Glass substrate for mask blank

Patent metadata

Field	Value
Publication number	US-9904164-B2
Application number	US-201615002747-A
Country	US
Kind code	B2
Filing date	Jan 21, 2016
Priority date	Feb 3, 2015
Publication date	Feb 27, 2018
Grant date	Feb 27, 2018

Abstract

A glass substrate for a mask blank has main surfaces. A root-mean-square surface roughness (RMS) in at least one main surface is 0.15 nm or less. An aspect ratio of a surface profile (Str) of the main surface in accordance with ISO 25178-2:2012, where s=0.2, is 0.30 or more. The aspect ratio is determined through measurement of the surface profile at measurement intervals of 0.2 nm or less in a measurement range of 100 nm×100 nm using an atomic force microscope.

First claim

What is claimed is:

1. A glass substrate for a mask blank, having two main surfaces, wherein a root-mean-square surface roughness in at least one main surface among the two main surfaces is 0.15 nm or less, and an aspect ratio of a surface profile of the at least one main surface is 0.30 or more, wherein the aspect ratio is a value obtained by dividing a horizontal distance in a direction in which an autocorrelation function defined in ISO 25178-2:2012 has a fastest decay to 0.2 by a horizontal distance in a direction in which the autocorrelation function has the latest decay to 0.2, and the aspect ratio is determined through measurement of the surface profile at measurement intervals of 0.2 nm or less in a measurement area of 100 nm×100 nm using an atomic force microscope.

2. A reflection mask blank for extreme ultraviolet lithography, comprising:
the glass substrate as described in claim 1 ; and
a multilayer reflection film and an absorption film in this order on the at least one main surface of the glass substrate.

3. The reflection mask blank according to claim 2 , wherein the aspect ratio of the surface profile of the at least one main surface is 0.35 or more.

4. The reflection mask blank according to claim 2 , wherein the root-mean-square surface roughness in the at least one main surface is 0.10 nm or less.

5. The reflection mask blank according to claim 2 , wherein the glass substrate is made of glass having a coefficient of thermal expansion at 20° C. of 30 ppb/° C. or less.

6. The reflection mask blank according to claim 5 , wherein the glass is synthetic quartz glass comprising SiO 2 and from 1 to 12% by mass of TiO 2 .

7. The glass substrate according to claim 1 , wherein the aspect ratio of the surface profile of the at least one main surface is 0.35 or more.

8. The glass substrate according to claim 1 , wherein the root-mean-square surface roughness in the at least one main surface is 0.10 nm or less.

9. The glass substrate according to claim 1 , wherein the glass substrate is made of glass having a coefficient of thermal expansion at 20° C. of 30 ppb/° C. or less.

10. The glass substrate according to claim 9 , wherein the glass is synthetic quartz glass comprising SiO 2 and from 1 to 12% by mass of TiO 2 .

11. A substrate with a reflection layer for extreme ultraviolet lithography, comprising:
the glass substrate for a mask blank as described in claim 1 ; and
a reflection layer comprising a multilayer reflection film formed on the at least one main surface of the glass substrate for a mask blank,
wherein the multilayer reflection film is formed by alternately laminating layers having a low refractive index and layers having a high refractive index.

12. A reflection mask blank for extreme ultraviolet lithography, comprising the substrate with a reflection layer as described in claim 11 and an absorption layer formed on the multilayer reflection film.

13. A substrate with a reflection layer for extreme ultraviolet lithography, comprising:
a glass substrate; and
a reflection layer comprising a multilayer reflection film formed on a main surface of the glass substrate,
wherein the multilayer reflection film is formed by alternately laminating layers having a low refractive index and layers having a high refractive index, and a root-mean-square surface roughness in a surface of the multilayer reflection film is 0.15 nm or less, and an aspect ratio of a surface profile of the surface of the multilayer reflection film is 0.30 or more, wherein the aspect ratio is a value obtained by dividing a horizontal distance in a direction in which an autocorrelation function defined in ISO 25178-2:2012 has a fastest decay to 0.2 by a horizontal distance in a direction in which the autocorrelation function has the latest decay to 0.2, and the aspect ratio is determined through measurement of the surface profile at measurement intervals of 0.2 nm or less in a measurement area of 100 nm×100 nm using an atomic force microscope.

14. A reflection mask blank for extreme ultraviolet lithography, comprising the substrate with a reflection layer as described in claim 13 and an absorption layer formed on the multilayer reflection film.

Assignees

• Asahi Glass Co Ltd

Inventors

• Nakanishi Hiroshi

Classifications

• G03F1/60 Primary

  Substrates · CPC title