Electric field sensor, system, and method for programming electronic devices on a wafer
US-2016306007-A1 · Oct 20, 2016 · US
US9921248B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9921248-B2 |
| Application number | US-201314370031-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jan 25, 2013 |
| Priority date | Jan 25, 2012 |
| Publication date | Mar 20, 2018 |
| Grant date | Mar 20, 2018 |
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A method of measuring fluctuations in electric fields is disclosed, the method comprising the step of: placing a Liquid Crystal Device in communication with the electric field, the device having disparate orthogonal polarization sensitivity to an external electric field; utilizing an optical probe beam having a known polarization state to interrogate the liquid crystal of the liquid crystal device to produce a response beam; and analyzing the polarization state of the response beam to provide an indicator of the corresponding fluctuations in the electric field.
Opening claim text (preview).
We claim: 1. A method of measuring fluctuations in external electric fields, the method comprising the steps of: placing a passive liquid crystal device, which utilizes a liquid crystal material and in which said liquid crystal material exhibits a linear electro-optic response to variations of an external electric field, in communication with the external electric field, said liquid crystal device having its liquid crystal birefringence and the direction of optical axes sensitive to the external electric field; receiving an unpolarised optical probe beam, converting the unpolarised optical probe beam to a linearly polarised optical probe beam, utilising the linearly polarised optical probe beam to interrogate the liquid crystal of the liquid crystal device to produce a response beam; and analyzing the polarization state of the response beam to provide an indicator of fluctuations in the external electric field; wherein the linear electro-optic response of the liquid crystal material is achieved by selection of a predetermined angle between the linearly polarised optical probe beam and an axis of the liquid crystal material, and the linear electro-optic response occurs in a region around 0 external electric field having a magnitude of the external electric field between 0 and 400 kV/m. 2. A method as claimed in claim 1 wherein said liquid crystal device utilizes a Deformed Helix Ferroelectric Liquid Crystal (DHF-LC) liquid crystal material. 3. A method as claimed in claim 1 wherein said liquid crystal device is interconnected to an antenna device via electrodes for magnification of the external electric field experienced by the liquid crystal device. 4. A method as claimed in claim 1 wherein said liquid crystal device is interconnected to a piezo electric sensor device via electrodes for sensing vibrations and/or pressure in an environment, wherein an output signal from said piezo electric sensor is amplified by an amplifier. 5. A method as claimed in claim 1 wherein said unpolarised optical probe beam is fed via a single mode fiber to said liquid crystal device. 6. A passive sensor configured to convert an electrical signal into an optical signal comprising: an optical input probe, for inputting an unpolarised optical probe beam; a polariser for converting the unpolarised optical probe beam to a linearly polarised optical probe beam; a liquid crystal device in communication with an external electric field having its liquid crystal birefringence and the direction of optical axes sensitive to the external electric field, wherein the liquid crystal device utilizes a liquid crystal material and in which said liquid crystal material exhibits a linear electro-optic response to variations of the external electric field, said liquid crystal device being connected to said polariser for transmitting the linearly polarised optical probe beam through the liquid crystal material to produce an optical output beam having an altered polarization state; an optical output probe for sensing said output beam; and an analyzer for sensing the altered polarization state of the output beam and to thereby determine a correlation with a state of the external electric field; wherein the linear electro-optic response of the liquid crystal material is achieved by selection of a predetermined angle between the linearly polarised optical probe beam and an axis of the liquid crystal material, and the linear electro-optic response occurs in a region around 0 external electric field having a magnitude of the external electric field between 0 and 400 kV/m. 7. A passive sensor configured to convert an electrical signal into an optical signal as claimed in claim 6 wherein said liquid crystal device is operated in a reflection mode with the optical input probe also forming the optical output probe. 8. A passive sensor configured to convert an electrical signal into an optical signal as claimed in claim 6 further comprising: an antenna device connected to said liquid crystal device for magnification of the external electric field experienced by said liquid crystal material. 9. A passive sensor configured to convert an electrical signal into an optical signal as claimed in claim 6 further comprising: a piezo electric sensor interconnected to said liquid crystal device for sensing vibrations and/or pressure in an external environment of the sensor. 10. A passive sensor configured to convert an electrical signal into an optical signal as claimed in claim 6 including a pair of electrodes for converting a voltage difference into an electric field. 11. A passive sensor configured to convert an electrical signal into an optical signal as claimed in claim 6 wherein the optical input probe is attached to the liquid crystal device through a hole formed on one surface of the liquid crystal device, and wherein the optical input probe includes a single mode lead in fiber. 12. A passive sensor configured to convert an electrical signal into an optical signal as claimed in claim 6 wherein the liquid crystal device comprises a Deformed Helix Ferroelectric Liquid Crystal (DHF-LC). 13. A passive sensor configured to convert an electrical signal into an optical signal as claimed in claim 11 wherein the polariser includes a polarising layer, and the optical input probe is attached to the liquid crystal device through the polarising layer and the polarising layer is directly deposited on the one surface of the liquid crystal device in the form of a nano grid or a glass polariser. 14. A passive sensor configured to convert an electrical signal into an optical signal as claimed in claim 12 wherein the DHF-LC is utilised in a linear response range with respect to an applied electric field. 15. A passive sensor configured to convert an electrical signal into an optical signal as claimed in claim 14 wherein the DHF-LC includes a helix axis, and said linear response range is achieved by selection of a predetermined angle between the linearly polarised optical probe beam and the helix axis of the DHF-LC. 16. A passive sensor converting an electrical signal into an optical signal as claimed in claim 14 wherein said optical input probe includes: a single mode lead in fiber. 17. A passive sensor configured to convert an electrical signal into an optical signal as claimed in claim 16 wherein the polariser is interconnected to the single mode lead in fiber. 18. A passive optical sensing system including: a broadband optical input source; a series of sensors, configured to convert electrical signals into optical signals, being interconnected to the broadband input source, each sensor configured to: convert an electrical signal into an optical signal; convert, using a polariser, an unpolarised optical probe beam from the optical input source to a linearly polarised optical probe beam; and transmit the linearly polarised optical probe beam through a liquid crystal material having its birefringence and direction of its optical axes sensitive to an external electric field, thereby producing a sensor output beam having an altered polarization state; wherein said liquid crystal material exhibits a linear electro-optic response to variations of the external electric field, the linear electro-optic response of the liquid crystal material is achieved by selection of a predetermined angle between the linearly polarised optical probe beam and an axis of the liquid crystal material, and the linear electro-optic response occurs in a region around 0 external electric field having a magnitude of the external electric
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