Perpendicular gradiometric angle sensors, systems and methods

Patent metadata

Field	Value
Publication number	US-9915552-B2
Application number	US-201314083647-A
Country	US
Kind code	B2
Filing date	Nov 19, 2013
Priority date	Nov 19, 2013
Publication date	Mar 13, 2018
Grant date	Mar 13, 2018

Abstract

Embodiments relate to magnetic field sensors, such as gradiometric magnetic field angle sensors with generally on-axis arrangements of sensor elements relative to a rotation axis of a magnet. In one embodiment, an angle sensor is arranged on-axis with respect to the rotation axis of a magnet that generates a magnetic field that can be detected by the angle sensor and analyzed to determine an angular position of the magnet. The sensor can comprise a plurality of sensor elements, such as two sensor elements, arranged on a substrate or die in a sensor package. As it rotates, the magnet generates a magnetic field, such as an inhomogenous magnetic field having a component perpendicular to the rotation axis and acting on the angle sensor. The plurality of sensor elements can detect this and other components, for example as a gradiometric sensor in which each element senses at least one component at its respective location, and the signals from the elements are compared to estimate or determine an angular position or degree of movement of the magnet.

First claim

What is claimed is:

1. A magnetic field angle sensor configured to determine a rotational position of a magnetic field source with respect to a rotation axis, comprising:
a die comprising a first surface and arranged in-line with the rotation axis such that a projection of the rotation axis extends through the die perpendicularly to the first surface;
at least three magnetic field sensor elements arranged on the first surface of the die around the projection of the rotation axis, the at least three magnetic field sensor elements configured to sense at least two gradients of a magnetic field induced by the magnetic field source, the at least three magnetic field sensor elements being sensitive to magnetic field components perpendicular to the rotation axis and parallel with the first surface; and
circuitry configured to determine the rotational position of the magnetic field source by determining at least one linear combination of the at least two gradients and deriving the rotational position from the at least one linear combination.

2. The magnetic field angle sensor of claim 1 , wherein the at least three magnetic field sensor elements are arranged on the first surface in a circle concentric to the projection of the rotation axis, wherein the circle has a diameter of less than 4 millimeters.

3. The magnetic field angle sensor of claim 2 , wherein the at least three magnetic field sensor elements comprise N sensor elements spaced apart in the circle by regular azimuthal spacings of 360 degrees/N.

4. The magnetic field angle sensor of claim 1 , wherein the at least two gradients comprise a gradient of a first magnetic field component along a first direction, a gradient of a second magnetic field component along a second direction, the first and second magnetic field components and the first and second directions being different, and at least one of a gradient of the first magnetic field component along the second direction and the second magnetic field component along the first direction.

5. The magnetic field angle sensor of claim 1 , wherein the at least one linear combination of the at least two gradients is equal to a sum over terms that are equal to coefficients multiplied by measured gradients, wherein the coefficients are independent of a rotational position of the magnetic field source, and wherein the coefficients have the same magnitude.

6. The magnetic field angle sensor of claim 1 , wherein the at least one linear combination of the at least two gradients comprises coefficients multiplied with the at least two gradients, wherein the coefficients are related to azimuthal positions of the at least three magnetic field sensor elements where the at least two gradients are sensed.

7. The magnet field angle sensor of claim 1 , wherein the at least one linear combination of the at least two gradients has complex coefficients multiplied with measured gradients, wherein the circuitry is configured to derive the rotational position from an argument of the complex linear combination.

8. The magnetic field angle sensor of claim 7 , wherein a k-fold rotational angle is equal to the argument of the complex linear combination, wherein k is an integer number.

9. The magnetic field angle sensor of claim 8 , wherein a magnitude of k is 1, 2 or 3.

10. The magnetic field angle sensor of claim 1 , wherein the at least three magnetic field sensor elements comprise Hall plates, vertical Hall elements, MAGFETs, anisotropic magnetoresistors, or magnetoresistors comprising at least one pinned layer.

11. The magnetic field angle sensor of claim 1 , wherein the at least three magnetic field sensor elements comprise two groups of magnetic field sensor elements, wherein a first of the two groups comprises magnetic field sensor elements sensitive to a first direction of arbitrary polarity and a second of the two groups comprises magnetic field sensor elements sensitive to a second direction of an arbitrary polarity, and wherein the first and second directions are perpendicular to each other and to the rotation axis.

12. The magnetic field angle sensor of claim 1 , wherein each of the at least three magnetic field sensor elements comprises two half-bridge circuits, wherein each half-bridge circuit is at a different location and comprises two magnetoresistors.

13. The magnetic field angle sensor of claim 12 , wherein the at least three magnetic field sensor elements comprise N 2:3 full-bridge circuits arranged on the first substrate equidistantly spaced from the rotation axis at regular azimuthal spacings of 360 degrees/N.

14. The magnetic field angle sensor of claim 1 , wherein the circuitry is configured to determine the rotational position of the magnetic field source from an angle between a pointer in a complex plane and a positive real axis, wherein a real part of the pointer is equivalent to a linear combination of dBy/dx and dBx/dy, and wherein an imaginary part of the pointer is equivalent to a linear combination of dBx/dx and dBy/dy, wherein dBy/dx is a gradient of the magnetic field component in a second direction along a first direction, dBx/dy is a gradient of the magnetic field component in the first direction along the second direction, dBx/dx is a gradient of the magnetic field component in the first direction along the first direction, and dBy/dy is a gradient of the magnetic field component in the second direction along the second direction.

15. The magnetic field angle sensor of claim 1 , wherein the magnetic field source comprises a magnet axially magnetized in at least one direction.

16. The magnetic field angle sensor of claim 15 , wherein the magnet has a magnetization pattern that is rotationally asymmetric with respect to the rotation axis.

17. The magnetic field angle sensor of claim 15 , wherein the magnet has a Halbach-type magnetization pattern.

18. A method of determining a rotational position of a magnetic field source with respect to a rotation axis, comprising:
providing at least three magnetic field sensor elements arranged on a surface around a projection of the rotation axis onto the surface, the at least three magnetic field sensor elements configured to sense at least two gradients of a magnetic field component of a magnetic field induced by the magnetic field source, the magnetic field component being perpendicular to the rotation axis and parallel with the surface; and
providing circuitry coupled to the at least three magnetic field sensor elements to operably determine the rotational position of the magnetic field source by determining at least one linear combination of the at least two gradients and deriving the rotational position from the at least one linear combination.

19. The method of claim 18 , wherein providing circuitry further comprise providing circuitry to operably determine the rotational position of the magnetic field source from an angle between a pointer in a complex plane and a positive real axis, wherein a real part of the pointer is equivalent to a linear combination of dBy/dx and dBx/dy, and wherein an imaginary part of the pointer is equivalent to a linear combination of dBx/dx and dBy/dy, wherein dBy/dx is a gradient of the magnetic field component in a second direction along a first direction, dBx/dy is a gradient of the magnetic field component in the first direction along the second direction, dBx/dx is a gradient of the magnetic field component in the first direction along the first direction, and dBy/dy is a gradient of the magnetic field component in the second direction along the second direction.

Assignees

• Infineon Technologies Ag

Inventors

• Ausserlechner Udo

Classifications

• G01D5/145 Primary

  influenced by the relative movement between the Hall device and magnetic fields (see G01R33/06) · CPC title