Apparatus and method to measure temperature of 3D semiconductor structures via laser diffraction

Patent metadata

Field	Value
Publication number	US-9909925-B2
Application number	US-201213672117-A
Country	US
Kind code	B2
Filing date	Nov 8, 2012
Priority date	Nov 10, 2011
Publication date	Mar 6, 2018
Grant date	Mar 6, 2018

Abstract

Embodiments of the present invention generally relate to apparatus for and methods of measuring and monitoring the temperature of a substrate having a 3D feature thereon. The apparatus include a light source for irradiating a substrate having a 3D feature thereon, a focus lens for gathering and focusing reflected light, and an emissometer for detecting the emissivity of the focused reflected light. The apparatus may also include a beam splitter and an imaging device. The imaging device provides a magnified image of the diffraction pattern of the reflected light. The method includes irradiating a substrate having a 3D feature thereon with light, and focusing reflected light with a focusing lens. The focused light is then directed to a sensor and the emissivity of the substrate is measured. The reflected light may also impinge upon an imaging device to generate a magnified image of the diffraction pattern of the reflected light.

First claim

We claim:

1. An apparatus, comprising:
a chamber body;
a substrate support positioned within the chamber body;
a laser for directing light to a substrate supported on the substrate support for thermally processing the substrate;
a reflection measurement system positioned within the chamber body, the reflection measurement system including:
an emissometer;
an imaging device;
a light source positioned to direct light towards the substrate support, the light source generating light at a different wavelength than the laser;
a focus lens positioned to collect light reflected from the surface of the substrate placed on the substrate support, the focus lens positioned at a specular angle of reflection relative to the light source; and
a beam splitter positioned to direct a first portion of the light collected by the focus lens to the emissometer which determines an emissivity of the substrate, and to direct a second portion of the light collected by the focus lens to the imaging device for generating a magnified image of a diffraction pattern of the light reflected from the surface of the substrate; and

a processing unit to determine a temperature of the substrate based upon the emissivity of the substrate.

2. The apparatus of claim 1 , wherein the light source is a monochromatic light source.

3. The apparatus of claim 1 , wherein the imaging device is a CCD camera.

4. The apparatus of claim 1 , wherein the laser and the light source are adapted to simultaneously direct light to the same area of the substrate support.

5. The apparatus of claim 1 , wherein the reflection measurement system is located in a fixed position within the chamber body.

6. The apparatus of claim 5 , wherein the substrate support is translatable in the X-Y directions relative to the reflection measurement system.

7. The apparatus of claim 1 , wherein the beam splitter is positioned near the back focal plane of the focus lens.

8. The apparatus of claim 1 , wherein the imaging device is positioned along a common axis with respect to the beam splitter and the focus lens.

9. The apparatus of claim 1 , wherein the light from the laser and the light from the light source are directed to an overlapping area of the substrate.

Assignees

• Pan Heng
• Rogers Matthew Scott
• Hunter Aaron Muir
• Moffatt Stephen
• Applied Materials Inc

Inventors

• Pan Heng
• Rogers Matthew Scott
• Hunter Aaron Muir
• Moffatt Stephen

Classifications

• G01J2005/0077

  Imaging · CPC title

• G01J5/0007

  of wafers or semiconductor substrates, e.g. using Rapid Thermal Processing · CPC title

• G01J2005/0074

  having separate detection of emissivity · CPC title

• G01J5/08 Primary

  Optical arrangements · CPC title

• G01J5/0803

  Arrangements for time-dependent attenuation of radiation signals · CPC title