Energy beam position verification

Patent metadata

Field	Value
Publication number	US-9915583-B2
Application number	US-201715495331-A
Country	US
Kind code	B2
Filing date	Apr 24, 2017
Priority date	Aug 20, 2014
Publication date	Mar 13, 2018
Grant date	Mar 13, 2018

Abstract

A method for verifying a position of an energy beam spot, said method comprising the steps of: providing a calibrated energy beam having a first focus in a at least two positions at a work table, detecting said at least two positions of said energy beam spot on said work table created with said energy beam having said first focus, providing said calibrated energy beam having a second focus in said at least two positions at a work table, detecting said at least two positions of said energy beam spot on said work table created with said energy beam having said second focus, comparing said at least two positions created with said first and second focus, wherein said position of the energy beam is verified if said positions created with said first focus are deviating less than a predetermined distance from said positions created with said second focus.

First claim

That which is claimed:

1. A computer program product comprising at least one non-transitory computer readable medium having stored thereon computer-readable program code portions, the computer-readable program code portions comprising one or more executable portions configured for:
providing an energy beam spot having a first focus directed toward at least two locations on a work table,
detecting at least two positions of said energy beam spot on said work table created with an energy beam having said first focus,
providing said energy beam spot having a second focus directed toward said at least two positions on said work table,
detecting at least two corresponding positions of said energy beam spot on said work table created with said energy beam having said second focus,
comparing said at least two positions created with said first focus and said at least two corresponding positions created with said second focus, and
verifying said position of the energy beam spot by verifying that said at least two positions created with said first focus deviate less than a predetermined distance from said corresponding at least two positions created with said second focus.

2. The computer program product of claim 1 , wherein said at least two positions created with said first focus are a regularly 2-dimensional pattern.

3. The computer program product of claim 1 , wherein said at least two positions created with said first focus and said at least two corresponding positions created with said second focus are provided at identical positions as in a calibration process.

4. The computer program product of claim 1 , wherein said at least two positions created with said first focus and said at least two corresponding positions created with said second focus are provided at different positions as in a calibration process.

5. The computer program product of claim 1 , wherein said energy beam spot is an electron beam spot.

6. The computer program product of claim 1 , wherein said work table is provided with a reference pattern.

7. The computer program product of claim 1 , wherein said at least two locations are provided on said work table having a surface temperature above 500° C.

8. The computer program product of claim 1 , wherein said predetermined distance is less than 20 μm.

9. The computer program product of claim 1 , wherein the one or more executable portions are further configured for sending a warning signal when any one of said at least two positions provided with said first focus deviate more than said predetermined distance from said at least two corresponding positions provided with said second focus.

10. The computer program product of claim 1 , wherein said energy beam spot with said first focus and said energy beam spot with said second focus are provided on the same work table.

11. The computer program product of claim 1 , wherein the one or more executable portions are further configured for altering a setting of a deflection coil to compensate a deviation between the at least two positions created with said first focus and the at least two corresponding positions created with said second focus.

12. The computer program product of claim 1 , wherein the one or more executable portions are further configured for receiving and storing, within one or more memory storage areas, a model of at least one three-dimensional article.

13. The computer program product of claim 1 , wherein the one or more executable portions are further configured for verifying a deflection speed of the energy beam spot by:
generating a predetermined pattern on the work table with said energy beam spot while deflecting said energy beam spot with a first deflection speed;
detecting first positions of said energy beam spot on said work table created with said first deflection speed;
generating said predetermined pattern on the work table with said energy beam spot while deflecting said energy beam spot with a second deflection speed;
detecting second positions of said energy beam spot on said work table created with said second deflection speed; and
comparing said first and second positions and verifying that each one of said first positions deviate less than a predetermined distance from corresponding ones of said second positions.

14. The computer program product of claim 13 , wherein the one or more executable portions are further configured for verifying a size of the at least one energy beam spot by:
generating a first energy beam spot from a first energy beam source, the first energy beam spot having a predetermined size and power at a first position on a work piece;
varying at least one of a focus lens setting or an astigmatism lens setting for said first energy beam spot until a maximum intensity of the first energy beam spot is detected;
comparing at least one setting of said focus lens and/or astigmatism lens associated with said detected maximum intensity of the first energy beam spot with corresponding stored settings of said focus lens and/or astigmatism lens associated with said predetermined size and power of the first energy beam spot;
repeating the generating, varying, and comparing steps for different predetermined beam powers, and
repeating all of the above-listed steps for different positions on said work piece and verifying said first energy beam spot size by verifying that each of said focus lens and/or astigmatism lens settings associated with the detected maximum intensity deviate less than a predetermined value from corresponding stored settings of said focus lens and/or astigmatism lens.

15. The computer program product of claim 1 , wherein the one or more executable portions are further configured for verifying a size of the at least one energy beam spot by:
generating a first energy beam spot from a first energy beam source, the first energy beam spot having a predetermined size and power at a first position on a work piece;
varying at least one of a focus lens setting or an astigmatism lens setting for said first energy beam spot until a maximum intensity of the first energy beam spot is detected;
comparing at least one setting of said focus lens and/or astigmatism lens associated with said detected maximum intensity of the first energy beam spot with corresponding stored settings of said focus lens and/or astigmatism lens associated with said predetermined size and power of the first energy beam spot;
repeating the generating, varying, and comparing steps for different predetermined beam powers, and
repeating all of the above-listed steps for different positions on said work piece and verifying said first energy beam spot size by verifying that each of said focus lens and/or astigmatism lens settings associated with the detected maximum intensity deviate less than a predetermined value from corresponding stored settings of said focus lens and/or astigmatism lens.

16. The computer program product of claim 1 , wherein the one or more executable portions are configured for detecting the at least two positions of said energy beam spot on said work table via utilization of at least one of an IR-camera, a CCD-camera, a digital camera, a CMOS camera or a NIR-camera.

17. A non-transitory computer readable medium having stored thereon a program element configured and arranged when executed on a computer to implement a method for verifying a position of an energy beam spot, said method comprising the steps of:
providing an energy beam spot having a first focus directed toward at least two locations on a work table,
detecting at least two positions of said energy beam spo

Assignees

• Arcam Ab

Inventors

• Snis Anders

Classifications

• G01M11/02 Primary

  Testing optical properties · CPC title

• B23K15/02 Primary

  Control circuits therefor · CPC title

• B22F12/90

  Means for process control, e.g. cameras or sensors · CPC title

• B22F12/52

  Hoppers · CPC title

• B22F10/31

  Calibration of process steps or apparatus settings, e.g. before or during manufacturing · CPC title