Manufacturing method of a LTPS array substrate

Patent metadata

Field	Value
Publication number	US-9905590-B2
Application number	US-201514779089-A
Country	US
Kind code	B2
Filing date	Jul 31, 2015
Priority date	Jul 24, 2015
Publication date	Feb 27, 2018
Grant date	Feb 27, 2018

Abstract

The present invention provides a LTPS array substrate and a manufacturing method thereof. The method comprises: forming a source electrode and a drain electrode on a substrate, forming polysilicon layers of a first region and a second region on the substrate including the source electrode and the drain electrode, and the thickness of the polysilicon layer of the first region is greater than the one of the second region, the polysilicon layer of the first region partially covers the source electrode and the drain electrode; passivating the surface of the polysilicon layer in order to turn the part of the adjacent surface of the polysilicon layer of the second region and the first region into an insulating layer; forming a gate electrode on the insulating layer between the source electrode and the drain electrode. The present invention can simplify the LTPS technical process and reduce the producing costs.

First claim

What is claimed is:

1. A manufacturing method of a LTPS array substrate, wherein it comprises:
forming a source electrode and a drain electrode of a TFT of said LTPS array substrate on a substrate;
forming polysilicon layers of a first region and a second region on said substrate including said source electrode and said drain electrode, and the width of said polysilicon layer of said first region being greater than said second region, said polysilicon layer of said first region except said second region partially covering said source electrode and said drain electrode;
passivating the surface of said polysilicon layer, in order to transform the portion adjacent to the surface of said polysilicon layer of said second region and said polysillicon layer of said first region into insulating layer, wherein said passivation comprises at least one of an oxidation treatment and the nitriding treatment;
forming a gate electrode of said TFT on said insulating layer between said source electrode and said drain electrode;
injecting P-type impurity ions into the both ends where said polysilicon layer of said first region directly contacts with said source electrode and said drain electrode, in order to form a LDD structure;
forming a planar layer on said substrate including said gate electrode, and forming a contact hole in said planar layer in order to expose the surface of said drain electrode;
forming a common electrode layer of said LTPS array substrate on said planar layer except for corresponding to said TFT;
forming a passivation layer on said planar layer and said common electrode, and said passivation layer being not covered with said contact hole;
forming a pixel electrode on said passivation layer, and said pixel electrode could be electrically connected with said drain electrode through said contact hole.

2. The method as claimed in claim 1 , wherein the substrate comprises a backing plate and a buffer layer formed on said backing plate.

3. The method as claimed in claim 1 , wherein said steps that forming polysilicon layers of a first region and a second region on said substrate including said source electrode and said drain electrode comprise:
sequentially forming a polysilicon layer and a positive photoresist layer on said substrate including said source electrode and said drain electrode;
using a half-transparent photomask to expose from the side that said substrate towards said positive photoresist layer, in order to forming the positive photoresist layers of the first region and the second region of which the thicknesses are different;
removing said positive photoresist layer of the second region;
etching said polysilicon layer of the second layer so that it has predetermined thickness;
removing said positive photoresist layer of the first region.

4. A manufacturing method of a LTPS array substrate, wherein it comprises:
forming a source electrode and a drain electrode of a TFT of said LTPS array substrate on a substrate;
forming polysilicon layers of a first region and a second region on said substrate including said source electrode and said drain electrode, and the width of said polysilicon layer of said first region being greater than said second region, said polysilicon layer of said first region except said second region partially covering said source electrode and said drain electrode;
passivating the surface of said polysilicon layer, in order to transform the portion adjacent to the surface of said polysilicon layer of said second region and said polysillicon layer of said first region into insulating layer;
forming a gate electrode of said TFT on said insulating layer between said source electrode and said drain electrode; and
wherein the substrate comprises a backing plate and a buffer layer formed on said backing plate.

5. The method as claimed in claim 4 , wherein said steps that forming polysilicon layers of a first region and a second region on said substrate including said source electrode and said drain electrode comprise:
sequentially forming a polysilicon layer and a positive photoresist layer on said substrate including said source electrode and said drain electrode;
using a half-transparent photomask to expose from the side that said substrate towards said positive photoresist layer, in order to forming the positive photoresist layers of the first region and the second region of which the thicknesses are different;
removing said positive photoresist layer of the second region;
etching said polysilicon layer of the second layer so that it has predetermined thickness;
removing said positive photoresist layer of the first region.

6. The method as claimed in claim 4 , wherein said passivation comprises at least one of an oxidation treatment and the nitriding treatment.

7. The method as claimed in claim 4 , wherein after forming said gate electrode on said insulating layer between said source electrode and said drain electrode, said method further comprises:
injecting P-type impurity ions into the both ends where said polysilicon layer of said first region directly contacts with said source electrode and said drain electrode, in order to form a LDD structure.

8. The method as claimed in claim 7 , wherein after forming said LDD structure, said method further comprises:
forming a planar layer on said substrate including said gate electrode, and forming a contact hole in said planar layer in order to expose the surface of said drain electrode;
forming a common electrode layer of said LTPS array substrate on said planar layer except for corresponding to said TFT;
forming a passivation layer on said planar layer and said common electrode, and said passivation layer being not covered with said contact hole;
forming a pixel electrode on said passivation layer, and said pixel electrode could be electrically connected with said drain electrode through said contact hole.

9. A manufacturing method of a LTPS array substrate, comprising:
forming a source electrode and a drain electrode of a TFT of said LTPS array substrate on a substrate;
forming polysilicon layers of a first region and a second region on said substrate including said source electrode and said drain electrode, and the width of said polysilicon layer of said first region being greater than said second region, said polysilicon layer of said first region except said second region partially covering said source electrode and said drain electrode;
passivating the surface of said polysilicon layer in order to transform the portion adjacent to the surface of said polysilicon layer of said second region and said polysillicon layer of said first region into insulating layer;
forming a gate electrode of said TFT on said insulating layer between said source electrode and said drain electrode;
wherein after forming said gate electrode on said insulating layer between said source electrode and said drain electrode, further comprising,
injecting first impurity ions into the both ends where said polysilicon layer of said first region directly contacts with said source electrode and said drain electrode; and
injecting second impurity ions into said polysilicon layer of said first region corresponding to where are between said gate electrode and said source electrode as well as said gate electrode and said drain electrode, in order to form a LDD structure.

10. The method as claimed in claim 9 , wherein after forming said LDD structure, said method further comprises:
forming a planar layer on said substrate including said gate electrode, and forming a contact hole in said planar layer in order to expose the surface of said drain electrode;
forming a common electrode layer of said LTPS array substrate on said plana

Assignees

• Shenzhen China Star Optoelect
• Wuhan China Star Optoelectronics Technology Co Ltd

Inventors

• Wang Cong
• Du Peng
• Wang Xiaoxiao

Classifications

• H10D84/01

  Manufacture or treatment · CPC title

• H10P14/6316

  Formation by nitridation, e.g. nitridation of the substrate · CPC title

• H10P14/6318

  Formation by simultaneous oxidation and nitridation · CPC title

• H10P14/6304

  Formation by oxidation, e.g. oxidation of the substrate · CPC title

• H10P14/6903

  containing silicon · CPC title