Optics for controlling light transmitted through a conical quartz dome

Patent metadata

Field	Value
Publication number	US-9905444-B2
Application number	US-201313785539-A
Country	US
Kind code	B2
Filing date	Mar 5, 2013
Priority date	Apr 25, 2012
Publication date	Feb 27, 2018
Grant date	Feb 27, 2018

Abstract

Embodiments described herein generally relate to apparatus for heating substrates. The apparatus generally include a process chamber having a substrate support therein. A plurality of lamps is positioned to provide radiant energy through an optically transparent dome to a substrate positioned on the substrate support. A light focusing assembly is positioned within the chamber to influence heating and temperature distribution on the substrate and to facilitate formation of a film on a substrate having uniform properties, such as density. The light focusing assembly can include one or more reflectors, light pipes, or refractive lenses.

First claim

What is claimed is:

1. A process chamber, comprising:
a chamber body including an optically transparent dome;
a substrate support disposed within the chamber body;
a plurality of lamps disposed adjacent to the optically transparent dome; and
a light focusing assembly positioned within the chamber body between the plurality of lamps and a substrate positioned on the substrate support, the light focusing assembly adapted to influence radiant energy emitted from the plurality of lamps, wherein:
the light focusing assembly comprises a plurality of concentric rings or polygonal approximations to rings, the concentric rings or the polygonal approximations to rings comprising quartz; and
the concentric rings or the polygonal approximations to rings contain a hollow cavity therein, and interior walls of the hollow cavity having a reflective coating thereon.

2. The process chamber of claim 1 , wherein at least some of the concentric rings have different heights.

3. The process chamber of claim 1 , wherein the reflective coating comprises silver, gold, or aluminum.

4. The process chamber of claim 1 , wherein the concentric rings each have a thickness within a range of about 2.5 millimeters to about 35 millimeters.

5. The process chamber of claim 1 , wherein a support shaft coupled to the substrate support is disposed through a center of an innermost ring of the plurality of concentric rings.

6. The process chamber or claim 5 , wherein the support shaft is formed form quartz and contains a hollow cavity therein.

7. The process chamber of claim 1 , wherein the light focusing assembly further comprises a plurality of refractive elements disposed between adjacent concentric rings.

8. The process chamber of claim 7 , wherein the refractive elements include convex or concave lenses.

9. The process chamber of claim 7 , wherein the refractive elements include Fresnel lenses.

10. The process chamber of claim 1 , wherein the lamps are positioned outside of a processing region of the chamber body.

11. A process chamber, comprising:
a chamber body including an optically transparent dome;
a substrate support disposed within the chamber body, the substrate support having a support shaft extending therefrom;
a plurality of lamps disposed adjacent to the optically transparent dome; and
a light focusing assembly positioned within the chamber body between the optically transparent dome and the substrate support, the light focusing assembly in contact with an upper surface of the optically transparent dome and adapted to influence radiant energy emitted from the plurality of lamps wherein:
the light focusing assembly comprises a plurality of concentric rings or polygonal approximations to rings, the concentric rings or the polygonal approximations to rings comprising quartz; and
the concentric rings or the polygonal approximations to rings contain a hollow cavity therein, and interior walls of the hollow cavity having a reflective coating thereon.

12. The process chamber of claim 11 , wherein the support shaft includes a hollow cavity therein.

13. The process chamber of claim 12 , wherein the light focusing assembly further comprises a plurality of refractive elements disposed between adjacent concentric rings.

14. The process chamber of claim 13 , wherein the refractive element comprises a concave, convex, or Fresnel lenses.

Assignees

• Ranish Joseph M
• Applied Materials Inc

Inventors

• Ranish Joseph M

Classifications

• H10P72/0436 Primary

  mainly by radiation · CPC title

• H10P14/00 Primary

  Formation of materials, e.g. in the shape of layers or pillars · CPC title

• G02B17/002

  Arrays of reflective systems · CPC title

• H01L21/02104

  Electricity · mapped topic

• H01L21/67115 Primary

  Electricity · mapped topic