Methods and apparatus for pedestal ring resonators

Patent metadata

Field	Value
Publication number	US-9915785-B2
Application number	US-201715591023-A
Country	US
Kind code	B2
Filing date	May 9, 2017
Priority date	Nov 26, 2014
Publication date	Mar 13, 2018
Grant date	Mar 13, 2018

Abstract

A device includes a substrate, a pedestal extending from the substrate, and a ring resonator disposed on the pedestal above the substrate. The ring resonator has a resonance wavelength greater than 1.5 μm and includes at least one of silicon and chalcogenide glass. The device can be used as a ring resonator sensor or a light source. The ring resonator is substantially transparent to mid-infrared radiation to reduce optical losses. The pedestal has a narrower width compared to the ring resonator to generate improved interaction between evanescent fields of light in the ring resonator and analytes nearby the ring resonator, thereby increasing sensing sensitivity. In addition, fabrication of the device is compatible with complementary metal-oxide-semiconductor (CMOS) processes and hence is amenable to large scale manufacturing.

First claim

The invention claimed is:

1. A device comprising:
a substrate;
a pedestal extending from the substrate; and
a ring resonator disposed on the pedestal above the substrate and having a resonance wavelength greater than 1.5 μm,
wherein the ring resonator comprises at least one of silicon and chalcogenide glass.

2. The device of claim 1 , wherein a first width of the pedestal is smaller than a second width of the waveguide.

3. The device of claim 1 , wherein the pedestal has a minimum width of about 0.5 μm to about 2.5 μm and a height of about 1.0 μm to about 20 μm.

4. The device of claim 1 , wherein the ring resonator has a cross section with a width of about 1 μm to about 20 μm and a height of about 0.4 μm to about 20 μm.

5. The device of claim 1 , wherein the ring resonator has an outer diameter of about 50 μm to about 150 μm.

6. The device of claim 1 , wherein the ring resonator comprises a single mode waveguide at the resonance wavelength.

7. The device of claim 1 , wherein the ring resonator comprises silicon and the resonance wavelength is within a range of about 1.5 μm to about 6 μm.

8. The device of claim 1 , wherein the ring resonator comprises chalcogenide glass and the resonance wavelength is greater than about 6 μm.

9. The device of claim 1 , wherein the ring resonator defines an outer surface to receive at least one molecule so as to cause absorption of light propagating in the ring resonator and detect the at least one molecule.

10. The device of claim 1 , wherein the ring resonator defines an outer surface having a surface roughness smaller than a quarter of the resonance wavelength.

11. The device of claim 1 , further comprising:
a modulator, operably coupled to the ring resonator, to modulate the resonance wavelength of the ring resonator.

12. The device of claim 11 , wherein the modulator is configured to modulate the resonance wavelength by applying at least one of a mechanical force, an electric field, a magnetic field, an acoustic field, or a thermal field to the ring resonator.

13. The device of claim 1 , further comprising:
an input coupler, evanescently coupled to the ring resonator, to couple light at the resonance wavelength into the ring resonator; and
an output coupler, evanescently coupled to the ring resonator, to couple at least a portion of the light at the resonance wavelength out of the ring resonator.

14. The device of claim 13 , further comprising:
a mid-infrared light source, optically coupled to the input coupler, to launch the light at the resonance wavelength into the ring resonator via the input coupler; and
a detector, optically coupled to the output coupler, to detect the at least a portion of the light at the resonance wavelength transmitted through the ring resonator and the output coupler.

15. The device of claim 1 , wherein the ring resonator is a first ring resonator and the resonance wavelength is a first resonance wavelength and further comprising a second ring resonator having a second resonance wavelength different from the first resonance wavelength.

16. The device of claim 15 , wherein the second ring resonator is disposed substantially within a cavity defined by the first ring resonator.

17. The device of claim 15 , wherein the first ring resonator is substantially concentric with the second ring resonator.

18. A method of detecting a molecule using a device comprising a substrate, a pedestal extending from the substrate, and a ring resonator disposed on the pedestal above the substrate, the ring resonator comprising at least one of silicon and chalcogenide glass and having a resonance wavelength greater than 1.5 μm, the method comprising:
guiding a mid-infrared beam into the ring resonator.

19. The method of claim 18 , wherein the ring resonator comprises silicon and the mid-infrared beam has a wavelength of about 1.5 μm to about 6 μm.

20. The method of claim 18 , wherein the ring resonator comprises chalcogenide glass and the mid-infrared beam has a wavelength greater than 6 μm.

21. The method of claim 18 , further comprising:
modulating the resonance wavelength of the ring resonator by applying at least one of a mechanical force, an electric field, a magnetic field, an acoustic field, or a thermal field on the ring resonator.

22. The method of claim 18 , further comprising:
coupling the mid-infrared beam into the ring resonator via an input coupler evanescently coupled to the ring resonator; and
coupling the mid-infrared beam out of the ring resonator via an output coupler evanescently coupled to the ring resonator.

23. The method of claim 18 , further comprising:
exposing an outer surface of the ring resonator to at least one molecule; and
detecting the mid-infrared beam propagating in the ring resonator so as to identify the at least one molecule.

24. The method of claim 18 , further comprising:
tuning a wavelength of the mid-infrared beam to match the resonance wavelength.

25. The method of claim 18 , wherein the ring resonator is a first ring resonator and the resonance wavelength is a first resonance wavelength, wherein guiding the mid-infrared beam further comprises guiding the mid-infrared beam in a second ring resonator having a second resonance wavelength different from the first resonance wavelength.

26. A method of making a chalcogenide glass ring resonator, the method comprising:
A) forming a ring ridge comprising chalcogenide glass on a chalcogenide glass substrate;
B) disposing a conformal protective layer on the ring ridge so as to form a coated ring ridge adjacent to an exposed portion of the chalcogenide glass substrate;
C) etching the exposed portion of the chalcogenide glass substrate so as to create a chalcogenide glass pedestal extending from the chalcogenide glass substrate and supporting the coated ring ridge; and
D) removing the conformal protective layer from the coated ring ridge so as to form the chalcogenide glass ring resonator.

27. The method of claim 26 , wherein A) comprises:
A1) depositing a sacrificial layer on the chalcogenide glass substrate;
A2) forming a patterned photoresist layer on the sacrificial layer; and
A3) etching the chalcogenide glass substrate adjacent to the patterned photoresist layer so as to form the ring ridge beneath the patterned photo resist layer using photolithography, and
wherein D) further comprises removing the sacrificial layer.

28. The method of claim 27 , wherein A1) comprising depositing a silicon oxide layer on the chalcogenide glass substrate.

29. The method of claim 26 , wherein B) comprises depositing at least one of a polymer layer or a silicon nitride layer on the ring ridge.

30. The method of claim 26 , wherein C) comprises etching the exposed portion of the chalcogenide glass substrate using ethylenediamine.

Assignees

• Lin Pao Tai
• Michel Jurgen
• Agarwal Anuradha Murthy
• Massachusetts Inst Technology

Inventors

• Lin Pao Tai
• Michel Jurgen
• Agarwal Anuradha Murthy

Classifications

• G01N21/65

  Raman scattering · CPC title

• G02B6/122

  Basic optical elements, e.g. light-guiding paths · CPC title

• G02B2006/12038

  Glass (SiO2 based materials) · CPC title

• G01N21/648

  using evanescent coupling or surface plasmon coupling for the excitation of fluorescence · CPC title

• G01N21/7746

  the waveguide coupled to a cavity resonator · CPC title