Material for forming underlayer film lithography, underlayer film for lithography and pattern forming method
US-2015090691-A1 · Apr 2, 2015 · US
US9920024B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9920024-B2 |
| Application number | US-201415100009-A |
| Country | US |
| Kind code | B2 |
| Filing date | Nov 28, 2014 |
| Priority date | Nov 29, 2013 |
| Publication date | Mar 20, 2018 |
| Grant date | Mar 20, 2018 |
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The method according to the present invention is a method for purifying a compound represented by a specific formula (1) or a resin having a structure represented by a specific formula (2), the method including a step of bringing a solution (A) including an organic solvent optionally immiscible with water, and the compound or the resin into contact with an acidic aqueous solution.
Opening claim text (preview).
The invention claimed is: 1. A method for purifying a compound represented by the following formula (1) or a resin having a structure represented by the following formula (2), the method comprising: a step of bringing a solution (A) comprising an organic solvent optionally immiscible with water, and the compound or the resin into contact with an acidic aqueous solution; wherein, each X independently represents an oxygen atom or a sulfur atom, R 1 represents a single bond or a 2n-valent hydrocarbon group having 1 to 30 carbon atoms, the hydrocarbon group optionally has a cyclic hydrocarbon group, a double bond, a hetero atom, or an aromatic group having 6 to 30 carbon atoms, and each R 2 independently represents a linear, branched or cyclic alkyl group having 1 to 10 carbon atoms, an aryl group having 6 to 10 carbon atoms, an alkenyl group having 2 to 10 carbon atoms, or a hydroxyl group, provided that at least one R 2 represents a hydroxyl group, each m is independently an integer of 1 to 6, each p is independently 0 or 1, and n is an integer of 1 to 4; wherein, each X independently represents an oxygen atom or a sulfur atom, R 1 represents a single bond or a 2n-valent hydrocarbon group having 1 to 30 carbon atoms, the hydrocarbon group optionally has a cyclic hydrocarbon group, a double bond, a hetero atom, or an aromatic group having 6 to 30 carbon atoms, each R 2 independently represents a linear, branched or cyclic alkyl group having 1 to 10 carbon atoms, an aryl group having 6 to 10 carbon atoms, an alkenyl group having 2 to 10 carbon atoms, or a hydroxyl group, provided that at least one R 2 represents a hydroxyl group, each R 3 independently represents a single bond, or a linear or branched alkylene group having 1 to 20 carbon atoms, each m 2 is independently an integer of 1 to 5, each p is independently 0 or 1, and n is an integer of 1 to 4. 2. The method according to claim 1 , wherein the acidic aqueous solution is one or more aqueous solution of mineral acid selected from the group consisting of hydrochloric acid, sulfuric acid, nitric acid and phosphoric acid, or one or more aqueous solution of organic acid selected from the group consisting of acetic acid, propionic acid, oxalic acid, malonic acid, succinic acid, fumaric acid, maleic acid, tartaric acid, citric acid, methanesulfonic acid, phenolsulfonic acid, p-toluenesulfonic acid and trifluoroacetic acid. 3. The method according to claim 1 , wherein the organic solvent optionally immiscible with water is toluene, 2-heptanone, cyclohexanone, cyclopentanone, methyl isobutyl ketone, propylene glycol monomethyl ether acetate or ethyl acetate. 4. The method according to claim 1 , wherein the organic solvent optionally immiscible with water is methyl isobutyl ketone or ethyl acetate. 5. The method according to claim 1 , wherein the solution (A) comprises the organic solvent optionally miscible with water in an amount of 0.1 to 100 times by mass based on an amount of the compound represented by the formula (1) or the resin having the structure represented by the formula (2). 6. The method according to claim 5 , wherein the organic solvent optionally miscible with water is N-methylpyrrolidone or propylene glycol monomethyl ether. 7. The method according to claim 1 , further comprising a step of performing an extraction treatment with water after an extraction treatment by the step of bringing the solution (A) into contact with the acidic aqueous solution is performed. 8. The method according to claim 1 , wherein the compound represented by the formula (1) is a compound represented by the following formula (1-1): wherein, R 1 , R 2 , m, p and n are the same as defined in the formula (1). 9. The method according to claim 8 , wherein the compound represented by the formula (1-1) is a compound represented by the following formula (1-2): wherein, R 1 , p and n are the same as defined in the formula (1), R 4 is the same as R 2 defined in the formula (1), each m 3 is independently an integer of 1 to 6, each m 4 is independently an integer of 0 to 5, and m 3 +m 4 is an integer of 1 to 6. 10. The method according to claim 9 , wherein the compound represented by the formula (1-2) is compound represented by the following formula (1-3) wherein, R 1 , p and n are the same as defined in the formula (1), and R 4 and m 4 are the same as defined in the formula (1-2). 11. The method according to claim 1 , wherein the compound represented by the formula (1) is a compound represented by the following formula (1-4): wherein, X and R 1 are the same as defined in the formula (1), R 4 is the same as R 2 defined in the formula (1), and each m 4 is independently an integer of 0 to 5. 12. The method according to claim 11 , wherein the compound represented by the formula (1-4) is a compound represented by the following formula (1-5): wherein, R 1 is the same as defined in the formula (1), R 4 is the same as R 2 defined in the formula (1), and each m 4 is independently an integer of 0 to 5. 13. The method according to claim 12 , wherein the compound represented by the formula (1-5) is a compound represented by the following formula (BisN-1):
Macromolecular compounds containing atoms other than carbon in the main chain of the macromolecule · CPC title
Naphthopyrans; Hydrogenated naphthopyrans · CPC title
Post-polymerisation treatment · CPC title
without chemical reactions · CPC title
of solvents, plasticisers or unreacted monomers · CPC title
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