Actuator control device, optical module, electronic apparatus, and actuator control method

Patent metadata

Field	Value
Publication number	US-9910262-B2
Application number	US-201514603902-A
Country	US
Kind code	B2
Filing date	Jan 23, 2015
Priority date	Jan 27, 2014
Publication date	Mar 6, 2018
Grant date	Mar 6, 2018

Abstract

A spectroscopic measurement apparatus includes an electrostatic actuator that is driven by applying a drive voltage, a gap detector that detects a dimension of a gap, a closed loop system that controls the drive voltage applied to the electrostatic actuator depending on a detection signal from the gap detector, and a gain setting unit that sets a gain in the closed loop system depending on drive characteristics of electrostatic actuator based on the detection signal of the gap detector.

First claim

What is claimed is:

1. An actuator control device that controls an actuator comprising:
a detection unit that detects a gap length between a first mirror of a variable wavelength interference filter and a second mirror of the variable wavelength interference filter, the gap length changing by applying a drive voltage between a first electrode of the variable wavelength interference filter and a second electrode of the variable wavelength interference filter;
a feedback control section that controls the drive voltage applied between the first electrode and the second electrode depending on the gap length detected by the detection unit; and
a gain setting unit that sets a gain in the feedback loop depending on drive characteristics of the first electrode and the second electrode based on the gap length detected by the detection unit, the gain controlling the drive voltage.

2. The actuator control device according to claim 1 ,
wherein the gain setting unit sets the gain based on the drive amount in an initial state in which the drive voltage is not applied to the actuator.

3. The actuator control device according to claim 1 ,
wherein the gain setting unit obtains a plurality of combinations of the drive voltage applied to the actuator and the drive amount detected by the detection unit when applying the drive voltage and sets the gain based on the combinations.

4. The actuator control device according to claim 1 ,
wherein the feedback control section has a controller that controls the drive voltage applied to the actuator based on the drive amount detected by the detection unit and a target value of the drive amount of the actuator, and
wherein the gain setting unit sets the gain of the controller.

5. The actuator control device according to claim 1 ,
wherein the actuator has a first actuator and a second actuator capable of respectively being independently driven,
wherein the feedback control section includes a bias voltage applying unit that applies a predetermined bias voltage to the first actuator and a controller that controls the drive voltage applied to the second actuator based on the drive amount detected by the detection unit and the target value of the drive amount of the actuator, and
wherein the gain setting unit sets a bias voltage in the bias voltage applying unit.

6. An optical module comprising the actuator control device according to claim 1 .

7. An electronic apparatus comprising:
an actuator control device according to claim 1 , and
a processing section that performs a predetermined process by driving of the actuator.

8. The actuator control device according to claim 1 , further comprising:
a first member; and
a second member facing the first member,
wherein the actuator is an electrostatic actuator including the first electrode provided in the first member and the second electrode provided in the second member and facing the first electrode, and
wherein the detection unit detects a gap dimension between the first member and the second member as the drive amount.

9. The actuator control device according to claim 1 , further comprising:
a gain setting unit that sets a gain according to the characteristics of the gap length,
the gain controlling the drive voltage.

10. An actuator control device that controls an actuator comprising:
a detection unit that detects a gap length between a first mirror of a variable wavelength interference filter and a second mirror of the variable wavelength interference filter, the gap length changing by applying a drive voltage between a first electrode of the variable wavelength interference filter and a second electrode of the variable wavelength interference filter;
a feedback control section that controls the drive voltage applied between the first electrode and the second electrode depending on the gap length detected by the detection unit; and
a gain setting unit that sets a gain in the feedback loop depending on drive characteristics of the first electrode and the second electrode based on the gap length detected by the detection unit, the gain controlling the drive voltage,
wherein the gain setting unit sets the gain based on the drive amount in an initial state in which the drive voltage is not applied to the actuator.

11. The actuator control device according to claim 10 , further comprising:
a first member; and
a second member facing the first member,
wherein the actuator is an electrostatic actuator including the first electrode provided in the first member and the second electrode provided in the second member and facing the first electrode, and
wherein the detection unit detects a gap dimension between the first member and the second member as the drive amount.

12. The actuator control device according to claim 10 ,
wherein the gain setting unit obtains a plurality of combinations of the drive voltage applied to the actuator and the drive amount detected by the detection unit when applying the drive voltage and sets the gain based on the combinations.

13. The actuator control device according to claim 10 ,
wherein the feedback control section has a controller that controls the drive voltage applied to the actuator based on the drive amount detected by the detection unit and a target value of the drive amount of the actuator, and
wherein the gain setting unit sets the gain of the controller.

14. The actuator control device according to claim 10 ,
wherein the actuator has a first actuator and a second actuator capable of respectively being independently driven,
wherein the feedback control section includes a bias voltage applying unit that applies a predetermined bias voltage to the first actuator and a controller that controls the drive voltage applied to the second actuator based on the drive amount detected by the detection unit and the target value of the drive amount of the actuator, and
wherein the gain setting unit sets a bias voltage in the bias voltage applying unit.

15. An optical module comprising the actuator control device according to claim 10 .

16. An electronic apparatus comprising:
an actuator control device according to claim 10 , and
a processing section that performs a predetermined process by driving of the actuator.

17. The actuator control device according to claim 10 , further comprising:
a gain setting unit that sets a gain according to the characteristics of the gap length,
the gain controlling the drive voltage.

Assignees

• Seiko Epson Corp

Inventors

• Hirokubo Nozomu

Classifications

• G05B6/00

  Internal feedback arrangements for obtaining particular characteristics, e.g. proportional, integral or differential · CPC title

• H02N1/00

  Electrostatic generators or motors using a solid moving electrostatic charge carrier · CPC title

• G01J3/26 Primary

  using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters · CPC title

• G02B26/00

  Optical devices or arrangements for the control of light using movable or deformable optical elements (control of light by modification of the optical properties of the media of the elements involved therein G02F1/00) · CPC title

• G02B26/02

  for controlling the intensity of light {(G02B26/004 takes precedence)} · CPC title