Cleaner composition for process of manufacturing semiconductor and display

Patent metadata

Field	Value
Publication number	US-9902925-B2
Application number	US-201514964267-A
Country	US
Kind code	B2
Filing date	Dec 9, 2015
Priority date	Jan 26, 2015
Publication date	Feb 27, 2018
Grant date	Feb 27, 2018

Abstract

There is provided a cleaner composition for a process of manufacturing a semiconductor and a display. The cleaner composition includes 0.01 to 5.0 wt % of amino acid-based chelating agent, 0.01 to 1.5 wt % of organic acid, 0.01 to 1.0 wt % of inorganic acid, 0.01 to 5.0 wt % of alkali compound, and the balance of deionized water and is based on acidic water with pH levels of 1 to 5. The cleaner composition may enhance metal contaminants removal capability and have a function to remove particles and organic contaminants, and prevent corrosion of copper and reverse adsorption of copper. Thus, cleaner composition may be used for various purposes of etching copper, removing residues, and a cleaner by adjusting an etch rate.

First claim

What is claimed is:

1. A cleaner composition for a process of manufacturing a semiconductor and a display, the cleaner composition comprising:
0.01 to 5.0 wt % of amino acid-based chelating agent;
0.01 to 1.5 wt % of organic acid;
0.01 to 1.0 wt % of inorganic acid;
0.01 to 5.0 wt % of alkali compound; and
the balance of deionized water,
wherein the cleaner composition is based on acidic water with pH levels of 1 to 5.

2. The cleaner composition as claimed in claim 1 , wherein the amino acid-based chelating agent is at least one selected from the group consisting of glycine, ethylenediaminetetraacetic acid, and cyclohexanediaminetetraacetic acid.

3. The cleaner composition as claimed in claim 1 , wherein the organic acid is at least one selected from the group consisting of a lactic acid and acetic acid.

4. The cleaner composition as claimed in claim 1 , wherein the inorganic acid is a nitric acid or sulfuric acid.

5. The cleaner composition as claimed in claim 1 , wherein the alkali compound is at least one selected from the group consisting of tetramethylammonium hydroxide, tetrabutylammonium hydroxide, tetraethylammonium hydroxide, and trimethylammonium chloride.

6. The cleaner composition as claimed in claim 1 , further comprising 0.01 to 0.1 wt % of oxidizing agent, wherein the oxidizing agent is at least one selected from the group consisting of hydrogen peroxide, sodium hypochlorite, chlorous acid, chlorine dioxide.

7. The cleaner composition as claimed in claim 1 , further comprising 0.01 to 5.0 wt % of benzotriazole-based corrosion inhibitor.

8. The cleaner composition as claimed in claim 7 , wherein the benzotriazole-based corrosion inhibitor is at least one selected from the group consisting of 6-chloro-1-methoxy-benzotriazole, 2,2′-[(1H-benzotriazole-1-ylmethyl)imino]bisethanol.

9. The cleaner composition as claimed in claim 1 , wherein the cleaner composition is based on subacidic water with pH levels of 3 to 5.

10. A cleaner composition for a process of manufacturing a semiconductor and a display, the cleaner composition comprising:
0.01 to 5.0 wt % of amino acid-based chelating agent;
0 01 to 1.5 wt % of organic acid;
0.01 to 0.1wt % of oxidizing agent;
0.01 to 5.0 wt % of alkali compound; and
the balance of deionized water,
wherein the cleaner composition is based on acidic water with pH levels of 1 to 5.

11. The cleaner composition as claimed in claim 10 , wherein the amino acid-based chelating agent is at least one selected from the group consisting of glycine, ethylenediaminetetraacetic acid, and cyclohexanediaminetetraacetic acid.

12. The cleaner composition as claimed in claim 10 , wherein the organic acid is at least one selected from the group consisting of a lactic acid and acetic acid.

13. The cleaner composition as claimed in claim 10 , wherein the alkali compound is at least one selected from the group consisting of tetramethylammonium hydroxide, tetrabutylammonium hydroxide, tetraethylammonium hydroxide, and trimethylammonium chloride.

14. The cleaner composition as claimed in claim 10 , wherein the oxidizing agent is at least one selected from the group consisting of hydrogen peroxide, sodium hypochlorite, chlorous acid, chlorine dioxide.

15. The cleaner composition as claimed in claim 10 , further comprising 0.01 to 5.0 wt % of benzotriazole-based corrosion inhibitor.

16. The cleaner composition as claimed in claim 15 , wherein the benzotriazole-based corrosion inhibitor is at least one selected from the group consisting of 6-chloro-1-methoxy-benzotriazole, 2,2′-[(1H-benzotriazole-1-ylmethyl)imino]bisethanol.

17. The cleaner composition as claimed in claim 10 , wherein the cleaner composition is based on subacidic water with pH levels of 3 to 5.

Assignees

• Samsung Display Co Ltd
• Ltcam Co Ltd
• Samsung Display Co Ltd

Inventors

• Lee Dong Eon
• Ju Jin Ho
• Woo Jun Hyuk
• Lee Seok Ho

Classifications

• H10P70/20

  Cleaning during device manufacture · CPC title

• C11D7/3209

  Amines or imines with one to four nitrogen atoms; Quaternized amines · CPC title

• C11D3/3947

  Liquid compositions · CPC title

• C11D7/265

  Carboxylic acids or salts thereof · CPC title

• C11D7/3245 Primary

  Aminoacids · CPC title