Method for providing sequential power pulses

Patent metadata

Field	Value
Publication number	US-9906210-B2
Application number	US-201214354698-A
Country	US
Kind code	B2
Filing date	Oct 8, 2012
Priority date	Oct 28, 2011
Publication date	Feb 27, 2018
Grant date	Feb 27, 2018

Abstract

The present invention relates to a method for providing power pulses for PVD sputter cathodes which comprise a power consumption component and a cathode element, wherein during a power increase interval for a generator the power on the power consumption component is decreased and then the power on the cathode element is decreased, with changeover being effected such that the power draw from the generator providing the power does not have to be interrupted.

First claim

What is claimed is:

1. Method for providing power pulses with scalable power pulse interval for operating a PVD sputter cathode, which comprises a power consumption component and at least a first cathode or a first partial cathode and a second partial cathode, wherein for the first cathode or the first partial cathode a maximum average power application is specified and wherein the duration of the power pulse intervals is specified and wherein the method comprises the following steps:
a) supplying a generator with a predetermined constant power supply at least after switching on and after completion of a power buildup interval;
b) switching on the generator;
c) connecting the power consumption component to the generator, so that power from the generator is applied to the power consumption component during the power buildup interval;
d) disconnecting the generator from the power consumption component after expiration of the power buildup interval;
e) connecting the first cathode or the first partial cathode to the generator, so that power from the generator is applied to the first cathode or the first partial cathode;
f) disconnecting the generator from the first cathode or the first partial cathode after expiration of a prescribed first power pulse interval corresponding to the first cathode or the first partial cathode,
wherein the power consumption component is not used as material supplier for the substrates to be coated or processed and the steps d) and e) are executed in such a way that when the first cathode or the first partial cathode is connected to the generator, there is no second power buildup interval, and the power supply of the generator is not interrupted;

g) connecting the second partial cathode to the generator, so that power from the generator is applied to the second partial cathode; and
h) disconnecting the generator from the second partial cathode after expiration of a prescribed second power pulse interval corresponding to the second partial cathode,
wherein the steps f) and g) are executed in such a way that the power supply from the generator persists continuously without interruption from the beginning of the power buildup interval until the end of the second power pulse interval and there is no second power buildup interval, and
wherein n further partial cathodes are connected sequentially in turn to the generator and disconnected from the latter in accordance with steps f), g) and h), wherein the n−1 th power pulse interval overlaps time-wise with the n th power pulse interval.

2. Method according to claim 1 , wherein means for detecting arcing are provided and, in the event of an arc being detected, the power consumption component is connected to the generator and the currently connected cathode or partial cathode is disconnected from the generator in such a way that the power supply from the generator is not interrupted.

3. Method for providing power pulses with scalable power pulse interval for operating a PVD sputter cathode, which comprises a power consumption component and at least a first cathode or a first partial cathode, wherein for the first cathode or the first partial cathode a maximum average power application is specified and wherein the duration of the power pulse intervals is specified and wherein the method comprises the following steps:
a) supplying a generator with a predetermined constant power supply at least after switching on and after completion of a power buildup interval;
b) switching on the generator;
c) connecting the power consumption component to the generator, so that power from the generator is applied to the power consumption component during the power buildup interval;
d) disconnecting the generator from the power consumption component after expiration of the power buildup interval;
e) connecting the first cathode or the first partial cathode to the generator, so that power from the generator is applied to the first cathode or the first partial cathode; and
f) disconnecting the generator from the first cathode or the first partial cathode after expiration of a prescribed first power pulse interval corresponding to the first cathode or the first partial cathode,
wherein the power consumption component is not used as material supplier for the substrates to be coated or processed and the steps d) and e) are executed in such a way that when the first cathode or the first partial cathode is connected to the generator, there is no second power buildup interval, and the power supply of the generator is not interrupted, and
wherein the power buildup interval and the first power pulse interval overlap time-wise.

4. Method according to claim 1 , wherein the first power pulse interval and the second power pulse interval overlap time-wise, wherein the first power pulse interval starts temporally before the second power pulse interval and the first power pulse interval ends temporally before the second power pulse interval.

5. Method according to claim 1 , wherein the power consumption component is a dummy cathode, which serves as a power absorber and not as a material supplier for the substrates to be coated or processed.

6. Method according to claim 1 , wherein the power consumption component is executed with an electric circuit with an ohmic resistance at which a corresponding voltage drops and the power is converted into heat.

7. Method according to claim 3 , wherein the power consumption component is a dummy cathode, which serves as a power absorber and not as a material supplier for the substrates to be coated or processed.

8. Method according to claim 3 , wherein the power consumption component is executed with an electric circuit with an ohmic resistance at which a corresponding voltage drops and the power is converted into heat.

Assignees

• Oerlikon Trading Ag
• Oerlikon Surface Solutions Ag Pfaeffikon

Inventors

• Krassnitzer Siegfried
• Lendi Daniel
• Lechthaler Markus

Classifications

• C23C14/352

  using more than one target (C23C14/56 takes precedence) · CPC title

• C23C14/54

  Controlling or regulating the coating process · CPC title

• C23C14/3485

  using pulsed power to the target · CPC title

• H03K3/012 Primary

  Modifications of generator to improve response time or to decrease power consumption · CPC title

• H01J37/34

  operating with cathodic sputtering (H01J37/36 takes precedence {; methods of cathodic sputtering C23C14/34}) · CPC title