Substrate temperature measuring device, substrate processing apparatus including the same, and substrate temperature measuring method using the same
US-2024019311-A1 · Jan 18, 2024 · US
US9903762B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9903762-B2 |
| Application number | US-201514940838-A |
| Country | US |
| Kind code | B2 |
| Filing date | Nov 13, 2015 |
| Priority date | Nov 21, 2014 |
| Publication date | Feb 27, 2018 |
| Grant date | Feb 27, 2018 |
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A pyrometric detection device for use in an apparatus for producing three-dimensional work pieces comprises a pyrometric detecting unit ( 10 ) configured to receive thermal radiation emitted at different points of a detection plane in a detection direction and a calibration device ( 12 ) comprising a substrate ( 14 ) and a plurality of light guides ( 16 ) each having a first end ( 18 ) for coupling light into the light guide ( 16 ) and a second end ( 20 ) for emitting light from the light guide ( 16 ), the second end ( 20 ) being fixed to the substrate ( 14 ). The substrate ( 14 ) is adapted to be removably arranged relative to the pyrometric detecting unit ( 10 ) in such a manner that the second ends ( 20 ) of the plurality of light guides ( 16 ) are arranged in the detection plane and emit light in the detection direction, in a calibration state of the pyrometric detection device.
Opening claim text (preview).
The invention claimed is: 1. A pyrometric detection device comprising: a pyrometric detecting unit configured to receive thermal radiation emitted at different points of a detection plane in a detection direction, and a calibration device comprising a substrate and a plurality of light guides, each light guide having a first end for coupling light into the light guide and a second end for emitting light from the light guide, the second end being fixed to the substrate, wherein the substrate is adapted to be removably arranged relative to the pyrometric detecting unit in such a manner that the second ends of the plurality of light guides are arranged in the detection plane and emit light in the detection direction, in a calibration state of the pyrometric detection device. 2. The pyrometric detection device according to claim 1 , wherein the substrate is plate-shaped; and the second ends of the plurality of light guides are arranged in a plane corresponding to an upper surface of the plate-shaped substrate. 3. The pyrometric detection device according to claim 1 , wherein each of the light guides is directed through a through-hole in the substrate. 4. The pyrometric detection device according to claim 1 , wherein the second ends of the plurality of light guides are fixed to the substrate such that a main light emission direction of each light guide corresponds to the detection direction of the pyrometric detecting unit, in the calibration state. 5. The pyrometric detection device according to claim 4 , wherein the second ends of the plurality of light guides are fixed to the substrate such that they are oriented in the detection direction of the pyrometric detecting unit, in the calibration state. 6. The pyrometric detection device according to claim 1 , wherein the second ends of the plurality of light guides are arranged on the substrate in the form of a matrix. 7. The pyrometric detection device according to claim 1 , further comprising a light source adapted to couple light into each of the plurality of light guides via their first ends, wherein the intensity of the light coupled into each of the plurality of light guides is substantially the same. 8. The pyrometric detection device according to claim 1 , wherein the light guides are glass fibers; and the first ends of the plurality of light guides are arranged next to each other in the form of a bundle. 9. The pyrometric detection device according to claim 1 , wherein each of the light guides has the same length. 10. An apparatus comprising: a carrier; a powder applicator for applying a raw material powder onto the carrier; an irradiator for selectively irradiating electromagnetic or particle radiation onto the raw material powder applied onto the surface of the carrier; and a pyrometric detection device comprising: a pyrometric detector configured to receive thermal radiation emitted at different points of a detection plane in a detection direction; and a calibration device comprising a substrate and a plurality of light guides, each light guide having a first end for coupling light into the light guide and a second end for emitting light from the light guide, the second end being fixed to the substrate, wherein the substrate is adapted to be removably arranged relative to the pyrometric detector in such a manner that the second ends of the plurality of light guides are arranged in the detection plane and emit light in the detection direction, in a calibration state of the pyrometric detection device; and wherein the detection plane of the pyrometric detection device corresponds to an irradiation plane defined on the carrier. 11. The apparatus according to claim 10 , wherein the pyrometric detection device further comprises: a light source adapted to couple light into each of the plurality of light guides via their first ends, wherein the intensity of the light coupled into each of the plurality of light guides is substantially the same; and in the calibration state, the substrate, the plurality of light guides, and the light source are arranged inside a hermetically sealed chamber of the apparatus. 12. The apparatus according to claim 10 , wherein the irradiator comprises a laser source configured to emit a laser beam and a light directing unit configured to direct the laser beam to predetermined points of the irradiation plane. 13. The apparatus according to claim 12 , wherein the light directing unit is configured to direct the thermal radiation emitted at the different points of the detection plane to the pyrometric detector; and the detection direction at each point of the detection plane is opposite to an incidence direction of the laser beam. 14. A method for calibrating a pyrometric detection device for use in producing three-dimensional work pieces, the method comprising: removably arranging a calibration device relative to a pyrometric detecting unit configured to receive thermal radiation emitted at different points of a detection plane in a detection direction, the calibration device comprising a substrate and a plurality of light guides, each light guide having a first end for coupling light into the light guide and a second end for emitting light from the light guide, the second end being fixed to the substrate, wherein the second ends of the plurality of light guides are arranged in the detection plane; coupling light into each of the plurality of light guides via the first ends; individually measuring the intensity of light emitted from each of the second ends of the plurality of light guides in the detection direction by means of the pyrometric detecting unit; and calibrating the pyrometric detecting unit based on the results of the intensity measurements. 15. The method according to claim 14 , wherein the intensity of the light coupled into each of the plurality of light guides is substantially the same.
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