Reflowed gold nanostructures for surface enhanced raman spectroscopy

Patent metadata

Field	Value
Publication number	US-9913603-B2
Application number	US-201514621286-A
Country	US
Kind code	B2
Filing date	Feb 12, 2015
Priority date	Feb 12, 2014
Publication date	Mar 13, 2018
Grant date	Mar 13, 2018

Abstract

Methods and systems for nanopillar sensors are described. Nanopillars can be defined on a substrate, and metal deposited on the nanopillars. A thermal treatment can reflow the metal on the nanopillars forming metallic bulbs on the top end of the nanopillars. These structures can have enhanced optical detection when functionalized with biological agents, or can detect gases, particles and liquids through interaction with the metal layer on the nanopillars.

First claim

What is claimed is:

1. A method comprising:
providing a substrate;
defining at least one recessed region in the substrate;
forming nanopillars in the at least one recessed region;
depositing a metallic layer on a top end of the nanopillars and between the nanopillars in the at least one recessed region, the metallic layer being continuous throughout the top end of the nanopillars and between the nanopillars;
by heating the metallic layer, reflowing the metallic layer on the top end of the nanopillars while removing the metallic layer from a middle portion of the nanopillars, thereby forming metallic bulbs on the top end of the nanopillars; and
functionalizing the metallic bulbs on the top end of the nanopillars.

2. The method of claim 1 , further comprising:
defining at least one blank region in the substrate, the at least one blank region being at least one recessed region void of nanopillars; and
depositing a metallic layer on the at least one blank region.

3. The method of claim 1 , wherein forming nanopillars and reflowing the metallic layer comprise forming a distance between the metallic bulbs between 5 and 50 nanometers.

4. The method of claim 1 , further comprising attaching an imaging device to the substrate on a surface opposite to a surface where the nanopillars are formed.

5. The method of claim 4 , wherein the imaging device is a wirelessly-powered complementary metal-oxide semiconductor (CMOS) device, configured to transmit images wirelessly to a receiver.

6. The method of claim 1 , wherein the substrate comprises mesas having a height higher than the at least one recessed region on the substrate, and a height of the nanopillars is equal or less than the height of the mesas.

7. The method of claim 1 , wherein:
defining at least one recessed region comprises defining an array of recessed regions in the substrate, and
forming nanopillars comprises forming nanopillars in each recessed region of the array of recessed regions.

8. The method of claim 7 , wherein forming nanopillars in each recessed region of the array of recessed regions comprises forming nanopillars with at least a first nanopillar shape in at least one recessed regions of the array of recessed regions, and forming nanopillars with at least a second nanopillar shape in at least one recessed regions of the array of recessed regions.

9. The method of claim 7 , wherein functionalizing the metallic bulbs comprises using a different functionalizing agent for at least two regions of the array of recessed regions.

10. The method of claim 7 , wherein the array of recessed regions is a square array and each corner region of the square array of recessed regions is functionalized with thiol groups.

11. The method of claim 1 , further comprising implanting the sensor in human tissue.

12. The method of claim 1 , wherein a spacing between the metallic bulbs allows electrical insulation between the metallic bulbs.

13. The method of claim 1 , wherein the substrate is silicon, the nanopillars are silicon dioxide and the metallic layer is gold.

14. The method of claim 1 , further comprising attaching an optical fiber to one end of the at least one recessed region, wherein an opposite wall of the at least one recessed region comprises a metallic layer, thereby acting as a reflector for the optical fiber, the optical fiber being configured to shine a laser light on the metallic bulbs and collect a signal reflected from the metallic bulbs.

15. The method of claim 1 , further comprising, after forming nanopillars and prior to depositing a metallic layer, oxidizing the nanopillars.

16. The method of claim 1 , wherein:
defining at least one recessed region comprises etching the substrate; and
forming nanopillars comprises etching the at least one recessed region; and
depositing a metallic layer comprises sputtering the metallic layer.

17. The method of claim 1 , further comprising applying a polymer layer on a top surface of the at least one recessed region in between the nanopillars.

18. The method of claim 1 , wherein forming nanopillars comprises spacing the nanopillars and the metallic bulbs at a distance based on a desired resonant wavelength.

19. The method of claim 1 , wherein heating the metallic layer is at 675° C.

20. The method of claim 1 , further comprising, after defining at least one recessed region and prior to forming nanopillars, forming mesas in the substrate and oxidizing the mesas.

21. The method of claim 1 , wherein functionalizing the metallic bulbs comprises applying one or more functionalizing agents on the metallic bulbs on the top end of the nanopillars.

22. The method of claim 21 , wherein the one or more functionalizing agents is a nucleic acid aptamer.

23. The method of claim 21 , wherein the one or more functionalizing agents comprise an antibody.

24. The method of claim 21 , wherein the one or more functionalizing agents comprise cDNA.

25. The method of claim 21 , wherein the one or more functionalizing agents comprise two or more different functionalizing agents.

26. The method of claim 21 , wherein the one or more functionalizing agents specifically bind to one or more biomolecules.

27. The method of claim 26 , wherein said binding is reversible.

28. The method of claim 26 , wherein at least one of the one or more biomolecules is a protein.

29. The method of claim 26 , wherein at least one of the one or more biomolecules is an mRNA.

30. The method of claim 26 , wherein at least one of the one or more biomolecules is a cytokine.

31. The method of claim 26 , wherein the one or more biomolecules comprise a molecular marker of disease.

32. The method of claim 31 , wherein the disease is oral cancer.

33. The method of claim 31 , wherein the disease is whooping cough.

34. The method of claim 26 , wherein the one or more biomolecules comprise tracheal cytotoxin.

35. The method of claim 26 , wherein the one or more biomolecules comprise thrombin.

36. A method comprising:
providing a substrate;
etching at least one recessed region in the substrate;
etching at least one groove on a surface of the at least one recessed region;
forming nanopillars in the at least one recessed region close to but not within the groove;
depositing a metallic layer on a top end of the nanopillars, on a side surface of the at least one recessed region, and between the nanopillars in the at least one recessed region, the metallic layer being continuous throughout the top end of the nanopillars and between the nanopillars;
by heating the metallic layer, reflowing the metallic layer on the top end of the nanopillars while removing the metallic layer from a middle portion of the nanopillars, thereby forming metallic bulbs on the top end of the nanopillars;
functionalizing the metallic bulbs on the top end of the nanopillars; and
attaching an optic fiber to the groove, the optic fiber having a surface substantially parallel and opposite to the side surface of the at least one recessed region.

37. The method of claim 36 , wherein heating the metallic layer is at 675° C.

38. A method comprising:
providing a substrate;
forming nanopillars on the substrate;
depositing a metallic

Assignees

• California Inst Of Techn
• Univ California
• Univ Southern California

Inventors

• Walavalkar Sameer
• Chang Chieh-Feng
• Scherer Axel
• Marin Brandon
• Fraser Scott E
• Tao Andrea R

Classifications

• A61B2562/0285

  Nanoscale sensors · CPC title

• G01N21/658

  enhancement Raman, e.g. surface plasmons · CPC title

• A61B5/14735

  comprising an immobilised reagent · CPC title

• A61B5/6848

  Needles · CPC title

• B82Y40/00

  Manufacture or treatment of nanostructures · CPC title