Adapter for replaceable lamp

Patent metadata

Field	Value
Publication number	US-9922815-B2
Application number	US-201414546103-A
Country	US
Kind code	B2
Filing date	Nov 18, 2014
Priority date	Dec 19, 2013
Publication date	Mar 20, 2018
Grant date	Mar 20, 2018

Abstract

Embodiments of the present disclosure generally relate to an improved adapter for simplified lamps for use as a source of heat radiation in a rapid thermal processing (RTP) chamber. In one embodiment, a lamp assembly is provided. The lamp element includes a capsule having a filament disposed therein, a press seal extending from the capsule, and an adapter having a receptacle contoured to receive at least a portion of the press seal, wherein the press seal is removably engaged with the adapter.

First claim

The invention claimed is:

1. A lamp assembly, comprising:
a lamp element comprising:
a capsule having a filament disposed therein; and
a press seal extending from the capsule, wherein the press seal has a first engagement feature;
a first electrically conductive lead extending out of the press seal and a second electrically conductive lead extending out of the press seal, wherein each of the first electrically conductive lead and the second electrically conductive lead has a first end in electrical communication with the filament and a second end;

an adapter removably engaged with at least a portion of the press seal, the adapter having a first end and a second end opposing the first end, wherein the adapter is extended along a longitudinal direction of the press seal, and the first end of the adapter has a receptacle contoured to receive and surround at least a bottom portion of the press seal, the adapter further having:
a first channel extending through the adapter from the first end to the second end, wherein the first channel is sized to allow the passage of the first electrically conductive lead; and
a second channel extending through the adapter from the first end to the second end, wherein the second channel is sized to allow the passage of the second electrically conductive lead, wherein the adapter has a second engagement feature to engage or disengage with the first engagement feature of the press seal;

a first conductive pin coupled to a second end of the first electrically conductive lead, the first conductive pin extending through the first channel; and
an insulative sleeve having a first end coupled to a second end of the second electrically conductive lead and a second end coupled to a second conductive pin, the insulative sleeve extending through the second channel, the insulative sleeve having an inner surface coated with a metallic layer, wherein the metallic layer is in electrical communication with the second electrically conductive lead and the second conductive pin.

2. The lamp assembly of claim 1 , further comprising:
a thermal conductivity compound layer provided between the press seal and the receptacle.

3. A lamp assembly for use in a thermal processing chamber, comprising:
a capsule having a filament disposed therein and a press seal, wherein the press seal has a first engagement feature formed on an exterior surface of the press seal;
a first filament lead and a second filament lead, wherein the first and second filament leads electrically connected the filament to a first metal foil and a second metal foil disposed within the press seal, respectively;
a first electrically conductive lead and a second electrically conductive lead, wherein the first and second electrically conductive leads electrically connect the first and second metal foils to respective electrically conductive receptacles formed in a circuit board structure positioned external to the lamp assembly;
an adapter having an opening at first and second ends thereof, wherein the adapter is extended along a longitudinal direction of the press seal, and the first end of the adapter has a receptacle contoured to receive and surround at least a bottom portion of the press seal, and the opening at the first end has a second engagement feature to engage or disengage with the first engagement feature of the press seal, the adapter having:
a first channel extending through the adapter from the first end to the second end, wherein the first channel is sized to allow the first electrically conductive lead passing through; and
a second channel extending through the adapter from the first end to the second end, the second channel is sized to allow the second electrically conductive lead passing through; and

a first conductive pin having a first end coupled to the first electrically conductive lead and a second end coupled to a first electrical connector, the first conductive pin extending through the first channel, and the first electrical connector is sized to be inserted into one of the electrically conductive receptacles formed in the circuit board structure;
an insulative sleeve having a first end coupled to a second end of the second electrically conductive lead and a second end coupled to a second conductive pin, the second conductive pin is electrically connected to a second electrical connector that is sized to be inserted into one of the electrically conductive receptacles formed in the circuit board sructure, the insulative sleeve extending through the second channel, and the insulative sleeve defining an inner volume; and
a fuse extending within the inner volume of the insulative sleeve, the fuse having a first end coupled to the second electrically conductive lead and a second end coupled to the second conductive pin.

4. A lamp assembly, comprising:
a lamp comprising:
a capsule having a filament disposed therein;
a press seal extending from the capsule, wherein the press seal has a first engagement feature;
a first lead and a second lead, wherein each of the first lead and the second lead is electrically coupled to the filament and extends from the press seal;
an insulative sleeve disposed external to the press seal, the insulative sleeve coupled to the first lead external to the press seal, and the insulative sleeve being filled with low melting point glass beads or insulating particles;
a first conductive pin coupled to the second lead; and
a fuse disposed external to the press seal, the fuse extending within the insulative sleeve and electrically coupling the first lead to a second conductive pin, wherein the second conductive pin is electrically coupled to the insulative sleeve; and

an adapter having a first end and a second end opposing the first end, wherein the adapter is extended along a longitudinal direction of the press seal, and the first end of the adapter has a receptacle contoured to receive and surround at least a bottom portion of the press seal, and the adapter having a second engagement feature to engage or disengage with the first engagement feature of the press seal, wherein the adapter has at least one channel extended from the first end to the second end to allow the first and second electrically conductive leads to pass through.

Assignees

• Applied Materials Inc

Inventors

• Ranish Joseph M
• Serebryanov Oleg V

Classifications

• H01K1/44

  directly applied to, or forming part of, the vessel · CPC title

• H05B3/0038

  for industrial applications · CPC title

• H01K1/36

  Seals between parts of vessel, e.g. between stem and envelope · CPC title

• H01K1/46 Primary

  supported by a separate part, e.g. base, cap · CPC title

• H01K1/66 Primary

  with built-in fuse · CPC title