Exposure apparatus, movable body apparatus, flat-panel display manufacturing method, and device manufacturing method

Patent metadata

Field	Value
Publication number	US-9921496-B2
Application number	US-201514981630-A
Country	US
Kind code	B2
Filing date	Dec 28, 2015
Priority date	Sep 7, 2010
Publication date	Mar 20, 2018
Grant date	Mar 20, 2018

Abstract

In a substrate stage, when a Y coarse movement stage moves in the Y-axis direction, an X coarse movement stage, a weight cancellation device, and an X guide move integrally in the Y-axis direction with the Y coarse movement stage, and when the X coarse movement stage moves in the X-axis direction on the Y coarse movement stage, the weight cancellation device move on the X guide in the X-axis direction integrally with the X coarse movement stage. Because the X guide is provided extending in the X-axis direction while covering the movement range of the weight cancellation device in the X-axis direction, the weight cancellation device is constantly supported by the X guide, regardless of its position. Accordingly, a substrate can be guided along the XY plane with good accuracy.

First claim

What is claimed is:

1. An exposure apparatus that exposes an object with an energy beam for exposure while moving the object in a first direction, the apparatus comprising:
an object holding device that holds the object;
a support device that supports the object holding device;
a support member that supports, in a non-contact manner, the support device that supports the object holding device;
a first drive section that causes the support device to relatively move with respect to the support member in the first direction, in a state in which the support device supports the object holding device; and
a second drive section that causes the support member and the support device on the support member to move in a second direction intersecting the first direction.

2. The exposure apparatus according to claim 1 , further comprising
a connecting member that connects the second drive section and the support member, wherein
the second drive section causes the support member to move in the second direction via the connecting member.

3. The exposure apparatus according to claim 1 , wherein
the second drive section is disposed on both sides of the support member in the second direction.

4. The exposure apparatus according to claim 2 , wherein
when compared to rigidity of the connecting member in the second direction, rigidity of the connecting member in other directions is lower.

5. The exposure apparatus according to claim 2 , wherein
the connecting member is connected to the support member on an axis that passes through a center of gravity of the support member and is parallel to the second direction.

6. The exposure apparatus according to claim 1 , wherein the first drive section is disposed on both sides of the support device in the second direction, and causes the support device to move in the first direction.

7. The exposure apparatus according to claim 1 , further comprising
a connecting device that connects the support device and the first drive section, wherein
the first drive section causes the support device to relatively move with respect to the support member in the first direction via the connecting device.

8. The exposure apparatus according to claim 1 , further comprising
a first supporting device that has a first member and a second member, the first member and the second member supporting different parts of the support member in the first direction from below, wherein
the support member moves on the first supporting device in the second direction.

9. The exposure apparatus according to claim 8 , wherein
the first member and the second member are disposed apart from each other in the first direction,
the first supporting device supports the support member in a state in which the support member is bridged between the first member and the second member.

10. The exposure apparatus according to claim 8 , wherein
the first supporting device has a guide member that guides movement of the support member in the second direction.

11. The exposure apparatus according to claim 8 , further comprising
a second supporting device disposed away from the first supporting device in the first direction, that supports the second drive section.

12. The exposure apparatus according to claim 11 , wherein
the second supporting device is disposed on each of one end side of the first member in the first direction and the other end side of the second member in the first direction.

13. The exposure apparatus according to claim 11 , wherein
the second supporting device is disposed between the first member and the second member in the first direction.

14. The exposure apparatus according to claim 1 , wherein
the support member is moved in the second direction by being pushed by the second drive section.

15. The exposure apparatus according to claim 14 , further comprising
a blowout section that blows out gas from one of the support member and the second drive section to the other, wherein
the support member is moved in the second direction, by being pushed in a non-contact state by the second drive section via the gas.

16. The exposure apparatus according to claim 14 , wherein
the support member has a first magnet,
the second drive section has a second magnet that is provided opposing the first magnet in the second direction, a part of the second magnet and a part of the first magnet that oppose each other having the same magnetic pole, and
the support member is moved in the second direction, by being pushed by the second drive section in a non-contact state by a repulsive force generated between the first and the second magnets.

17. The exposure apparatus according to claim 1 , wherein
the support device supports the object holding device in a non-contact manner so as to be movable relative to the object holding device.

18. The exposure apparatus according to claim 1 , wherein
the object holding device is finely movable with respect to the first drive section in at least the first direction, the second direction, and a direction around an axis orthogonal to the first and the second directions.

19. The exposure apparatus according to claim 1 , wherein
the support device has a tilting device that tilts the object holding device.

20. The exposure apparatus according to claim 1 , further comprising
a restriction member that restricts a range in which the support member and the support device are movable relative to each other.

21. The exposure apparatus according to claim 1 , wherein
the support device generates an upward force to the object holding device.

22. The exposure apparatus according to claim 1 wherein
the object is a substrate used to manufacture a flat panel display.

23. The exposure apparatus according to claim 1 , wherein
the object is a substrate having a size of 500 mm or more.

24. A flat-panel display manufacturing method, comprising:
exposing a substrate using the exposure apparatus according to claim 1 ; and
developing the substrate that has been exposed.

25. A device manufacturing method, comprising:
exposing an object using the exposure apparatus according to claim 1 ; and
developing the object that has been exposed.

26. An exposure method in which an object is held using an object holding device, and the object that is held is exposed with an energy beam for exposure while the object is moved in a first direction, the method comprising:
supporting the object holding device by using a support device;
supporting, in a non-contact manner, the support device that supports the object holding device, by using a support member;
relatively moving the support device with respect to the support member in the first direction by using a first drive section, in a state in which the support device supports the object holding device; and
moving the support member and the support device on the support member in a second direction that intersects the first direction, by using a second drive section.

27. The exposure method according to claim 26 , wherein
in the moving, the support member is moved in the second direction by using the second drive section, via a connecting member that connects the second drive section and the support member.

28. The exposure method according to claim 26 , wherein
in the relatively moving, the support device is relatively moved with respect to the support member

Assignees

• Nikon Corp

Inventors

• Aoki Yasuo

Classifications

• H02K16/00

  Machines with more than one rotor or stator {(machines for transmitting mechanical power from a driving shaft to a driven shaft and comprising structurally interrelated motor and generator parts H02K51/00; permanent magnet machines with multiple rotors or stators relatively rotated for vectorially combining the excitation fields or the armature voltages H02K21/029)} · CPC title

• G03F7/709

  Vibration, e.g. vibration detection, compensation, suppression or isolation · CPC title

• G03F7/70816 Primary

  Bearings · CPC title

• B65G2249/04

  Arrangements of vacuum systems or suction cups · CPC title

• G03F7/70716 Primary

  Stages · CPC title