Spectrometer, and spectrometer production method

Patent metadata

Field	Value
Publication number	US-9921103-B2
Application number	US-201515116918-A
Country	US
Kind code	B2
Filing date	Feb 3, 2015
Priority date	Feb 5, 2014
Publication date	Mar 20, 2018
Grant date	Mar 20, 2018

Abstract

A spectrometer includes a light detection element provided with a light passing part and a light detection part, a support fixed to the light detection element such that a space is formed between the light passing part and the light detection part, a first reflection part provided in the support and configured to reflect light passing through the light passing part in the space, a second reflection part provided in the light detection element and configured to reflect the light reflected by the first reflection part in the space, and a dispersive part provided in the support and configured to disperse and reflect the light reflected by the second reflection part to the light detection part in the space.

First claim

The invention claimed is:

1. A spectrometer comprising:
a light detection element provided with a light passing part and a light detection part;
a support fixed to the light detection element such that a space is formed between the light passing part and the light detection part;
a first reflection part provided in the support and configured to reflect light passing through the light passing part in the space;
a second reflection part provided in the light detection element and configured to reflect the light reflected by the first reflection part in the space; and
a dispersive part provided in the support and configured to disperse and reflect the light reflected by the second reflection part to the light detection part in the space.

2. The spectrometer according to claim 1 ,
wherein the light passing part, the first reflection part, the second reflection part, the dispersive part, and the light detection part are arranged along a reference line when viewed in an optical axis direction of the light passing through the light passing part,
the dispersive part has a plurality of grating grooves arranged along the reference line, and
the light detection part has a plurality of light detection channels arranged along the reference line.

3. The spectrometer according to claim 1 , wherein the first reflection part is a planar mirror.

4. The spectrometer according to claim 1 , wherein the first reflection part is a concave mirror.

5. The spectrometer according to claim 1 , wherein the light detection element is provided with a zero-order light capture part configured to capture zero-order light in the light dispersed and reflected by the dispersive part.

6. The spectrometer according to claim 1 ,
wherein the support is provided with a wiring electrically connected to the light detection part, and
an end part of the wiring on a side of the light detection part is connected to a terminal provided in the light detection element in a fixed part of the light detection element and the support.

7. The spectrometer according to claim 1 , wherein a material of the support is ceramic.

8. The spectrometer according to claim 1 , wherein the space is airtightly sealed by a package including the light detection element and the support as components.

9. The spectrometer according to claim 1 , wherein the space is airtightly sealed by a package accommodating the light detection element and the support.

10. A method for manufacturing a spectrometer, comprising:
a first step of preparing a support provided with a first reflection part and a dispersive part;
a second step of preparing a light detection element provided with a light passing part, a second reflection part, and a light detection part; and
a third step of fixing the support and the light detection element such that a space is formed after the first step and the second step, thereby forming, in the space, an optical path on which light passing through the light passing part is reflected by the first reflection part, the light reflected by the first reflection part is reflected by the second reflection part, the light reflected by the second reflection part is dispersed and reflected by the dispersive part, and the light dispersed and reflected by the dispersive part enters the light detection part.

Assignees

• Hamamatsu Photonics Kk

Inventors

• Yokino Takafumi
• Shibayama Katsumi

Classifications

• G01J3/0286

  Constructional arrangements for compensating for fluctuations caused by temperature, humidity or pressure, or using cooling or temperature stabilization of parts of the device; Controlling the atmosphere inside a spectrometer, e.g. vacuum · CPC title

• G01J3/0262

  Constructional arrangements for removing stray light · CPC title

• G01J3/04

  Slit arrangements {slit adjustment} · CPC title

• G01J3/0256

  Compact construction · CPC title

• G01J3/18

  using diffraction elements, e.g. grating (gratings per se G02B) · CPC title