elements, which are embodied to forward captured photons to an evaluation unit, and an analysis system, which comprises a plurality of evaluation units in such a way that photons captured by each light-pickup element are analyzed spectrally.

First claim

The invention claimed is:

1. A device, comprising:
a particle beam source configured to generate a primary particle beam directable to a surface of a sample so that, when the primary particle beam is incident on the sample, photons are released from the sample due to the interaction between primary particle beam and the sample;
light-pickup elements configured to capture photons released from the sample, each light-pickup element being configured to capture photons emitted in a solid-angle range;
conduction elements configured to forward captured photons to an evaluation unit; and
an analysis system comprising a plurality of evaluation units so that photons captured by each light-pickup element are spectrally analyzable,
wherein the light-pickup elements are arranged on a segment of a spherical surface, and the segment of the spherical surface has a radius extending perpendicular to the surface of the sample.

2. The device of claim 1 , wherein the light-pickup elements are arranged in a plane.

3. The device of claim 1 , wherein the evaluation units of the analysis system comprise miniaturized spectrometers, and the light-pickup elements comprise collecting optical units.

4. The device of claim 1 , wherein the analysis system comprises a multi-channel spectrometer.

5. The device of claim 4 , wherein the multi-channel spectrometer comprises a time-resolving photon detector.

6. The device of claim 1 , wherein the light-pickup elements comprise light-entry openings of optical fibers.

7. The device of claim 6 , wherein a light-entry opening comprises a member selected from the group consisting of a polished fiber end face, an angled polished fiber end face, a spherical optical unit, and a prism.

8. The device of claim 6 , wherein the light-entry openings comprise antiglare.

9. The device of claim 6 , wherein optical fibers comprise metallized surfaces.

10. The device of claim 1 , wherein the particle beam source comprises an electron source.

11. The device of claim 1 , wherein the particle beam source comprises an ion source.

12. The device of claim 1 , wherein the analysis system comprises a first spectrometer and a second spectrometer, the second spectrometer being configured to use a radiation portion diffracted in the zero order in the first spectrometer.

13. The device of claim 1 , wherein, between the particle beam source and the sample, the particle beam path does not pass through the light-pickup elements.

14. A method, comprising:
directing a primary particle beam to a surface of a sample so that the primary particle beam is incident on the sample and photons are released from the sample due to the interaction between the primary particle beam and the sample and so that released photons move along a multiplicity of possible trajectories;
simultaneously capturing the released photons via a multiplicity of light-pickup elements, wherein each individual light-pickup element corresponds to a solid-angle range of the trajectories;
forwarding the captured photons to an analysis system, wherein the analysis system comprises a multiplicity of evaluation units so that an evaluation unit is assigned to each light-pickup element; and
recording optical spectra so that a spectrum is generated for each light-pickup element on the basis of the photons captured by this light-pickup element,
wherein the light-pickup elements are arranged on a segment of a spherical surface, and the segment of the spherical surface has a radius extending perpendicular to the surface of the sample.

15. The method of claim 14 , further comprising evaluating the recorded optical spectra.

16. The method of claim 14 , wherein the primary particle beam comprises an electron beam.

17. The method of claim 14 , wherein the primary particle beam comprises an ion beam.

18. The method of claim 14 , further comprising evaluating the obtained spectra via chemometric processes.

19. The method of claim 14 , wherein the light-pickup elements are arranged in a plane.

20. The method of claim 14 , wherein the evaluation units of the analysis system comprise miniaturized spectrometers, and the light-pickup elements comprise collecting optical units.

21. The method of claim 14 , wherein the particle beam is produced by a primary particle beam source, and wherein between the particle beam source and the sample, the particle beam path does not pass through the light-pickup elements.

22. A device, comprising:
a particle beam source configured to generate a primary particle beam directable to a sample so that, when the primary particle beam is incident on the sample, photons are released from the sample due to the interaction between primary particle beam and the sample;
light-pickup elements configured to capture photons released from the sample, each light-pickup element being configured to capture photons emitted in a solid-angle range;
conduction elements configured to forward captured photons to an evaluation unit; and
an analysis system comprising a plurality of evaluation units so that photons captured by each light-pickup element are spectrally analyzable,
wherein, between the particle beam source and the sample:
the particle beam path does not pass through the light-pickup elements; and
the particle beam path passes between at least two of the light-pickup elements.

Assignees

• Zeiss Carl Microscopy Gmbh

Inventors

• Correns Nico
• Rode Michael

Classifications

• G01N21/64 Primary

  Fluorescence; Phosphorescence · CPC title

• G01N23/2254 Primary

  Measuring cathodoluminescence · CPC title

• G01N2223/501

  array · CPC title

• G01J3/28

  Investigating the spectrum (using colour filters G01J3/51) · CPC title

• G01N2021/213

  Spectrometric ellipsometry · CPC title