Process kit having tall deposition ring and deposition ring clamp

Patent metadata

Field	Value
Publication number	US-9909206-B2
Application number	US-201615201019-A
Country	US
Kind code	B2
Filing date	Jul 1, 2016
Priority date	Jul 3, 2015
Publication date	Mar 6, 2018
Grant date	Mar 6, 2018

Abstract

Embodiments of process kits and process chambers incorporating same are provided herein. In some embodiments, a process kit includes a deposition ring configured to be disposed on a substrate support designed to support a substrate having a given width, including: an annular band configured to rest on a lower ledge of the substrate support; an inner lip extending upwardly from an inner edge of the annular band, wherein an inner surface of the inner lip and an inner surface of the annular band together form a central opening having a width that is less than the given width, and wherein a depth between an upper surface of the annular band and an upper surface of the inner lip is between about 24 mm and about 38 mm; a channel disposed radially outward of the annular band; and an outer lip extending upwardly and disposed radially outward of the channel.

First claim

The invention claimed is:

1. A process kit, comprising:
a deposition ring configured to be disposed on a substrate support designed to support a substrate having a given width, the deposition ring comprising:
an annular band configured to rest on a lower ledge of the substrate support;
an inner lip extending upwardly from an inner edge of the annular band, wherein an inner surface of the inner lip and an inner surface of the annular band together form a central opening having a width that is less than the given width, wherein a depth between an upper surface of the annular band and an upper surface of the inner lip is between about 24 mm and about 38 mm, and wherein a thickness of the annular band either remains constant or increases continuously from an outer edge of the annular band to an inner edge of the annular band;
a channel disposed radially outward of the annular band; and
an outer lip extending upwardly and disposed radially outward of the channel.

2. The process kit of claim 1 , further comprising:
a one-piece process kit shield having a cylindrical body having an upper portion and a lower portion and a cover ring section extending radially inward from the lower portion,
wherein the cover ring section includes a protrusion extending into the channel of the deposition ring and a recess into which the outer lip extends to define a tortuous flow path between the cover ring section and the deposition ring.

3. The process kit of claim 2 , wherein the one-piece process kit shield further comprises:
an adapter section extending radially outward from the upper portion; and
a heat transfer channel extending through the adapter section.

4. A process chamber, comprising:
a chamber wall defining an inner volume within the process chamber;
a sputtering target disposed in an upper section of the inner volume;
a substrate support disposed in the inner volume opposite the sputtering target; and
the process kit of claim 3 , wherein the deposition ring is disposed on the substrate support, and wherein the adapter section of the one-piece process kit shield is supported by the chamber wall.

5. The process kit of claim 1 , wherein the depth is between about 28 mm and about 38 mm.

6. The process kit of claim 1 , wherein the depth is between about 30 mm to about 38 mm.

7. The process kit of claim 1 , further comprising:
a clamp assembly having a base plate coupled to the substrate support; and two or more clamps extending upward from the base plate to interface with the deposition ring to prevent vertical movement of the deposition ring.

8. The process kit of claim 7 , wherein each of the two or more clamps includes an arm extending radially inward and a downwardly projecting lip extending from the arm into the channel of the deposition ring.

9. A process kit, comprising:
a deposition ring configured to be disposed on a substrate support designed to support a substrate having a given width, the deposition ring comprising:
an annular band configured to rest on a lower ledge of the substrate support;
an inner lip extending upwardly from an inner edge of the annular band, wherein an inner surface of the inner lip and an inner surface of the annular band together form a central opening having a width that is less than the given width, and wherein a depth between an upper surface of the annular band and an upper surface of the inner lip is between about 24 mm and about 38 mm;
a channel disposed radially outward of the annular band; and
an outer lip extending upwardly and disposed radially outward of the channel; and

a clamp assembly having a base plate coupled to the substrate support and two or more clamps extending upward from the base plate to interface with the deposition ring to prevent vertical movement of the deposition ring.

10. The process kit of claim 9 , further comprising:
a one-piece process kit shield having a cylindrical body having an upper portion and a lower portion and a cover ring section extending radially inward from the lower portion,
wherein the cover ring section includes a protrusion extending into the channel of the deposition ring and a recess into which the outer lip extends to define a tortuous flow path between the cover ring section and the deposition ring.

11. The process kit of claim 10 , wherein the one-piece process kit shield further comprises:
an adapter section extending radially outward from the upper portion; and
a heat transfer channel extending through the adapter section.

12. The process kit of claim 9 , wherein the depth is between about 28 mm and about 38 mm.

13. The process kit of claim 9 , wherein each of the two or more clamps includes an arm extending radially inward and a downwardly projecting lip extending from the arm into the channel of the deposition ring.

14. A process kit, comprising:
a deposition ring configured to be disposed on a substrate support designed to support a substrate having a given width, the deposition ring comprising:
an annular band configured to rest on a lower ledge of the substrate support;
an inner lip extending upwardly from an inner edge of the annular band, wherein an inner surface of the inner lip and an inner surface of the annular band together form a central opening having a width that is less than the given width, and wherein a depth between an upper surface of the annular band and an upper surface of the inner lip is between about 24 mm and about 38 mm;
a channel disposed radially outward of the annular band; and
an outer lip extending upwardly and disposed radially outward of the channel; and

a clamp assembly having a base plate coupled to the substrate support and two or more clamps extending upward from the base plate to interface with the deposition ring to prevent vertical movement of the deposition ring, wherein each of the two or more clamps includes an arm extending radially inward and a downwardly projecting lip extending from the arm into the channel of the deposition ring.

15. The process kit of claim 14 , further comprising:
a one-piece process kit shield having a cylindrical body having an upper portion and a lower portion and a cover ring section extending radially inward from the lower portion,
wherein the cover ring section includes a protrusion extending into the channel of the deposition ring and a second recess into which the outer lip extends to define a tortuous flow path between the cover ring section and the deposition ring.

16. The process kit of claim 15 , wherein the one-piece process kit shield further comprises:
an adapter section extending radially outward from the upper portion; and
a heat transfer channel extending through the adapter section.

17. A process chamber, comprising:
a chamber wall defining an inner volume within the process chamber;
a sputtering target disposed in an upper section of the inner volume;
a substrate support disposed in the inner volume opposite the sputtering target; and
the process kit of claim 16 , wherein the deposition ring is disposed on the substrate support, and wherein the adapter section of the one-piece process kit shield is supported by the chamber wall.

18. The process kit of claim 14 , wherein the depth is between about 28 mm and about 38 mm.

19. The process kit of claim 9 , wherein a thickness of the annular band either remains constant or increases continuously from an outer edge of the annular band to an inner edge of the annular band.

20. The process kit of claim 14 , wherein a thickness of the annular band eithe

Assignees

• Applied Materials Inc

Inventors

• Johanson William
• Savandaiah Kirankumar
• Allen Adolph Miller
• Wang Xin
• Prabhu Prashant

Classifications

• H01J37/34

  operating with cathodic sputtering (H01J37/36 takes precedence {; methods of cathodic sputtering C23C14/34}) · CPC title

• H01J37/32477

  characterised by the means for protecting vessels or internal parts, e.g. coatings · CPC title

• C23C14/564 Primary

  Means for minimising impurities in the coating chamber such as dust, moisture, residual gases · CPC title

• C23C14/3407 Primary

  Cathode assembly for sputtering apparatus, e.g. Target · CPC title

• H01J37/3488

  Constructional details of particle beam apparatus not otherwise provided for, e.g. arrangement, mounting, housing, environment; special provisions for cleaning or maintenance of the apparatus · CPC title