Sidewall spacer pattern formation method

Patent metadata

Field	Value
Publication number	US-9911604-B1
Application number	US-201715413823-A
Country	US
Kind code	B1
Filing date	Jan 24, 2017
Priority date	Jan 24, 2017
Publication date	Mar 6, 2018
Grant date	Mar 6, 2018

Abstract

Disclosed are methods of using a lithography-lithography-etch (LLE) technique to form a sidewall spacer pattern for patterning a target layer. In the methods, a photoresist layer is patterned by performing multiple lithographic processes with different photomasks, including a first photomask with a first pattern of parallel bars separated by spaces and a second photomask with a second pattern of opening(s) oriented in an essentially perpendicular direction as compared to the bar(s). The photoresist layer is then developed, creating a third pattern. The third pattern is transferred into a mandrel layer below to form mandrels of different lengths. Then, sidewall spacers are formed on the mandrels and the mandrels are selectively removed to form the sidewall spacer pattern. This sidewall spacer pattern is subsequently used in a sidewall image transfer (SIT) process to pattern a target layer below.

First claim

What is claimed is:

1. A method comprising:
performing multiple lithographic processes to a photoresist layer, the lithographic processes being performed in sequence using at least two different photomasks having two different patterns in order to expose the photoresist layer to light such that, following the lithographic processes, the photoresist layer has stripes of essentially parallel unexposed regions separated by exposed regions and further has at least one additional exposed region that is perpendicular to at least one stripe and divides the stripe into unexposed segments; and,
after the performing of the multiple lithographic processes, developing the photoresist layer to remove the exposed regions and the additional exposed region, creating a third pattern in the photoresist layer.

2. The method according to claim 1 , the photoresist layer being above a mandrel layer, the mandrel layer being above a hardmask layer and the hardmask layer being above a target layer and the method further comprising:
after the developing of the photoresist layer, performing an etch process to transfer the third pattern into the mandrel layer to form mandrels, wherein at least two of the mandrels are in end-to-end alignment and separated by a predetermined distance;
forming sidewall spacers on the mandrels;
after the forming of the sidewall spacers, selectively removing the mandrels to form a sidewall spacer pattern; and
performing multiple etch processes to transfer the sidewall spacer pattern into the hardmask layer and further into the target layer below.

3. The method according to claim 1 , the multiple lithographic processes are performed, in sequence, in a single chamber.

4. The method according to claim 1 ,
the different photomasks comprising a first photomask having a first pattern of essentially parallel bars separated by spaces and a second photomask having a second pattern of at least one opening,
the first photomask and the second photomask being oriented during the lithographic processes such that, following the lithographic processes, the photoresist layer has the stripes of the essentially parallel unexposed regions separated by the exposed regions and further has the at least one additional exposed region, and,
wherein each space in the first pattern and each opening in the second pattern have different widths and wherein the first pattern of the first photomask and the second pattern of the second photomask having different pitches.

5. The method according to claim 4 , wherein, due to different orientations of the at least one opening in the first photomask and the stripes in the second photomask, minimal acid diffusion overlap occurs when acid, which is released in the exposed regions and the at least one additional exposed region during the lithographic processes, diffuses during a post-exposure back (PEB) process.

6. The method according to claim 1 , further comprising: before the performing of the lithographic processes, performing a post-apply bake (PAB) process.

7. The method according to claim 1 , further comprising: after the performing of the lithographic processes, performing a post-exposure bake (PEB) process.

8. A method comprising:
using a first photomask to expose a photoresist layer to light during a first lithographic process, the first photomask having a first pattern of essentially parallel bars separated by spaces so that, following the first lithographic process, the photoresist layer has stripes of essentially parallel unexposed regions separated by exposed regions;
using a second photomask to expose the photoresist layer to light during a second lithographic process, the second photomask having a second pattern of openings and being oriented, during the second lithographic process, such that each opening traverses and is essentially perpendicular to a stripe of an unexposed region of the photoresist layer and such that, following the second lithographic process, an additional exposed region divides the stripe into unexposed segments, the spaces and the openings having different widths and the first pattern and the second pattern having different pitches; and,
developing the photoresist layer to remove the exposed regions and the additional exposed region, creating a third pattern in the photoresist layer.

9. The method according to claim 8 , the photoresist layer being above a mandrel layer, the mandrel layer being above a hardmask layer and the hardmask layer being above a target layer and the method further comprising:
after the developing of the photoresist layer, performing an etch process to transfer the third pattern into the mandrel layer to form multiple mandrels, wherein at least two of the mandrels are in end-to-end alignment and separated by a distance approximately equal to a width of the openings;
forming sidewall spacers on the mandrels;
after the forming of the sidewall spacers, selectively removing the mandrels to form a sidewall spacer pattern; and
performing multiple etch processes to transfer the sidewall spacer pattern into the hardmask layer and further into the target layer below.

10. The method according to claim 8 , the first lithographic process and the second lithographic process are performed, in sequence, in a single chamber.

11. The method according to claim 8 , wherein the first pattern of the first photomask has a first pitch and the second pattern of the second photomask has a second pitch that is greater than the first pitch.

12. The method according to claim 8 , further comprising: before the first lithographic process, performing a post-apply bake (PAB) process.

13. The method according to claim 8 , further comprising: after the second lithographic process, performing a post-exposure bake (PEB) process.

14. The method according to claim 13 , wherein, due to different orientations of the at least one opening in the first photomask and the stripes in the second photomask, minimal acid diffusion overlap occurs when acid, which is released in the exposed regions during the first lithographic process and which is released in the additional exposed region in the second lithographic process, diffuses during the post-exposure bake (PEB) process.

15. A method comprising:
providing a target layer;
forming a hardmask layer on the target layer;
forming a mandrel layer on the hardmask layer;
forming a photoresist layer on the mandrel layer;
using a first photomask to expose the photoresist layer to light during a first lithographic process, the first photomask having a first pattern of essentially parallel bars separated by spaces so that, following the first lithographic process, the photoresist layer has stripes of essentially parallel unexposed regions separated by exposed regions;
using a second photomask to expose the photoresist layer to light during a second lithographic process, the second photomask having a second pattern of openings and being oriented, during the second lithographic process, such that each opening traverses and is essentially perpendicular to a stripe of an unexposed region and such that, following the second lithographic process, an additional exposed region divides the stripe into unexposed segments, the spaces and the openings having different widths and the first pattern and the second pattern having different pitches;
developing the photoresist layer to remove the exposed regions and the additional exposed region, creating a third pattern in the photoresist layer;
performing an etch process to transfer the third pattern into the mandrel layer to form mandrels, wherein at least two of the mandrels are in end-to-end al

Assignees

• Globalfoundries Inc

Inventors

• Sun Lei
• Zhang Xunyuan
• Xie Ruilong
• Chen Yulu

Classifications

• H10P76/2041

  Photolithographic processes · CPC title

• H10P50/695

  characterised by the process involved to create the mask, e.g. lift-off masks or sidewalls or to modify the mask · CPC title

• H10P50/73

  using masks for insulating materials · CPC title

• H10P50/71

  using masks for conductive or resistive materials · CPC title

• H10W20/089

  using processes for implementing desired shapes or dispositions of the openings, e.g. double patterning · CPC title