Arrangement for mounting an optical element, in particular in an EUV projection exposure apparatus
US-9410662-B2 · Aug 9, 2016 · US
US9920874B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9920874-B2 |
| Application number | US-201514813410-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jul 30, 2015 |
| Priority date | Jul 30, 2015 |
| Publication date | Mar 20, 2018 |
| Grant date | Mar 20, 2018 |
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A linkage rod including a limited-displacement flexible mechanism has structural robustness and allows easy reduction in weight and size, simple production and easy operation. The linkage rod including at least one limited-displacement flexible mechanism, wherein the limited-displacement flexible mechanism comprises at least one limited-displacement flexible joint which comprises: a flexible member; and at least one bend limitation section which is arranged in parallel with the flexible member so that the bend limitation section limits a bend of the flexible member.
Opening claim text (preview).
The invention claimed is: 1. A linkage rod including a limited-displacement flexible mechanism, wherein the limited-displacement flexible mechanism comprises at least one limited-displacement flexible joint which comprises: a flexible member shaped like a plate, providing flexibility in a pair of opposite directions orthogonal to a longitudinal direction of the linkage rod; and at least one bend limitation section which is arranged in parallel with the flexible member so that the bend limitation section limits a bend of the flexible member, wherein the bend limitation section comprises: a first part including a protrusion at an end of the first part and a pair of first stoppers, wherein the protrusion is cylindrically shaped, wherein the pair of first stoppers protrude outside from the first part respectively in the pair of opposite directions orthogonal to the longitudinal direction of the linkage rod; and a second part including a pair of second stoppers each corresponding to the pair of first stoppers to form a recess between the second stoppers, wherein the recess is cylindrically shaped to be engaged with the protrusion of the first part such that the first part is relatively rotatable with respect to the second part, wherein rotation of the first part and the second part is limited by one of the first stoppers making contact with a corresponding one of the second stoppers depending on a bending direction of the flexible member. 2. The linkage rod according to claim 1 , wherein at least one pair of limited-displacement flexible joints is provided such that each pair of limited-displacement flexible joints bend in both directions orthogonal to each other, respectively. 3. The linkage rod according to claim 1 , wherein the linkage rod is formed integrally by using any technology including injection molding, 3-dimentional printer or MEMS (Micro Electro Mechanical Systems). 4. The linkage rod according to claim 1 , wherein the flexible member is placed between two bend limitation sections so that the two bend limitation sections limits a bend of the flexible member. 5. A bipod comprising two linkage rods each including a limited-displacement flexible mechanism, wherein the limited-displacement flexible mechanism comprises at least one limited-displacement flexible joint which comprises: a flexible member shaped like a plate, providing flexibility in a pair of opposite directions orthogonal to a longitudinal direction of the linkage rod; and at least one bend limitation section which is arranged in parallel with the flexible member so that the bend limitation section limits a bend of the flexible member, wherein the bend limitation section comprises: a first part including a protrusion at an end of the first part and a pair of first stoppers, wherein the protrusion is cylindrically shaped, wherein the pair of first stoppers protrude outside from the first part respectively in the pair of opposite directions orthogonal to the longitudinal direction of the linkage rod; and a second part including a pair of second stoppers each corresponding to the pair of first stoppers to form a recess between the second stoppers, wherein the recess is cylindrically shaped to be engaged with the protrusion of the first part such that the first part is relatively rotatable with respect to the second part, wherein rotation of the first part and the second part is limited by one of the first stoppers making contact with a corresponding one of the second stoppers depending on a bending direction of the flexible member. 6. The bipod according to claim 5 , wherein the bipod is formed integrally by using any technology including injection molding, 3-dimentional printer or MEMS (Micro Electro Mechanical Systems). 7. The bipod according to claim 5 , wherein the flexible member is placed between two bend limitation sections so that the two bend limitation sections limits a bend of the flexible member. 8. The bipod according to claim 5 , wherein the two linkage rods are fixed at one end of each linkage rod to form a reverse-V shape.
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