Organic light-emitting display device, organic layer depositing apparatus, and method of manufacturing organic light-emitting display device using the organic layer depositing apparatus

Patent metadata

Field	Value
Publication number	US-9905813-B2
Application number	US-201615164922-A
Country	US
Kind code	B2
Filing date	May 26, 2016
Priority date	Jun 29, 2015
Publication date	Feb 27, 2018
Grant date	Feb 27, 2018

Abstract

An organic layer depositing apparatus includes a deposition unit which includes one or more deposition assemblies spaced a predetermined distance apart from a substrate to deposit a deposition material on the substrate, wherein the one or more deposition assemblies include: a deposition source; a deposition source nozzle unit; a first pattern sheet which includes a first patterning unit and a first overlap unit; and a second pattern sheet which includes a second patterning unit and a second overlap unit, wherein the first and second pattern sheets are arranged such that the first and second overlap units overlap each other.

First claim

What is claimed is:

1. An organic layer depositing apparatus comprising a deposition unit including one or more deposition assemblies spaced a predetermined distance apart from a substrate to deposit a deposition material on the substrate,
wherein the one or more deposition assemblies comprise:
a deposition source that sprays the deposition material;
a deposition source nozzle unit on the deposition source and in which deposition source nozzles are disposed;
a first pattern sheet disposed to face the deposition source nozzle unit and including a first patterning unit and a first overlap unit, the first patterning unit defining a first patterning slit through which the deposition material passes, and the first overlap unit being connected to the first patterning unit and defining a first overlap patterning slit through which the deposition material passes; and
a second pattern sheet disposed to face the deposition source nozzle unit and including a second patterning unit and a second overlap unit, the second patterning unit defining a second patterning slit through which the deposition material passes, and the second overlap unit being connected to the second patterning unit and defining a second overlap patterning slit through which the deposition material passes, and
wherein the first and second pattern sheets are arranged such that the first and second overlap units overlap each other, and the first and second patterning units do not overlap each other, and wherein:
the first patterning unit and the first overlap unit are on a first frame, and
the second patterning unit and the second overlap unit are on a second frame adjacent to the first frame.

2. The organic layer depositing apparatus as claimed in claim 1 , wherein the first and second patterning units are spaced apart from each other such that the deposition material passes through the first and second patterning units and is respectively deposited on different regions of the substrate.

3. The organic layer depositing apparatus as claimed in claim 1 , wherein the deposition material passing through the first and second overlap units is deposited on a same region of the substrate.

4. The organic layer depositing apparatus as claimed in claim 1 , wherein at least a portion of the first overlap patterning slit overlaps at least a portion of the second overlap patterning slit.

5. The organic layer depositing apparatus as claimed in claim 4 , wherein a sum of areas in the overlapping portions of the first and second overlap patterning slits corresponds to an area of the first patterning slit or the second patterning slit.

6. The organic layer depositing apparatus as claimed in claim 1 , wherein an area of the first patterning slit is greater than an area of the first overlap patterning slit.

7. The organic layer depositing apparatus as claimed in claim 1 , wherein an area of the second patterning slit is greater than an area of the second overlap patterning slit.

8. The organic layer depositing apparatus as claimed in claim 1 , wherein the first or second overlap patterning slit is a plurality of overlap patterning slits, and lengths of the plurality of the first overlap patterning slits or the plurality of the second overlap patterning slits are gradually linearly shortened toward an end portion of the first pattern sheet or the second pattern sheet, respectively.

9. The organic layer depositing apparatus as claimed in claim 1 , wherein the first and second overlap units gradually become narrower toward end portions of the first and second pattern sheets, respectively.

10. The organic layer depositing apparatus as claimed in claim 1 , wherein widths of the first and second patterning units are greater than widths of the first and second overlap units, respectively.

11. The organic layer depositing apparatus as claimed in claim 1 , wherein the first and second overlap units protrude in width directions of the first and second patterning units, respectively.

12. The organic layer depositing apparatus as claimed in claim 1 , further comprising an overlap correcting plate disposed on at least one of the first and second pattern sheets to adjust a length of each of the first and second overlap patterning slits, wherein the first and second overlap patterning slits are opened.

13. The organic layer depositing apparatus as claimed in claim 12 , wherein an entire area of the overlap correcting plate corresponds to an area of the first overlap unit or the second overlap unit.

14. The organic layer depositing apparatus as claimed in claim 1 , further comprising a transfer unit including:
a first transfer unit that transfers a moving unit in a first direction in which the deposition material is deposited, the substrate being detachably fixed to the moving unit; and
a second transfer unit that transfers the moving unit when the substrate has been separated therefrom in a second direction opposite to the first direction,
the transfer unit allowing the moving unit to be cyclically transferred by the first and second transfer units.

15. An organic light-emitting device comprising:
a substrate;
at least one thin film transistor on the substrate including a semiconductor active layer, a gate electrode insulated from the semiconductor active layer, and source and drain electrodes, each of the source and drain electrodes coming into contact with the semiconductor active layer;
a plurality of pixel electrodes on the thin film transistor;
a plurality of organic layers on the plurality of pixel electrodes; and
a plurality of counter electrodes on the plurality of organic layers,
wherein at least one of the plurality of organic layers on the substrate is formed using the organic layer depositing apparatus of as claimed in claim 1 .

16. A method of manufacturing an organic light-emitting display device by using an organic layer depositing device configured to deposit an organic layer on a substrate, the method comprising:
fixing the substrate to a moving unit in a loading unit;
transferring the moving unit to which the substrate is fixed to a chamber by using a first transfer unit disposed to penetrate through the chamber;
forming an organic layer by depositing a deposition material on different regions of the substrate, the deposition material being sprayed from a deposition source nozzle unit of a deposition assembly while the substrate is relatively moved with respect to the deposition assembly, the substrate and the deposition assembly being disposed in the chamber and spaced apart from each other, the substrate passing through first and second pattern sheets, and the first and second pattern sheets being spaced apart from each other;
separating the substrate from the moving unit in an unloading unit when the depositing is completed; and
transferring the moving unit from which the substrate is separated to the loading unit by using a second transfer unit disposed to penetrate through the chamber,
wherein the first pattern sheet is disposed to face the deposition source nozzle unit and includes a first patterning unit and a first overlap unit, the first patterning unit defining a first patterning slit through which the deposition material passes, and the first overlap unit being connected to the first patterning unit and defining a first overlap patterning slit through which the deposition material passes;
the second pattern sheet is disposed to face the deposition source nozzle unit and includes a second patterning unit and a second overlap unit, the second patterning unit defining a second patterning slit through which the deposition material

Assignees

• Samsung Display Co Ltd

Inventors

• Ha Jaesoo
• Kim Minsoo
• Kim Mugyeom
• Kim Muhyun
• Lee Dongkyu
• Lee Byungkook
• Lee Suhwan
• Lee Yonggu
• Cho Jaeyoung
• Prushinskiy Valeriy

Classifications

• H10P72/3302

  Mechanical parts of transfer devices · CPC title

• B05B13/0221

  characterised by the means for moving or conveying the objects or other work, e.g. conveyor belts (B05B13/0207 takes precedence; conveyors in general B65G) · CPC title

• H01L51/56 Primary

  Electricity · mapped topic

• H01L21/67742

  Electricity · mapped topic

• H01L27/3248

  Electricity · mapped topic