Sensitized, photo-sensitive glass and its production

Patent metadata

Field	Value
Publication number	US-9914660-B2
Application number	US-201615158182-A
Country	US
Kind code	B2
Filing date	May 18, 2016
Priority date	May 18, 2015
Publication date	Mar 13, 2018
Grant date	Mar 13, 2018

Abstract

A sensitized, photo-structurable glasses and methods for producing are provided. The glasses includes Si 4+ , one or more crystal-agonist, one or more crystal-antagonist, and one or more pair of nucleating agents. The glasses are sensitized in that the glass reacts more sensitive to irradiation with UV-light and can be crystallized easier and with higher aspect ratios than a non-sensitized glass with equal composition. Furthermore, the sensitized glasses of this invention have smaller crystal sizes after irradiation and tempering than a non-sensitized glass with equal composition. The invention also relates to a structured glass product. Such product can be obtained by submitting the crystallized glass product to a subsequent etching step. The structured product can be used in components or as component for the application fields micro-technology, micro-reaction-technology, electronic packaging, micro-fluidics, FED spacer, bio-technology, interposer, and/or three-dimensional structured antennae.

First claim

What is claimed is:

1. A sensitized, photo-structurable glass, comprising:
Si 4+ , a crystal-agonist, a crystal-antagonist, and a pair of nucleating agents,
wherein the crystal-agonist is selected from the group consisting of Na + , K + , Li + , and any combinations thereof,
wherein the crystal-antagonist is selected from the group consisting of Al 3+ , B 3+ , Zn 2+ , Sn 2+ , Sb 3+ , and any combinations thereof,
wherein the pair of nucleating agents comprises cerium and an agent selected from the group consisting of silver, gold, copper, and any combinations thereof,
wherein the crystal-agonists have a molar proportion in cat.-% in relation to a molar proportion of Si 4+ of at least 0.3 and at most 0.85,
wherein the glass has a cooling state that corresponds to a steady cooling from a first temperature to a second temperature with a cooling rate of at most 200° C./h, the first temperature being at least above a glass transition temperature of the glass and the second temperature is at least 150° C. below the first temperature, and
wherein the glass has a transmittance value of at least 0.2% at a wavelength of 260 nm and a sample thickness of 1 mm.

2. The glass according to claim 1 , further comprising the following components in cat.-%:

Si 4+
45 to 65,

Crystal-agonists
30 to 45, and

Crystal-antagonists
3.5 to 9.  

3. The glass according to claim 1 , further comprising the following components in cat.-%:

Si 4+
45 to 65

Crystal-agonists

Li +
25 to 40

K +
0 to 8

Na +
0 to 8

Crystal-antagonists

B 3+
0 to 5

Al 3+
 0 to 10

Zn 2+
0 to 4

Sb 3+
  0 to 0.4

Nucleating agents

Ce 3+ /Ce 4+
 >0 to 0.3

Ag +
 >0 to 0.5.

4. The glass according to claim 1 , further comprising contains between 0.02 and 0.2 cat.-% Sb 3+ .

5. The glass according to claim 1 , further comprising a transmittance value that is at least 8% at a glass thickness of 1 mm and a wavelength of 280 nm.

6. The glass according to claim 1 , further comprising an internal transmittance of at most 50% at 314 nm and at a thickness of 1 mm.

7. The glass according to claim 1 , further comprising a surface having a roughness of less than 5 nm.

8. A crystallized product obtainable by light exposure and tempering of a glass according to claim 1 .

9. The crystallized product according to claim 8 , comprising a depth of light exposure of at least 1 mm.

10. A structured product obtainable by light exposure, tempering and structuring of a glass according to claim 1 .

11. The structured product according to claim 10 , wherein the structured product is suitable for a use selected from the group selected consisting of a micro-technology component, a micro-reaction-technology component, an electronic packaging component, a micro-fluidic component, an FED spacer, a bio-technology component, an interposer, and a three-dimensional structured antennae.

12. The glass according to claim 1 , wherein the glass has a refractive index n d at 546.1 nm and 25° C. of at least 1.500.

13. The glass according to claim 1 , wherein the glass has a mass density p of at least 2.35 g/cm 3 .

14. A method for producing a sensitized, photo-structurable glass, comprising:
mixing raw materials to obtain a mixture;
melting the mixture to obtain a melt comprising Si 4+ , a crystal-agonist, a crystal-antagonist, and a pair of nucleating agents,
wherein the crystal-agonist is selected from the group consisting of Na + , K + , Li + , and any combinations thereof,
wherein the crystal-antagonist is selected from the group consisting of Al 3+ , B 3+ , Zn 2+ , Sn 2+ , Sb 3+ , and any combinations thereof,
wherein the pair of nucleating agents comprises cerium and an agent selected from the group consisting of silver, gold, copper, and any combinations thereof,
wherein the crystal-agonists have a molar proportion in cat.-% in relation to a molar proportion of Si 4+ of at least 0.3 and at most 0.85; and
solidifying the melt,
wherein the glass obtains a cooling state that corresponds to a steady cooling from a first temperature to a second temperature with a cooling rate of at most 200° C./h, the first temperature being at least above a glass transition temperature of the glass and the second temperature is at least 150° C. below the first temperature, and
wherein the step of solidifying the melt comprises cooling the melt from a first temperature to a second temperature with an average cooling rate of at most 200° C./h.

15. The method according to claim 14 , wherein the first temperature is at least above a glass transition temperature of the glass and the second temperature is at least 150° C. below the first temperature.

16. The method according to claim 14 , further comprising sensitizing the glass subsequent to solidifying the melt, the sensitizing step comprises re-heating the melt, then cooling the re-heated melt from a first temperature to a second temperature with an average cooling rate of at

Assignees

• Schott Ag

Inventors

• Schreder Bianca
• Walther Marten
• Feichtinger Martin
• Niessner Lothar
• Renz Carsten
• Qian Sean
• Xue Junming

Classifications

• C03C23/002

  by ultraviolet light · CPC title

• C03C2204/00

  Glasses, glazes or enamels with special properties · CPC title

• C03B17/067

  combined with thermal conditioning of the sheets · CPC title

• C03C4/04 Primary

  for photosensitive glass · CPC title

• C03C3/095 Primary

  containing rare earths · CPC title