Transparent material processing with an ultrashort pulse laser
US-9636773-B2 · May 2, 2017 · US
Laser machining device and laser machining method
US9914183B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9914183-B2 |
| Application number | US-201414778746-A |
| Country | US |
| Kind code | B2 |
| Filing date | Mar 13, 2014 |
| Priority date | Mar 27, 2013 |
| Publication date | Mar 13, 2018 |
| Grant date | Mar 13, 2018 |
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- Title
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Abstract
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A laser processing device converges laser light at an object to be processed so as to form a modified region within the object along a line to cut. The laser processing device comprises a laser light source emitting the laser light, a spatial light modulator modulating the laser light emitted from the laser light source, and a converging optical system converging the laser light modulated by the spatial light modulator at the object. The spatial light modulator displays an axicon lens pattern as a modulation pattern so as to form converging points at a plurality of positions juxtaposed close to each other along a laser light irradiation direction.
First claim
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The invention claimed is: 1. A laser processing device for converging laser light at an object to be processed so as to form a modified region within the object along a line to cut, the laser processing device comprising: a laser light source emitting the laser light; a spatial light modulator modulating the laser light emitted from the laser light source; and a converging optical system converging the laser light modulated by the spatial light modulator at the object; wherein the spatial light modulator displays an axicon lens pattern as a modulation pattern so as to form converging points at a plurality of positions juxtaposed close to each other along a laser light irradiation direction. 2. A laser processing device according to claim 1 , wherein the laser processing device forms a plurality of modified spots within the object along the line and lets a plurality of the modified regions form the modified region; wherein the spatial light modulator forms modified dots respectively at the plurality of positions juxtaposed close to each other along the laser light irradiation direction; and wherein a plurality of the modified dots constitute the modified spot elongated in the laser light irradiation direction. 3. A laser processing device according to claim 1 , wherein, in a display part of the spatial light modulator, the axicon lens pattern has a circular region located at a center of the laser light incident thereon and a plurality of circular ring regions demarcated about the center region concentrically with the circular region; and wherein each of the circular region and the plurality of circular ring regions is set such as to increase brightness gradually from radially outer side to inner side. 4. A laser processing method for converging laser light at an object to be processed so as to form a modified region within the object along a line to cut, the method comprising the step of: modulating the laser light emitted from a laser light source with a spatial light modulator and converging the laser light modulated by the spatial light modulator at the object; wherein the step of converging the laser light includes the step of causing the spatial light modulator to display an axicon lens pattern as a modulation pattern so as to form converging points at a plurality of positions juxtaposed close to each other along a laser light irradiation direction. 5. A laser processing device according to claim 2 , wherein, in a display part of the spatial light modulator, the axicon lens pattern has a circular region located at a center of the laser light incident thereon and a plurality of circular ring regions demarcated about the center region concentrically with the circular region; and wherein each of the circular region and the plurality of circular ring regions is set such as to increase brightness gradually from radially outer side to inner side.
Assignees
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Classifications
comprising mirrors · CPC title
into an oval shape, e.g. elliptic shape · CPC title
Cutting armoured, {multi-layered, coated} or laminated, glass products · CPC title
Operations & Transport · mapped topic
with discontinuous faces, e.g. Fresnel lens {(diffractive Fresnel lenses G02B5/1876)} · CPC title
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- What does patent US9914183B2 cover?
- A laser processing device converges laser light at an object to be processed so as to form a modified region within the object along a line to cut. The laser processing device comprises a laser light source emitting the laser light, a spatial light modulator modulating the laser light emitted from the laser light source, and a converging optical system converging the laser light modulated by th…
- Who is the assignee on this patent?
- Hamamatsu Photonics Kk
- What technology area does this patent fall under?
- Primary CPC classification B23K26/0057. Mapped technology areas include Operations & Transport.
- When was this patent published?
- Publication date Tue Mar 13 2018 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 5 related publications on this page (citations in our corpus or others sharing the same primary CPC).