MEMS device mechanical amplitude control

Patent metadata

Field	Value
Publication number	US-9903718-B2
Application number	US-201514723676-A
Country	US
Kind code	B2
Filing date	May 28, 2015
Priority date	May 28, 2015
Publication date	Feb 27, 2018
Grant date	Feb 27, 2018

Abstract

A system and/or method for utilizing mechanical motion limiters to control proof mass amplitude in MEMS devices (e.g., MEMS devices having resonant MEMS structures, for example various implementations of gyroscopes, magnetometers, accelerometers, etc.). As a non-limiting example, amplitude control for a MEMS gyroscope proof mass may be accomplished during normal (e.g., steady state) gyroscope operation utilizing impact stops (e.g., bump stops) of various designs. As another non-limiting example, amplitude control for a MEMS gyroscope proof mass may be accomplished utilizing non-impact limiters (e.g., springs) of various designs, for example springs exhibiting non-linear stiffness characteristics through at least a portion of their normal range of operation.

First claim

What is claimed is:

1. A MEMS sensor comprising:
a stationary component;
a proof mass that is moveable relative to the stationary component;
a mechanical motion limiter that limits oscillation amplitude of the proof mass; and
a drive circuit that operates to oscillate the proof mass,
wherein during steady state operation of the MEMS sensor, the mechanical motion limiter operates on the proof mass,
wherein the operation of the mechanical motion limiter causes a change in an operating frequency of the proof mass,
and wherein a drive force of the drive circuit is modified based on the change in the operating frequency.

2. The MEMS sensor of claim 1 , wherein the MEMS sensor comprises a MEMS gyroscope, and the proof mass is a MEMS gyroscope proof mass.

3. The MEMS sensor of claim 1 , wherein the MEMS sensor comprises at least one of: a resonant magnetometer, a mass sensor, a chemical sensor and/or a resonator.

4. The MEMS sensor of claim 1 , wherein:
the mechanical motion limiter comprises an impact-stop; and
during steady state operation of the MEMS sensor, the drive circuit drives the proof mass to an oscillation amplitude that causes the proof mass to impact the impact-stop.

5. The MEMS sensor of claim 4 , further comprising an anti-stiction coating on the impact-stop.

6. The MEMS sensor of claim 4 , wherein:
the impact-stop comprises a protrusion that protrudes from at least one of the stationary component and/or the proof mass.

7. The MEMS sensor of claim 4 , wherein the impact-stop comprises a compliant bump stop.

8. The MEMS sensor of claim 7 , wherein the compliant bump stop comprises a non-linear spring.

9. The MEMS sensor of claim 1 , wherein:
the mechanical motion limiter comprises a non-impact limiter that is connected between the proof mass and the stationary component; and
during steady state operation of the MEMS sensor, the drive circuit drives the proof mass to an oscillation amplitude that causes the non-impact limiter to limit the oscillation amplitude of the proof mass.

10. The MEMS sensor of claim 9 , wherein the non-impact limiter comprises a non-linear spring.

11. The MEMS sensor of claim 10 , wherein the non-impact limiter comprises a spring system of one or more springs, where the spring system is characterized by a plurality of restoring force functions comprising:
a first restoring force function, in a first region of proof mass displacement from a central position; and
a second restoring force function different from the first restoring force function, in a second region of proof mass displacement from the central position.

12. The MEMS sensor of claim 11 , wherein:
the first restoring force function is predominantly a linear function of proof mass displacement; and
the second restoring force function is predominantly a non-linear function of proof mass displacement.

13. A MEMS sensor comprising:
a stationary component;
a proof mass that is moveable relative to the stationary component;
a mechanical motion limiter that limits oscillation amplitude of the proof mass; and
a drive circuit that applies a drive force to the proof mass to cause the proof mass to oscillate at an oscillation frequency;
wherein during steady state operation of the MEMS sensor, the mechanical motion limiter operates on the proof mass to limit a steady state amplitude of the proof mass, and
wherein the magnitude of the drive force is determined, at least in part, by determining that the magnitude of an N th harmonic of the oscillation frequency changes by at least a threshold, where N>1.

14. The MEMS sensor circuit of claim 13 , wherein N=3.

15. The MEMS sensor of claim 13 , wherein:
the mechanical motion limiter comprises an impact-stop; and
during steady state operation of the MEMS sensor, the drive circuit drives the proof mass to an oscillation amplitude that causes the impact-stop to limit the steady state amplitude.

16. The MEMS sensor of claim 13 , wherein:
the mechanical motion limiter comprises a non-impact limiter that is continually in contact with the proof mass; and
during steady state operation of the MEMS sensor, the drive circuit drives the proof mass to an oscillation amplitude that causes the non-impact limiter to limit the oscillation amplitude of the proof mass.

17. A method of calibrating a MEMS sensor comprising, the method comprising:
operating a drive circuit to apply a drive force to a proof mass, wherein the drive force drives the proof mass into an oscillation in which the proof mass contacts a mechanical motion limiter and oscillates at an oscillation frequency;
analyzing the magnitude of an N th harmonic of the oscillation frequency, where N>1, wherein said analyzing comprises determining at least one operating parameter based, at least in part, on a transition of the magnitude of the Nth harmonic past a threshold; and
setting a magnitude of the drive force based, at least in part, on said analyzing.

18. The method of claim 17 , wherein N=3.

19. The method of claim 17 , wherein said operating, analyzing, and setting are performed upon turning on the MEMS sensor.

20. The method of claim 17 , wherein said operating, analyzing, and setting are performed during production of the MEMS sensor.

21. The method of claim 17 , wherein said analyzing comprises analyzing a functional relationship between drive force applied to the proof mass and the magnitude of the N th harmonic.

22. A MEMS sensor comprising:
a stationary component;
a proof mass that is moveable relative to the stationary component;
a mechanical motion limiter that limits oscillation amplitude of the proof mass; and
a drive circuit that applies a drive force to the proof mass to cause the proof mass to oscillate at an oscillation frequency;
wherein during steady state operation of the MEMS sensor, the mechanical motion limiter operates on the proof mass to limit a steady state amplitude of the proof mass, and
wherein the magnitude of the drive force is determined by transition of the oscillation frequency away from the natural frequency of the proof mass.

23. The MEMS sensor of claim 22 , wherein the mechanical motion limiter comprises an impact-stop.

24. The MEMS sensor of claim 22 , wherein the mechanical motion limiter comprises a non-impact limiter that is continually in contact with the proof mass.

Assignees

• Invensense Inc

Inventors

• Thompson Matthew J
• Gurin Ilya

Classifications

• B81B3/0018

  Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators · CPC title

• B81C99/0045

  End test of the packaged device · CPC title

• G01C19/5755 Primary

  the devices having a single sensing mass · CPC title

• B81B2201/0242

  Gyroscopes · CPC title

• B81B2201/02

  Sensors · CPC title