Apparatus and method for treating graphene using plasma and application thereof

Patent metadata

Field	Value
Publication number	US-9908779-B2
Application number	US-201514701471-A
Country	US
Kind code	B2
Filing date	Apr 30, 2015
Priority date	Apr 30, 2014
Publication date	Mar 6, 2018
Grant date	Mar 6, 2018

Abstract

A method and apparatus for treating graphene raw material by plasma, and an application thereof are provided. After treated by the plasma, the graphene raw material will have a special structure and characteristic.

First claim

What is claimed is:

1. A method for manufacturing a reduced graphene oxide (rGO) film, comprising steps of:
providing a substrate;
distributing a reduced graphene oxide (rGO) slurry having a solvent on the substrate;
evaporating the solvent in the rGO slurry to form a reduced graphene oxide (rGO)-containing precursor film on the substrate; and
treating the reduced graphene oxide (rGO)-containing precursor film on the substrate with an atmospheric pressure plasma jet (APPJ) to form the rGO film, wherein the treating step is kept up for a period of not more than thirteen seconds once the substrate temperature reaches 450° C.

2. The method as claimed in claim 1 , wherein the substrate is electrically conductive.

3. The method as claimed in claim 1 , wherein the rGO film forms an electrode on the substrate.

4. The method as claimed in claim 1 , wherein the treating step is stopped when the rGO-containing precursor film becomes the rGO film, the rGO film contains plural reduced graphene oxide (rGO) sheets having flaky structures protruded therefrom and cracks contained therein, each of the flaky structures has a bottom portion and an upper portion connected thereto, the bottom portion is directly in contact with at least one of the plural rGO sheets; and the upper portion is protruded from the at least one of the plural rGO sheets.

5. The method as claimed in claim 4 , wherein the flaky structures include surfaces, wherein the surfaces of the flaky structures have edges, and a linear distance between two projection points vertically projected from any two different points lying on any one of the edges onto a surface of the substrate is not longer than 10 μm.

6. The method as claimed in claim 1 , wherein the rGO slurry has a solvent, an adhesive dissolved in the solvent and reduced graphene oxides (rGOs) dispersed in the solvent, the solvent is one selected from the group consisting of water, α-terpineol, β-terpineol, χ-terpineol, δ-terpineol, methanol, ethanol, isopropanol, acetone, and any combination thereof, and the adhesive is one selected from the group consisting of a cellulose ester derivative, a cellulose ether derivative, polyethylene glycol (PEG), polyvinylpyrrolidone (PVP) and any combination thereof.

Assignees

• National Taiwam Univ
• Univ Nat Taiwan

Inventors

• Cheng I Chun
• Chen Jian Zhang
• Hsu Cheng Che
• Chou Pi Tai
• Liu Hsiao Wei
• Chang Haoming
• Liang sheng ping
• Wu Ting Jui

Classifications

• H01J37/32357

  Generation remote from the workpiece, e.g. down-stream · CPC title

• C01B32/23 Primary

  Oxidation · CPC title

• C23C18/1295

  with after-treatment of the deposited inorganic material · CPC title

• C01B32/194

  After-treatment · CPC title

• C23C4/134

  Plasma spraying · CPC title