Wireless thermionic sensor package and methods of using

Patent metadata

Field	Value
Publication number	US-9903768-B2
Application number	US-201414575672-A
Country	US
Kind code	B2
Filing date	Dec 18, 2014
Priority date	Dec 18, 2014
Publication date	Feb 27, 2018
Grant date	Feb 27, 2018

Abstract

A thermionic sensor package and methods of using the same are disclosed. The sensor package includes a substrate, a package housing disposed on the substrate and at least partially defining a package chamber in which vacuum conditions are maintained, a thermionic sensor disposed in the package chamber, and a wireless transmission device disposed on the substrate. The thermionic sensor includes a sensor housing at least partially defining an emission chamber, a cathode disposed in the emission chamber, an anode disposed in the emission chamber and spaced apart from the cathode, and an electrically conductive layer disposed in the emission chamber facing the anode and cathode. The method includes generating a detection signal when the anode and the cathode of the sensor are at substantially the same temperature.

First claim

What is claimed is:

1. A sensor package comprising:
a substrate;
a package housing disposed on the substrate and at least partially defining a package chamber in which vacuum conditions are maintained;
a thermionic sensor disposed in the package chamber; and
a first wireless transmission device disposed on the substrate and configured to wirelessly transmit the sensor signal to an external device,
wherein the thermionic sensor comprises:
a sensor housing at least partially defining an emission chamber in which vacuum conditions are maintained, the emission chamber having opposing first and second surfaces;
a cathode disposed in the emission chamber on the first surface;
an anode disposed in the emission chamber on the first surface, and spaced apart from the cathode; and
an electrically conductive layer disposed in the emission chamber on the second surface, facing the anode and cathode,
wherein the thermionic sensor is configured to output a detection signal when the anode and cathode are at substantially the same temperature.

2. The sensor package of claim 1 , further comprising a first amplifier disposed on the substrate and configured to amplify the detection signal and provide the amplified detection signal to the first wireless transmission device.

3. The sensor package of claim 1 , further comprising a power source disposed on the substrate and electrically connected to the thermionic sensor.

4. The sensor package of claim 3 , wherein the power source is configured to apply a bias voltage between the anode and cathode of the thermionic sensor.

5. The sensor package of claim 3 , wherein the power source is a thermionic power generator.

6. The sensor package of claim 3 , wherein:
the thermionic sensor is a temperature sensor; and
the sensor package further comprises:
a thermionic pressure sensor disposed on the sensor housing and comprising a cathode disposed on the first surface of the emission chamber, an anode disposed on the first surface of the emission chamber and spaced apart from the cathode, and electrically conductive layer disposed on the second surface of the emission chamber;
a second amplifier disposed on the substrate and configured to amplify a detection signal of the pressure sensor; and
a second wireless transmission device disposed on the substrate and configured transmit the amplified detection signal of the second amplifier to an external device, wherein,
the sensor housing comprises a flexible portion configured to flex in response to an amount of ambient pressure applied to the sensor housing, and
the electrically conductive layer of the pressure sensor is attached to the flexible portion, such that a distance between the electrically conductive layer and the cathode and anode of the pressure sensor changes in accordance with the amount of ambient pressure.

7. The sensor package of claim 1 , further comprising a refractory material encasing the package housing.

8. The sensor package of claim 1 , wherein the package housing and the substrate comprise substantially nonporous ceramic materials.

9. The sensor package of claim 1 , wherein the package chamber is maintained at a pressure of less than about 100 micro Torr.

10. The sensor package of claim 1 , wherein the first wireless transmission device comprises an antenna and a resistance-inductance (RL) relaxation oscillator.

11. A method of using the sensor package of claim 1 , the method comprising:
exposing the sensor package to a high-temperature environment, such that an anode and a cathode of a sensor of the sensor package are both heated to substantially the same temperature, the temperature being at least about 600° C.,
generating a sensor signal using thermionic emission between the cathode and the anode; and
transmitting the sensor signal wirelessly to an external device.

12. The method of claim 11 , wherein the exposing of the sensor package further comprises generating a temperature difference between an anode and a cathode of a power generator of the sensor package, in order to generate current sufficient to power the sensor package.

13. The method of claim 11 , further comprising amplifying the sensor signal before transmitting the sensor signal to the external device.

14. The method of claim 11 , wherein the transmitting of the sensor signal comprises converting the sensor signal into a radio frequency (RF) signal, and broadcasting the RF signal to the external device.

15. The method of claim 11 , wherein generating a sensor signal comprises generating a temperature signal, a pressure signal, or both a temperature signal and a pressure signal.

16. The method of claim 11 , wherein generating a sensor signal comprises generating a signal relating to the flow rate of at least one gas chosen from hydrocarbons, oxygen, water vapor, carbon dioxide, carbon monoxide, sulfur oxide, and nitrous oxide gases.

17. The method of claim 11 , further comprising repeating the generating and the transmitting of the sensor signal constantly, or at a selected interval.

18. The method of claim 11 , wherein the generating of the sensor signal further comprises applying a bias voltage between the cathode and the anode.

19. The method of claim 18 , wherein the generating of the sensor signal further comprises electrically floating the conductive layer.

20. The method of claim 11 , wherein the anode and cathode are disposed in an emission chamber in which vacuum conditions are maintained.

Assignees

• Palo Alto Res Ct Inc

Inventors

• Sahu Saroj Kumar
• Torres Francisco E
• Limb Scott J

Classifications

• G01K7/40 Primary

  using ionisation of gases · CPC title

• G01K1/024

  for remote indication · CPC title

• G01L21/32

  using electric discharge tubes with thermionic cathodes · CPC title

• G01L1/14

  by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators · CPC title

• G01K11/00

  Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00 · CPC title