Titanium nitride for MEMS bolometers

Patent metadata

Field	Value
Publication number	US-9903763-B2
Application number	US-201415022601-A
Country	US
Kind code	B2
Filing date	Sep 26, 2014
Priority date	Sep 27, 2013
Publication date	Feb 27, 2018
Grant date	Feb 27, 2018

Abstract

A method for fabricating a semiconductor device includes patterning a sacrificial layer on a substrate to define a bolometer, with trenches being formed in the sacrificial layer to define anchors for the bolometer, the trenches extending through the sacrificial layer and exposing conductive elements at the bottom of the trenches. A thin titanium nitride layer is then deposited on the sacrificial layer and within the trenches. The titanium nitride layer is configured to form a structural support for the bolometer and to provide an electrical connection to the conductive elements on the substrate.

First claim

What is claimed is:

1. A semiconductor device comprising:
a silicon substrate;
conductive elements formed on the silicon substrate; and
a bolometer formed on the silicon substrate, the bolometer including a structural layer shaped to define anchor structures and a support portion, the anchor structures being positioned in contact with the conductive elements and extending from the conductive elements away from the silicon substrate to space the support portion of the structural layer apart from the silicon substrate,
wherein the support portion extends between and is contiguous with the anchor structures such that the structural layer forms a continuous layer that encompasses the anchor structures and the support portion,
wherein the structural layer is electrically connected to the conductive elements,
wherein the structural layer, including the anchor structures and the support portion, is formed of titanium nitride,
wherein the structural layer has a thickness of 5 nm to 60 nm,
wherein the bolometer further comprises a functional layer formed of a metal material that extends continuously along a top surface of the structural layer such that it follows contours of the support portion and the anchor structures of the structural layer, and
wherein the structural layer is interposed between the functional layer and the conductive elements and is used to electrically connect the functional layer to the conductive elements.

2. The semiconductor device of claim 1 , wherein the functional layer is formed of platinum.

3. The semiconductor device of claim 2 , wherein the functional layer has a thickness of approximately 10 nm or less.

4. The semiconductor device of claim 1 , wherein the conductive elements are formed at least partially on top of an oxide layer on the silicon substrate.

5. The semiconductor device of claim 4 , wherein the conductive elements comprise bond pads.

6. The semiconductor device of claim 2 , further comprising:
an additional titanium nitride layer formed on top of the functional layer,
wherein the structural layer comprising titanium nitride, the functional layer comprising platinum and the additional titanium nitride layer each have a thickness of approximately 10 nm or less.

7. The semiconductor device of claim 2 , further comprising:
an additional layer comprising alumina formed on top of the functional layer.

Assignees

• Bosch Gmbh Robert

Inventors

• Samarao Ashwin K
• Obrien Gary
• Feyh Ando
• Purkl Fabian
• Yama Gary

Classifications

• G01J5/024

  Special manufacturing steps or sacrificial layers or layer structures · CPC title

• G01J5/20 Primary

  using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices · CPC title